Abrasive particles, method of manufacturing the abrasive particles, and method of manufacturing chemical mechanical polishing slurry
Disclosed are abrasive particles, a method for manufacturing the abrasive particles, and a method for manufacturing a Chemical Mechanical Polishing (CMP) slurry. The method for manufacturing abrasive particles for the CMP slurry includes preparing a raw material precursor, drying the raw material precursor, and calcining the dried raw material precursor using a calcination furnace where a gas atmosphere having relatively less oxygen in comparison with an air atmosphere is created.
1. A method for manufacturing abrasive particles for a Chemical Mechanical Polishing (CMP) slurry, the method comprising:
preparing a raw material precursor;
drying the raw material precursor;
calcining the dried raw material precursor using a calcination furnace where a gas atmosphere having relatively less oxygen in comparison with an air atmosphere is created; and
supplying oxygen to the furnace at a flow rate of approximately 10 liters per minute to approximately 20 liters per minute.
2. The method of claim 1 , wherein a dry rate of the raw material precursor due to the drying is about 30% to 50%.
3. The method of claim 1 , wherein the calcining is performed at a temperature of about 500° C. to 900° C.
4. The method of claim 1 , wherein the raw material precursor includes a cerium carbonate.
5. A method for manufacturing a CMP slurry, the method comprising:
preparing a raw material precursor, drying the raw material precursor, and calcining the dried raw material precursor using a calcination furnace where a gas atmosphere having relatively less oxygen in comparison with an air atmosphere is created to prepare abrasive particles while supplying oxygen to the furnace at a flow rate of approximately 10 liters per minute to approximately 20 liters per minute;
mixing the prepared abrasive particles, a solvent, and a dispersing agent to prepare a mixture for manufacturing a slurry;
milling the mixture;
filtering the milled mixture; and
aging the filtered mixture after the filtered mixture is fed into an aging container.
6. The method of claim 5 , further comprising:
rotating the aging container.
7. The method of claim 5 , wherein the filtering is performed for about two to four hours.
8. The method of claim 5 , wherein the aging is performed for about two to four hours.
9. The method of claim 6 , wherein the aging container is rotated with respect to a rotation axis outside of the aging container.
10. The method of claim 6 , wherein the rotating of the aging container is performed at a speed of about 500 RPM to 20,000 RPM.
11. The method of claim 10 , wherein the rotating of the aging container is performed at a speed of about 2,000 RPM to 5,000 RPM for about 5 minutes to 15 minutes.
12. The method of claim 6 , wherein the filtering, the aging, and the rotating are repeatedly performed at least two times.
13. Abrasive particles for a CMP slurry manufactured according to claim 1 , and in which a ratio of a main peak to a side peak on an XRD graph is about 2 to 3.