Method for producing a semiconductor component arrangement comprising a trench transistor
Disclosed is a semiconductor component arrangement and a method for producing a semiconductor component arrangement. The method comprises producing a trench transistor structure with at least one trench disposed in the semiconductor body and with at least an gate electrode disposed in the at least one trench. An electrode structure is disposed in at least one further trench and comprises at least one electrode. The at least one trench of the transistor structure and the at least one further trench are produced by common process steps. Furthermore, the at least one electrode of the electrode structure and the gate electrode are produced by common process steps.
1. A method for producing a semiconductor component arrangement, the method comprising:
producing a trench transistor structure including at least one trench disposed in the semiconductor body and at least one gate electrode disposed in the at least one trench;
producing an electrode structure disposed in at least one further trench, the electrode structure comprising at least one electrode, the electrode structure being produced such that the at least one electrode electrically connects at least two interconnects disposed in or on the semiconductor body;
wherein the at least one trench of the transistor structure and the at least one further trench are produced by common process steps; and/or
wherein the gate electrode and the at least one electrode of the electrode structure are produced by common process steps.
2. The method of claim 1 ,
wherein the at least one trench of the transistor structure and the at least one further trench are produced by common process steps; and
wherein the gate electrode and the at least one electrode of the electrode structure are produced by common process steps.
3. The method of claim 1 , further comprising:
producing at least one field electrode of the trench transistor structure in the at least one trench;
producing the electrode structure to comprise at least two electrodes;
wherein the at least two electrodes of the electrode structure and the at least one gate electrode and the at least one field electrode are produced by common process steps.
4. The method of claim 1 , wherein the at least one trench of the trench transistor structure and the at least one further trench are produced having different trench widths.
5. The method of claim 1 , wherein prior to producing the at least one gate electrode of the trench transistor structure and prior to producing the at least one electrode of the electrode structure, dielectric layers are produced on surfaces of the at least one trench of the trench transistor structure and the at least one further trench.
6. The method of claim 1 , wherein the trench transistor structure comprises a body zone and a source zone which are adjacent to the at least one trench of the trench transistor structure, wherein the body zone and the source zone are produced after producing the at least one gate electrode.
7. The method of claim 1 , wherein producing the capacitor dielectric comprises the steps of
thermally oxidizing surfaces of the at least one further trench, and
protecting the trench transistor structure against an oxidation by a protection layer during said thermal oxidation step.
8. The method of claim 7 , wherein the gate dielectric is produced after the removal of the protection layer.