Fabricating method of semiconductor elements
A fabricating method of a semiconductor element includes the following steps. First, a substrate is provided. A metal gate structure and source/drain electrodes are already formed on the substrate. An amorphization process is performed in the source/drain electrodes to form an amorphous portion. An interlayer dielectric layer is formed on surfaces of the source/drain electrodes and a through hole contact is formed within the interlayer dielectric layer. A silicidation process is performed with the through hole contact and the amorphous portion of the source/drain electrodes to form a metal silicide layer. The fabricating method is capable of finishing the formation of the metal silicide layer in the condition that diameters of the through hole contact is becoming smaller and smaller.
1. A fabricating method of a semiconductor element, comprising:
providing a substrate, wherein a metal gate structure and source/drain electrodes are formed on the substrate;
performing an amorphization process in the source/drain electrodes to form an amorphous portion therein;
forming an interlayer dielectric layer covering the source/drain electrodes and forming a through hole contact in the interlayer dielectric layer; and
performing a silicidation process with the amorphous portion of the source/drain electrodes and the through hole contact to form a metal silicide layer on a surface of the source/drain electrodes;
wherein the amorphization process is performed both prior to the interlayer dielectric is formed and after the through hole contact is formed.
2. The fabricating method of a semiconductor element of claim 1 , wherein the substrate is a silicon substrate, the metal gate structure comprises a metal gate and a high-k dielectric layer.
3. The fabricating method of a semiconductor element of claim 1 , wherein the source/drain electrodes are embedded electrodes formed by epitaxy growing of a material selected from a group consisting of silicon, germanium silicide, and silicon carbide.
4. The fabricating method of a semiconductor element of claim 1 , wherein the amorphization process is a pre-amorphization implant which utilizes particles to destroy the crystalline structure of the source/drain electrodes.
5. The fabricating method of a semiconductor element of claim 4 , wherein the particles comprises germanium or arsenic.
6. The fabricating method of a semiconductor element of claim 4 , wherein the pre-amorphization implant is performed at an angle to a top surface of the source/drain electrodes.
7. The fabricating method of a semiconductor element of claim 1 , wherein the silicidation process comprises:
depositing a metal layer, and
performing a heat process to react the metal layer with the amorphous portion to form the metal silicide layer.
8. The fabricating method of a semiconductor element of claim 7 , wherein the metal layer consists of a metal selected from a group consisting of nickel, cobalt and titanium, and the metal silicide layer is nickel silicide (NiSi), cobalt silicide (CoSi), or titanium silicide (TiSi).
9. The fabricating method of a semiconductor element of claim 7 , wherein the heat process is a rapid thermal process or a laser-spike annealing process.
10. The fabricating method of a semiconductor element of claim 7 , further comprising removing a remaining metal layer.
11. The fabricating method of a semiconductor element of claim 7 , wherein the metal layer is deposited by a physical vapor deposition process, a chemical vapor deposition process, or an electroless metal deposition process.