Semiconductor device

1. A semiconductor device, comprising:

a substrate;

a gate structure disposed on the substrate, wherein the gate structure comprises a high-k dielectric layer, wherein the high-k dielectric layer is U-shaped;

a first seal layer disposed on a sidewall of the gate structure, wherein the first seal layer is an oxygen-free seal layer and a first spacer, and is non-L-shaped; and

a second seal layer disposed on a sidewall of the first spacer, wherein the second seal layer comprises a material different from the first seal layer, and the second seal layer comprises an L-shaped seal layer.

2. The semiconductor device of claim 1 , wherein the etching rate of the second seal layer is different from the etching rate of the first seal layer.

3. The semiconductor device of claim 1 , further comprising a second spacer disposed on the second seal layer.

4. The semiconductor device of claim 1 , wherein the gate structure comprises:

a gate insulating layer;

the high-k dielectric layer disposed on the gate insulating layer; and

a polysilicon gate disposed on the high-k dielectric layer.

5. The semiconductor device of claim 1 , wherein the gate structure comprises:

a gate insulating layer;

the high-k dielectric layer disposed on the gate insulating layer; and

a metal gate disposed on the high-k dielectric layer.

6. A method for fabricating semiconductor device, comprising:

providing a substrate;

forming a gate structure on the substrate;

forming a first seal layer on a sidewall of the gate structure, wherein the first seal layer is an oxygen-free seal layer and a first spacer, and is non-L-shaped;

forming a lightly doped drain in the substrate adjacent to two sides of the gate structure;

forming a L-shaped second seal layer on a sidewall of the first spacer, wherein the L-shaped second seal layer comprises a material different from the first seal layer; and

forming a U-shaped high-k dielectric layer in the gate structure.

7. The method of claim 6 , wherein after forming the lightly doped drain further comprises:

performing a first etching process to partially remove the first seal layer before forming the lightly doped drain for forming the remaining first seal layer into a first spacer on the sidewall of the gate structure;

forming a second seal layer on the gate structure, the first spacer, and the substrate;

forming a third seal layer on the second seal layer;

performing a second etching process to partially remove the third seal layer for forming a second spacer; and

performing a third etching process to partially remove the second seal layer for forming the L-shaped second seal layer on a sidewall of the first spacer.

8. The method of claim 7 , wherein the first seal layer comprises silicon nitride, the second seal layer comprises silicon oxide, and the third seal layer comprises silicon nitride.

9. The method of claim 7 , wherein the first etching process comprises an etching back process, the second etching process comprises a dry etching process, and the third etching process comprises a wet etching process.

10. A semiconductor device, comprising:

a substrate;

a gate structure disposed on the substrate, wherein the gate structure comprises a high-k dielectric layer, wherein the high-k dielectric layer is U-shaped;

a first seal layer disposed on a sidewall of the gate structure, wherein the first seal layer is an oxygen-free seal layer non-L-shaped; and

a second seal layer disposed on a sidewall of the first seal layer, wherein the second seal layer comprises a material different from the first seal layer and the second seal layer is L-shaped.