Method for placing a component onto a target platform by an apparatus using a probe

1. A method for placing a component onto a target platform by an apparatus, the method comprising:

sensing by a multiple-sensor probe a relative position of one or more reference marks or one or more alignment marks with respect to the multiple-sensor probe wherein:

the component includes the one or more alignment marks and at least one contact,

the target platform includes the one or more reference marks, and

the multiple-sensor probe includes a plurality of sensors.

2. The method of claim 1 further comprising:

sensing a first relative position of the multiple-sensor probe with respect to the one or more reference marks,

sensing a second relative position of the one or more alignment marks with respect to the multiple-sensor probe, and

monitoring an overlap status between the multiple-sensor probe and the one or more reference marks or the one or more alignment marks to align the component to the target platform.

3. The method of claim 1 wherein one of the plurality of sensors includes a contact sensor selected from at least a resistance sensor or a current sensor.

4. The method of claim 1 wherein one of the plurality of sensors includes a non-contact sensor selected from at least a capacitance sensor, an optical sensor, a photo-detector, or a photo-diode.

5. The method of claim 1 further comprising:

monitoring whether or not the one or more alignment marks or the one or more reference marks is within sensing range of the multiple-sensor probe.

6. The method of claim 1 wherein sensing includes detecting displacement between a target and a region of the multiple-sensor probe, the target including the one or more alignment marks or the one or more reference marks.

7. The method of claim 1 wherein sensing includes detecting displacement between a center of a target and a center of the multiple-sensor probe, and the target includes the one or more alignment marks or the one or more reference marks.

8. The method of claim 1 wherein the multiple-sensor probe further includes:

a plurality of contact sensors, and

an anisotropic conductive elastomer laminated on a surface of the multiple-sensor contact probe.

9. The method of claim 1 further comprising:

aligning the multiple-sensor probe to the one or more reference marks; and

aligning the one or more alignment marks to the aligned multiple-sensor probe.

10. The method of claim 1 further comprising:

sensing a plurality of reference marks by the multiple-sensor probe wherein the target platform includes the plurality of reference marks; and

detecting orientation error between the target platform and the multiple-sensor probe.

11. The method of claim 1 including:

sensing a plurality of alignment marks by the multiple-sensor probe wherein the component includes the plurality of alignment marks; and

detecting orientation error between the component and the multiple-sensor probe.

12. The method of claim 1 further comprising:

providing feedback by the multiple-sensor probe to the apparatus for component position adjustment.

13. The method of claim 1 wherein the component further includes a contact pitch smaller than 0.5mm.

14. The method of claim 1 wherein the component further includes greater than two-hundred contacts.

15. The method of claim 1 wherein the component is a bare-die integrated circuit or a stack of bare die integrated circuits.

16. The method of claim 1 wherein the target platform is a bare-die integrated circuit or a stack of bare die integrated circuit.

17. The method of claim 1 further comprising:

adapting the one or more alignment marks to have a predetermined spatial relationship to a contact array on the component.

18. The method of claim 1 further comprising:

adapting the one or more reference marks to have a predetermined spatial relationship to a contact land pattern on the target platform.

19. A method for placement of a component onto a target platform by an apparatus, the method comprising:

recording by a first plurality of latches:

a size of a reference mark on the target platform, and

a relative position of the reference mark with respect to a multiple-sensor probe including a plurality of sensors wherein the first plurality of latches is coupled to the plurality of sensors;

aligning by the apparatus the multiple-sensor probe to the reference mark;

recording by a second plurality of latches an instantaneous positional relationship between an alignment mark of the component and the aligned multiple-sensor probe; and

aligning by the apparatus the component to the aligned multiple-sensor probe, wherein the second plurality of latches is coupled to the plurality of sensors.

20. The method of claim 19 further comprising:

decoupling by the multiple-sensor probe the alignment of the component to the target platform from an imperfection in an outline of a component package, a cut of a die, or an imperfection in the target substrate.

21. The method of claim 19 wherein the multiple-sensor probe further includes an anisotropic conductive elastomer laminated on a surface of the multiple-sensor probe.

22. The method of claim 19 further comprising:

determining by the apparatus an achieved alignment responsive to a predetermined relationship between a subset of the first plurality of latches and a subset of the second plurality of latches wherein:

the recording by the first plurality of latches includes recording the size and relative position of the reference mark with respect to the multiple-sensor probe in the subset of the first plurality of latches, and

the recording by the second plurality of latches includes recording the instantaneous positional relationship between the alignment mark and the multiple-sensor probe in the subset of the second plurality of latches.

23. The method of claim 19 wherein the multiple-sensor probe further includes an array of test points corresponding to the plurality of sensors, wherein the array of test points is arranged in regular configuration.

24. The method of claim 19 wherein the multiple-sensor probe further includes an array of test points corresponding to the plurality of sensors, wherein the array of test points is arranged in irregular configuration.

25. The method of claim 19 further comprising:

determining by the apparatus an achieved alignment when a subset of the first plurality of latches and a subset of the second plurality of latches record the alignment mark and the reference mark have a common center wherein:

the multiple-sensor probe further includes an array of test points corresponding to the plurality of sensors,

the subset of the first plurality of latches corresponds to the size of the reference mark, and

the subset of the second plurality of latches corresponds to an overlap between the alignment mark and the reference mark.

26. A method for placement of a component onto a target platform by an apparatus, the method comprising:

sensing by a capacitance probe a relative position of one or more reference marks or one or more alignment marks with respect to the capacitance probe

aligning by the apparatus the capacitance probe to the one or more reference marks, and

aligning by the apparatus the one or more alignment marks to the aligned capacitance probe wherein:

the component includes the one or more alignment marks,

the target platform includes the one or more reference marks, and

the capacitance probe includes a plurality of capacitance sensors.