Magnetic actor and a method for its installation

1. A magnetic actor comprising:

two lateral parts that are arranged opposite each other with permanent magnets, wherein each lateral part comprises at least two permanent magnets in a Halbach configuration; and

a coil that is arranged between the two lateral parts in such a way that the coil is movable relative to the two lateral parts, wherein a force is generated between the two lateral parts when the coil is triggered, and wherein the permanent magnets are held inside a slide-in frame that is open only on one side for insertion of a magnet and that avoids the magnets becoming distorted during a slide-in action; and

wherein the insertion height of the slide-in frame is smaller than the diagonal of the permanent magnets in a plane that extends in the direction of the insertion.

2. The magnetic actor as claimed in claim 1 wherein each of the two lateral parts comprises at least three permanent magnets that are disposed in a Halbach configuration.

3. The magnetic actor as claimed in claim 1 wherein each of the two lateral parts comprises at least two rows of magnets that are disposed in a Halbach configuration adjacent to each other.

4. The magnetic actor as claimed in claim 3 wherein the slide-in frame comprises a bar that is disposed between the rows.

5. The magnetic actor as claimed in claim 1 wherein the two lateral parts are connected with a plate respectively at two sides that are opposite each other.

6. The magnetic actor as claimed in claim 1 wherein the lateral parts comprise an immobilization plate that is connected with the slide-in frame.

7. The magnetic actor as claimed in claim 6 wherein the immobilization plate comprises clamping means for clamping the permanent magnets in place.

8. The magnetic actor as claimed in claim 6 wherein the immobilization plate comprises screws for clamping the permanent magnets in place.

9. The magnetic actor as claimed in claim 1 wherein the slide-in frame comprises clamping means for clamping the permanent magnets in place.

10. The magnetic actor as claimed in claim 1 wherein the slide-in frame comprises adjusting means for positioning the slide-in frame.

11. A vibration isolation system for vibration-isolated support of a lithography or wafer inspection device, comprising:

at least one bearing that is effective at least in a vertical and/or horizontal direction; and

a magnetic actor as claimed in claim 1 that can be triggered for active vibration isolation.

12. The vibration isolation system as claimed in claim 11 characterized in that the coil is fastened on a vibration-isolated side of the vibration isolation system.

13. The magnetic actor as claimed in claim 1 wherein each of the two lateral parts comprises five permanent magnets that are disposed in a Halbach configuration.

14. The magnetic actor as claimed in claim 1 wherein the slide-in frame comprises screws for clamping the permanent magnets in place.

15. The magnetic actor as claimed in claim 1 wherein the slide-in frame comprises bore holes for an adjustment pin, for positioning the slide-in frame.