Piezoelectric microspeaker and method of fabricating the same
A piezoelectric microspeaker fabricated by a method including: forming a lower drive unit by forming a first drive electrode by depositing and etching a first thin conductive layer on a substrate, forming a first piezoelectric plate by depositing and etching a first piezoelectric layer on the first drive electrode, and forming a first common electrode by depositing and etching a second conductive layer on the first piezoelectric plate; after forming the lower drive unit, forming a diaphragm by depositing a non-conductive layer on the first common electrode; and forming an upper drive unit by forming a second common electrode by depositing and etching a third conductive layer on the diaphragm, forming a second piezoelectric plate by depositing and etching a second piezoelectric layer on the second common electrode, and forming a second drive electrode by depositing and etching a fourth conductive layer on the second piezoelectric plate.
1. A piezoelectric microspeaker fabricated according to a method comprising:
forming a lower drive unit by:
forming a first drive electrode by depositing a first thin conductive layer on a substrate and etching the first conductive layer,
forming a first piezoelectric plate by depositing a first piezoelectric layer on the first drive electrode and etching the first piezoelectric layer, and
forming a first common electrode by depositing a second conductive layer on the first piezoelectric plate and etching the second conductive layer;
after the forming the lower drive unit, forming a diaphragm by depositing a non-conductive layer on the first common electrode; and
forming an upper drive unit by:
forming a second common electrode by depositing a third conductive layer on the diaphragm and etching the third conductive layer,
forming a second piezoelectric plate by depositing a second piezoelectric layer on the second common electrode and etching the second piezoelectric layer, and
forming a second drive electrode by depositing a fourth conductive layer on the second piezoelectric plate and etching the fourth conductive layer.
2. A piezoelectric microspeaker fabricated according to a method comprising:
forming a lower drive unit by depositing a first conductive layer on a substrate, etching the first conductive layer, depositing a first piezoelectric layer on the first conductive layer, and etching the first piezoelectric layer;
after the forming the lower drive unit, forming a diaphragm by depositing a second conductive layer on the lower drive unit and etching the second conductive layer; and
forming an upper drive unit by depositing a second piezoelectric layer on the diaphragm, etching the second piezoelectric layer, depositing a third conductive layer on the second piezoelectric layer, and etching the third conductive layer.
3. The piezoelectric microspeaker of claim 1 , wherein the non-conductive layer comprises a polymer.
4. The piezoelectric microspeaker of claim 1 , wherein a central region of the diaphragm protrudes in accordance with a shape of the lower drive unit, and wherein an edge region of the diaphragm and the lower drive unit are substantially co-planar.
5. The piezoelectric microspeaker of claim 1 , wherein the method further comprises:
prior to the forming the lower drive unit, etching a part of the substrate to form a cavity, wherein the lower drive unit is formed substantially within the cavity.
6. The piezoelectric microspeaker of claim 5 , wherein the diaphragm is substantially planar.
7. The piezoelectric microspeaker of claim 2 , wherein a central region of the diaphragm protrudes in accordance with a shape of the lower drive unit, and
wherein an edge region of the diaphragm and the lower drive unit are substantially co-planar.
8. The piezoelectric microspeaker of claim 2 , wherein the method further comprises:
prior to the forming the lower drive unit, etching a part of the substrate to form a cavity, wherein the lower drive unit is formed substantially within the cavity.
9. The piezoelectric microspeaker of claim 2 , wherein the diaphragm is substantially planar.