IP Library Granted Patent US 8,562,293
Granted Patent B2
US 8,562,293 · App. 12/682,067 · Granted Oct 22, 2013

Multi-stage pump rotor for a turbomolecular pump

Inventor: Heinrich Engländer (Linnich, DE)
Assignee: Oerlikon Leybold Vacuum GmbH
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,562,293
App. No.
12/682,067
Granted
Oct 22, 2013
Kind
B2
Abstract

A multi-stage pump rotor ( 10 ) for a turbomolecular pump has at least two separate blade disk rings ( 17 ), each having a motor ring ( 12 ) and at least one blade disk ( 14 ). A cylindrical reinforcement pipe ( 18 ), which surrounds the rotor rings ( 12 ) of the blade disk rings ( 17 ) on the outside without clearance, is provided between the blade disks ( 14 ) of adjacent blade disk rings ( 17 ). The reinforcement pipe ( 18 ) absorbs a large part of the tangential forces occurring during operation such that the pump rotor ( 10 ) has improved stability at high rotor speeds.

Claims (22)

1. A multi-stage pump rotor for a turbomolecular pump, said pump rotor comprising:

at least two separate blade disk ring elements respectively having a rotor ring and at least one blade disk, and

a cylindrical reinforcement pipe arranged between the blade disks of adjacent blade disk ring elements and enclosing the rotor rings of the blade disk rings on the outside without clearance.

2. The multi-stage pump rotor for a turbomolecular pump according to claim 1 , wherein the material of the reinforcement pipe is different from that of the blade disk rings.

3. The multi-stage pump rotor for a turbomolecular pump according to claim 1 , wherein the material of the reinforcement pipe is carbon-fiber-reinforced plastic.

4. The multi-stage pump rotor for a turbomolecular pump according to claim 1 , wherein at least one blade disk ring consists of a sole blade disk.

5. The multi-stage pump rotor for a turbomolecular pump according to claim 1 , wherein the rotor rings rest on each other and are axially clamped in a direct abutting relationship with each other between two rotor-shaft clamping bodies.

6. The multi-stage pump rotor for a turbomoledcular pump according to claim 5 , wherein the abutting rotor rings define cylindrical outer surfaces, and the cylindrical reinforcement pipe has a cylindrical inner surface which engages the cylindrical outer surfaces of the abutting rotor rings without clearance.

7. The multi-stage pump rotor for a turbomolecular pump according to claim 1 , wherein the rotor rings of the blade disk ring elements are mounted surrounding at least one rotor support body.

8. The multi-stage pump rotor for a turbomolecular pump according to claim 7 , wherein the rotor support body is made at least partially of carbon-fiber-reinforced plastic.

9. The multi-stage pump rotor for a turbomolecular pump according to claim 7 , wherein the rotor support body defines a cavity for accommodation of a rotor bearing.

10. The multi-stage pump rotor for a turbomolecular pump according to claim 7 , further comprising a rotor bearing, wherein said rotor bearing is a magnetic bearing.

11. The multi-stage pump rotor for a turbomolecular pump, the pump rotor including:

at least two separate blade disk ring assemblies, each having a rotor ring and a blade disk;

a rotor support body on which the blade disk ring assemblies are mounted with the rotor rings directly abutting each other;

a cylindrical reinforcement pipe arranged between the blade disks of adjacent blade disk ring assemblies with abutting rotor rings and encircling the abutting rotor rings of the blade disk ring assemblies on a cylindrical outside surface of the abutting rotor rings without clearance such that the reinforcement pipes take up tangential forces generated by centrifugal force in the abutting rotor rings during rotation of the pump rotor.

12. The multi-stage pump rotor for a turbomolecular pump according to claim 11 , wherein:

the rotor support body is made at least partially of fiber-reinforced plastic.

13. The multi-stage pump rotor for a turbomolecular pump according to claim 11 , wherein the rotor rings are axially clamped between two rotor-shaft clamping bodies in a self-centering manner.

14. The multi-stage pump rotor for a turbomolecular pump according to claim 11 , wherein the

reinforcement pipe is constructed of fiber-reinforced plastic.

15. The multi-stage pump rotor for a turbomolecular pump according to claim 11 , wherein the rotor support body includes a fiber-reinforced plastic cylinder with an outer diameter that matches an inner diameter of the rotor rings such that the rotor rings are supported on and encircling the fiber-reinforced cylinder.

Assignments (2)
CHANGE OF NAME Recorded Nov 21, 2016
From: OERLIKON LEYBOLD VACUUM GMBH
To: LEYBOLD GMBH
Reel/Frame 040653/0016 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 25, 2010
From: ENGLAENDER, HEINRICH
To: OERLIKON LEYBOLD VACUUM GMBH
Reel/Frame 024433/0853 →
Priority Claims (1)
DE 10 2007 048 703 · Oct 11, 2007 · national
Continuity (1)
Related Publication 20100290915A1 · Nov 18, 2010