Dual sided workpiece handling
A method includes positioning at least one dual sided workpiece on an assembly in a process chamber to expose a first side of the at least one dual sided workpiece, treating the first side of the at least one dual sided workpiece, reorienting a portion of the assembly in the process chamber to expose a second side of the at least one dual sided workpiece, the second side opposing the first side, and treating the second side. A processing apparatus including a process chamber defining an enclosed volume and a dual sided workpiece assembly disposed in the enclosed volume is also provided.
1. A method comprising:
positioning at least one dual sided workpiece on an assembly in a process chamber to expose a first side of the at least one dual sided workpiece;
accelerating ions towards the first side of the at least one dual sided workpiece during a first time interval;
flipping a portion of the assembly in the process chamber about a flipping axis to expose a second side of the at least one dual sided workpiece, the second side opposing the first side; and
accelerating ions towards the second side during a second time interval different than the first time interval.
2. The method of claim 1 , wherein the at least one dual sided workpiece remains in the process chamber during a time interval between the first time interval and the second time interval.
3. The method of claim 2 , wherein the method further comprises pumping the process chamber to a vacuum condition and maintaining the vacuum condition during the first time interval, the second time interval, and the time interval between the first time interval and the second time interval.
4. The method of claim 1 , wherein the accelerating ions are provided by generating a plasma in the process chamber, and biasing the at least one dual sided workpiece to accelerate ions in the plasma towards the first side and the second side.
5. The method of claim 4 , wherein the at least one dual sided workpiece comprises a magnetic disk, and wherein the accelerating ions a retic characteristic of a region of the magnetic disk.
6. The method of claim 1 , wherein the accelerating ions are provided by generating an ion beam and directing the ion beam having the ions towards the at least one dual sided workpiece.
7. The method of claim 1 , wherein flipping the portion of the assembly comprises flipping the portion 180 ° about the flipping axis.
8. The method of claim 4 , wherein the at least one dual sided workpiece comprises a plurality of dual sided magnetic disks, and the method further comprises:
supporting the plurality of dual sided magnetic disks with a carrier, the carrier defining a workpiece plane, and
rotating the carrier about a rotation axis orthogonal to the workpiece plane to position one of the plurality of magnetic disks in a desired position.
9. The method of claim 8 , wherein the carrier has a disk shape having about a 300 millimeter diameter.
10. The method of claim 8 , further comprising securing each of the plurality of dual sided magnetic disks to an associated slot of the carrier with a pair of biasing members, and biasing each of the plurality of dual sided magnetic disks via an electrical path including the pair of biasing members.