Nano-sensor array
View Patent ↗In one embodiment, a method is provided for the manufacture of a nano-sensor array. A base having a sensing region is provided along with a plurality of nano-sensors. Each of the plurality of nano-sensors is formed by: forming a first nanoneedle along a surface of the base, forming a dielectric on the first nanoneedle, and forming a second nanoneedle on the dielectric layer. The first nanoneedle of each sensor has a first end adjacent to the sensing region of the base. The second nanoneedle is separated from the first nanoneedle by the dielectric and has a first end adjacent the first end of the first nanoneedle. The base is provided with a fluidic channel. The plurality of nano-sensors and the fluidic channel are configured and arranged with the first ends proximate the fluidic channel to facilitate sensing of targeted matter in the fluidic channel.
1. A method comprising:
providing a base with a fluidic channel and a plurality of nano-sensors; and
forming each of the plurality of nano-sensors by:
forming a first nanoneedle along a surface of the base, the first nanoneedle having a first end in a first region,
forming a dielectric on the first nanoneedle, and
forming a second nanoneedle on the dielectric, the second nanoneedle separated from the first nanoneedle by the dielectric and having a first end adjacent the first end of the first nanoneedle,
wherein the plurality of nano-sensors and the fluidic channel are configured and arranged with the first ends in the fluidic channel to facilitate sensing of targeted matter in the fluidic channel via an impedance between the first and second nanoneedles that is responsive to the presence of the targeted matter; and
wherein providing the base with the fluidic channel includes etching the fluidic channel into the base including a portion located below a portion of the first nanoneedle extending over the fluidic channel.
2. A method comprising:
providing a base with a fluidic channel and a plurality of nano-sensors; and
forming each of the plurality of nano-sensors by:
forming a first nanoneedle along a surface of the base, the first nanoneedle having a first end in a first region,
forming a dielectric on the first nanoneedle, and
forming a second nanoneedle on the dielectric, the second nanoneedle separated from the first nanoneedle by the dielectric and having a first end adjacent the first end of the first nanoneedle,
wherein the plurality of nano-sensors and the fluidic channel are configured and arranged with the first ends in the fluidic channel to facilitate sensing of targeted matter in the fluidic channel via an impedance between the first and second nanoneedles that is responsive to the presence of the targeted matter; and
wherein the method further includes depositing a material on the base to form sidewalls of the fluidic channel above the nano-sensors.