Method of manufacturing solid state imaging device, and solid state imaging device
Disclosed herein is a method of manufacturing a solid state imaging device, including the steps of: forming a light receiving portion in a light receiving area of a semiconductor substrate; forming a pad portion in a pad area of the semiconductor substrate; forming a microlens material layer over the light receiving portion and the pad portion; providing the microlens material layer with a microlens corresponding to the light receiving portion; forming a low-reflection material layer on the microlens material layer; etching the microlens material layer and the low-reflection material layer over the pad portion to form an opening; and imparting hydrophilicity to a surface of the low-reflection material layer and an inside portion of the opening by a normal temperature oxygen radical treatment.
1. A method of manufacturing a solid state imaging device, comprising the steps of:
forming a light receiving portion in a light receiving area of a semiconductor substrate;
forming a pad portion in a pad area of the semiconductor substrate;
forming a microlens material layer over the light receiving portion and the pad portion;
forming a microlens in the microlens material layer corresponding to the light receiving portion;
forming a fluorine-containing siloxane film on the microlens material layer, thereby reducing reflection;
etching the microlens material layer and the fluorine-containing siloxane film over the pad portion to form an opening; and
imparting hydrophilicity to a surface of the fluorine-containing siloxane film and an inside portion of the opening by an oxygen radical treatment performed in a temperature range from 25 C to 35 C.
2. A method of manufacturing a solid state imaging device, comprising the steps of:
forming a light receiving portion in a light receiving area of a semiconductor substrate;
forming a pad portion in a pad area of the semiconductor substrate;
forming a microlens material layer over the light receiving portion and the pad portion;
forming a microlens in the microlens material layer corresponding to the light receiving portion;
forming an organic film of a low temperature oxide on the microlens material layer, thereby reducing reflection;
etching the microlens material layer and the organic film over the pad portion to form an opening; and
imparting hydrophilicity to a surface of the organic film of a low temperature oxide and an inside portion of the opening by an oxygen radical treatment performed in a temperature range from 25 C to 35 C.
3. The method according to claim 1 or 2 , comprising the step of imparting hydrophilicity to an upper main surface of the microlens material layer by an oxygen radical treatment.