Thin wafer protection device
A thin wafer protection device includes a wafer having a plurality of semiconductor chips. The wafer has a first side and an opposite second side. A plurality of dies is over the first side of the wafer, and at least one of the plurality of dies is bonded to at least one of the plurality of semiconductor chips. A wafer carrier is over the second side of the wafer. An encapsulating layer is over the first side of the wafer and the plurality of dies, and the encapsulating layer has a planar top surface. An adhesive tape is over the planar top surface of the encapsulating layer.
1. A thin wafer protection device, comprising:
a wafer having a plurality of semiconductor chips, the wafer having a first side and an opposite second side;
a plurality of dies over the first side of the wafer, wherein at least one of the plurality of dies is bonded to at least one of the plurality of semiconductor chips;
a wafer carrier over the second side of the wafer;
an encapsulating layer over the first side of the wafer and the plurality of dies, wherein the encapsulating layer has a planar top surface; and
an adhesive tape over the planar top surface.
2. The thin wafer protection device of claim 1 , further comprising at least one redistribution layer between the plurality of dies and the plurality of semiconductor chips.
3. The thin wafer protection device of claim 1 , wherein the plurality of chips comprise radio frequency chips or logic chips.
4. The thin wafer protection device of claim 1 , wherein the plurality of dies comprise memory chips, radio frequency chips or logic chips.
5. The thin wafer protection device of claim 1 , wherein at least one of the plurality of dies is bonded to more than one of the plurality of semiconductor chips.
6. The thin wafer protection device of claim 1 , wherein the encapsulating layer comprises polyethylene glycol, a wax, a polymer, a polymer-based material, or a combination thereof.
7. The thin wafer protection device of claim 1 , wherein the encapsulating layer comprise a molecular weight of 1500 and a melting temperature greater than 45° C.
8. The thin wafer protection device of claim 1 , wherein the adhesive tape comprises dicing tape or ultraviolet tape.
9. The thin wafer protection device of claim 1 , further comprising through silicon vias (TSVs) arranged to electrically connect the wafer to the plurality of dies.
10. The thin wafer protection device of claim 1 , further comprising a bonding structure between the at least one of the plurality of dies and the at least one of the plurality of semiconductor chips, wherein the bonding structure comprises a solder bump or a copper post.
11. The thin wafer protection device of claim 1 , wherein the adhesive tape comprises dicing tape or ultraviolet tape.
12. A thin wafer protection device, comprising:
a wafer having a plurality of semiconductor chips, the wafer having a first side and an opposite second side;
a plurality of dies over the first side of the wafer, wherein at least one of the plurality of dies is bonded to at least one of the plurality of semiconductor chips;
an adhesive tape over the second side of the wafer; and
an encapsulating layer over the first side of the wafer and the plurality of dies, wherein the encapsulating layer has a planar top surface.
13. The thin wafer protection device of claim 12 , further comprising at least one redistribution layer between the plurality of dies and the plurality of semiconductor chips.
14. The thin wafer protection device of claim 12 , wherein the plurality of chips comprise radio frequency chips or logic chips.
15. The thin wafer protection device of claim 12 , wherein the plurality of dies comprise memory chips, radio frequency chips or logic chips.
16. The thin wafer protection device of claim 12 , wherein at least one of the plurality of dies is bonded to more than one of the plurality of semiconductor chips.
17. The thin wafer protection device of claim 12 , wherein the encapsulating layer comprises polyethylene glycol, a wax, a polymer, a polymer-based material, or a combination thereof.
18. The thin wafer protection device of claim 12 , wherein the encapsulating layer comprise a molecular weight of 1500 and a melting temperature greater than 45° C.
19. A thin wafer protection device, comprising:
a wafer having a plurality of semiconductor chips, the wafer having a first side and an opposite second side;
a plurality of dies over the first side of the wafer, wherein at least one of the plurality of dies is bonded to at least one of the plurality of semiconductor chips; and
an adhesive tape over the second side of the wafer.
20. The thin wafer protection device of claim 19 , further comprising through silicon vias (TSVs) arranged to electrically connect the wafer to the plurality of dies.