Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and methods for the manufacture thereof
A piezoelectric element, a liquid ejecting head and a liquid ejecting apparatus that have improved reliability are provided. Methods for the manufacture thereof are also provided. A piezoelectric element includes a vibration plate having a recess in a first surface, a first electrode formed in the recess, a piezoelectric layer formed on the vibration plate and the first electrode, and a second electrode formed on the piezoelectric layer, wherein an upper surface of the first electrode forms a continuous flat surface together with the first surface.
1. A piezoelectric element comprising
a vibration plate having a recess in a first surface,
a first electrode formed in the recess,
a piezoelectric layer formed on the vibration plate and the first electrode, and
a second electrode formed on the piezoelectric layer, wherein
an upper surface of the first electrode forms a continuous flat surface together with the first surface, and wherein the piezoelectric layer formed on the vibration plate and the first electrode is not present within a volume of the recess.
2. The piezoelectric element according to claim 1 , wherein
the vibration plate is a laminate that includes a first layer constituting the first surface, and
the recess does not penetrate through the first layer.
3. The piezoelectric element according to claim 1 , wherein
the vibration plate is a laminate that includes a first layer constituting the first surface, and
the recess penetrates through the first layer.
4. The piezoelectric element according to claim 2 , wherein
the first layer is zirconium oxide.
5. A liquid ejecting head comprising the piezoelectric element described in claim 4 .
6. A liquid ejecting apparatus comprising the liquid ejecting head described in claim 5 .
7. The piezoelectric element according to claim 1 , wherein the recess has a substantively arc-like shape.
8. The piezoelectric element according to claim 1 , wherein the second electrode at least in-part overlaps on the first electrode.
9. The piezoelectric element according to claim 1 , wherein the vibration plate comprises a first layer, a second layer on the first layer, and a third layer.