Isotope ion microscope methods and systems
Ion microscope methods and systems are disclosed. In general, the systems and methods involve relatively light isotopes, minority isotopes or both. In some embodiments, an isotope of Neon is used.
1. A method, comprising:
using a gas field ion source to form a beam of ions of an isotope of a noble gas; and
using the isotope of the noble gas in the beam of ions to investigate or modify a sample,
wherein the isotope of the noble gas is Ne-20, and an amount of the ions of the isotope of the noble gas is greater than a natural abundance of the isotope of the noble gas.
2. The method of claim 1 , wherein the amount of the ions of the isotope of the noble gas is greater than 95%.
3. The method of claim 2 , further comprising exposing the noble gas to the gas field ion source to form the ion beam, wherein at least 95% of the atoms in the gas are Ne-20 atoms.
4. The method of claim 3 , further comprising:
exposing the sample to the ion beam to cause particles to leave the sample; and
detecting particles to determine information about the sample.
5. The method of claim 4 further comprising passing the ions through ion optics.
6. A method, comprising:
using a gas field ion source to form a beam of ions of an isotope of a noble gas; and
using the isotope of the noble gas in the beam of ions to investigate or modify a sample,
wherein the isotope of the noble gas is Ne-21, and an amount of the ions of the isotope of the noble gas is greater than a natural abundance of the isotope of the noble gas.
7. The method of claim 6 , wherein the amount of the ions of the isotope of the noble gas is greater than 95%.
8. The method of claim 7 , further comprising exposing the noble gas to the gas field ion source to form the ion beam, wherein at least 95% of the atoms in the gas are Ne-21 atoms.
9. The method of claim 8 , further comprising:
exposing the sample to the ion beam to cause particles to leave the sample; and
detecting particles to determine information about the sample.
10. The method of claim 9 further comprising passing the ions through ion optics.
11. A method, comprising:
using a gas field ion source to form a beam of ions of an isotope of a noble gas; and
using the isotope of the noble gas in the beam of ions to investigate or modify a sample,
wherein the isotope of the noble gas is Ne-22, and an amount of the ions of the isotope of the noble gas is greater than a natural abundance of the isotope of the noble gas.
12. The method of claim 11 , wherein the amount of the ions of the isotope of the noble gas is greater than 95%.
13. The method of claim 12 , the method further comprising exposing the noble gas to the gas field ion source to form the ion beam, wherein at least 95% of the atoms in the gas are Ne-22 atoms.
14. The method of claim 13 , further comprising:
exposing the sample to the ion beam to cause particles to leave the sample; and
detecting particles to determine information about the sample.
15. The method of claim 14 , further comprising passing the ions through ion optics.
16. The method of claim 1 , wherein the sample comprises a semiconductor article and the method repairs a circuit by adding material to the sample or removing material from the sample.
17. The method of claim 6 , wherein the sample comprises a semiconductor article and the method repairs a circuit by adding material to the sample or removing material from the sample.
18. The method of claim 11 , wherein the sample comprises a semiconductor article and the method repairs a circuit by adding material to the sample or removing material from the sample.