IP Library Granted Patent US 8,664,095
Granted Patent B2
US 8,664,095 · App. 13/332,743 · Granted Mar 4, 2014

Black GE based on crystalline/amorphous core/shell nanoneedle arrays

Inventors: Ali Javey (Emeryville, CA); Yu-Lun Chueh (Hsinchu, TW); Zhiyong Fan (Clear Water Bay, HK)
Assignee: The Regents of the University of California
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Quick Facts
Patent No.
US 8,664,095
App. No.
13/332,743
Granted
Mar 4, 2014
Kind
B2
Abstract

Direct growth of black Ge on low-temperature substrates, including plastics and rubber is reported. The material is based on highly dense, crystalline/amorphous core/shell Ge nanoneedle arrays with ultrasharp tips (˜4 nm) enabled by the Ni catalyzed vapor-solid-solid growth process. Ge nanoneedle arrays exhibit remarkable optical properties. Specifically, minimal optical reflectance (<1%) is observed, even for high angles of incidence (˜75°) and for relatively short nanoneedle lengths (˜1 μm). Furthermore, the material exhibits high optical absorption efficiency with an effective band gap of ˜1 eV. The reported black Ge can have important practical implications for efficient photovoltaic and photodetector applications on nonconventional substrates.

Claims (18)

1. A method for forming a nanoneedle array of germanium on a substrate, the method comprising;

evaporating a thin film of nickel onto a substrate;

introducing GeH 4 gas into a CVD chamber into which the nickel coated substrate has been placed; and thereafter,

heating the chamber to between 270° C. and 320° C. for a period of time, while maintaining a pressure of 1.8-280 Torr during the heating step.

2. The method of claim 1 wherein the nickel film is grown to a thickness of 0.5 nm.

3. The method of claim 1 wherein said GeH 4 gas is introduced as a mixture of 10% GeH 4 in H 2 .

4. The method of claim 1 wherein the pressure is maintained at about 280 Torr.

5. The method of claim 1 wherein the substrate is glass.

6. The method of claim 1 wherein the substrate is a deformable substrate.

7. The method of claim 1 wherein the deformable substrate is selected from the group comprising flexible Kapton and stretchable rubber.

8. An array of germanium cone shaped nanoneedles formed on a substrate according to the process of claim 1 , wherein the tip diameter of the nanoneedles is between 4 to 13 nm.

9. The array of claim 8 wherein the tip diameter of the nanoneedles is approximately 4 nm.

10. The array of claim 8 wherein the nanoneedles are of near vertical orientation.

11. The array of claim 10 wherein the nanoneedles have a length of between 0.4 μm and 3.4 μm.

12. The array of claim 11 wherein the nanoneedles exhibit a gradual reduction of effective refractive index from the bottom to the top of the needle.

13. The array of claim 11 wherein the nanoneedles have a length of ≧1.0 μm.

14. The array of claim 8 wherein the substrate is a deformable substrate.

15. The array of claim 14 wherein the deformable substrate is selected from the group comprising Kapton and stretchable rubber.

Assignments (2)
CONFIRMATORY LICENSE Recorded May 21, 2012
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 028254/0891 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 16, 2012
From: JAVEY, ALI; CHUEH, YU-LUN; FAN, ZHIYONG
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 027878/0862 →
Continuity (2)
Provisional Application 61426166 · Dec 22, 2010
Related Publication 20120161290A1 · Jun 28, 2012