Microelectromechanical systems (MEMS) resonators and related apparatus and methods
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.
1. An apparatus, comprising:
a first microelectromechanical systems (MEMS) wafer comprising a first MEMS device; and
a second MEMS wafer comprising a second MEMS device,
wherein the second MEMS wafer is configured to cap the first MEMS wafer, and
wherein the first and second MEMS wafers are bonded together in a face-to-face configuration.
2. The apparatus of claim 1 , wherein the first MEMS device is a MEMS resonator and wherein the second MEMS device is a MEMS gyroscope.
3. The apparatus of claim 1 , wherein the first and second MEMS wafers are bonded together by a eutectic bond.
4. The apparatus of claim 1 , wherein the first MEMS device is configured to be actuated via electrostatic actuation.
5. The apparatus of claim 1 , wherein the first MEMS device is a MEMS microphone.
6. The apparatus of claim 1 , wherein the second MEMS wafer includes one or more access holes.