IP Library Granted Patent US 8,737,565
Granted Patent B1
US 8,737,565 · App. 13/941,036 · Granted May 27, 2014

Compound x-ray lens having multiple aligned zone plates

Inventors: Alan Francis Lyon (Berkeley, CA); Michael Feser (Orinda, CA); Wenbing Yun (Walnut Creek, CA); Sharon Chen (San Ramon, CA)
Assignee: Carl Zeiss X-Ray Microscopy, Inc.
G21K1/065G01T1/295G21K2201/06G21K2201/067
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,737,565
App. No.
13/941,036
Granted
May 27, 2014
Kind
B1
Abstract

A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.

Claims (26)

1. A compound zone plate comprising:

a first zone plate frame including a first zone plate and a first outer frame surrounding the first zone plate;

a second zone plate frame including a second zone plate and a second outer frame surrounding the second zone plate; and

a base frame to which the first outer frame is directly bonded via an adhesive layer and the second outer frame is directly bonded via an adhesive layer.

2. A compound zone plate as claimed in claim 1 , further comprising a spacer in the adhesive layer between the first outer frame and the base frame.

3. A compound zone plate as claimed in claim 1 , wherein the second zone plate frame further includes a membrane, the second zone plate fabricated on the membrane, and an optical port in the second outer frame extending to the membrane.

4. A compound zone plate as claimed in claim 3 , wherein the first zone plate frame is positioned laterally entirely within the optical port.

5. A compound zone plate as claimed in claim 1 , further comprising a third zone plate frame comprising a third zone plate that is bonded to the second zone plate frame.

6. A compound zone plate as claimed in claim 5 , further comprising a spacer between the second zone plate frame and third zone plate frame.

7. A compound zone plate as claimed in claim 5 , further comprising a fourth zone plate frame comprising a fourth zone plate that is bonded to the third zone plate frame.

8. A compound zone plate comprising:

a first zone plate frame including a first zone plate and a first outer frame surrounding the first zone plate;

a second zone plate frame including a second zone plate and a second outer frame surrounding the second zone plate; and

an adhesive layer between the first outer frame and the second outer frame, the adhesive layer including microbeads.

9. A compound zone plate as claimed in claim 8 , further comprising a third zone plate frame including a third zone plate that is bonded to the second zone plate frame via a base frame.

10. A full-field x-ray imaging system including:

an x-ray source that generates an x-ray beam;

a sample stage for holding a sample in the x-ray beam;

a compound zone plate optic including a first zone plate frame comprising a first zone plate, a second zone plate frame comprising a second zone plate, and an adhesive layer including microbeads that bonds the first zone plate frame to the second zone plate frame; and

a spatially resolved detector system that detects the x-ray beam from the sample and the compound zone plate optic.

11. A system as claimed in claim 10 , wherein the compound zone plate optic further includes a base frame to which the first zone plate frame and the second zone plate frame are directly bonded.

12. A system as claimed in claim 11 , wherein the second zone plate frame comprises a membrane, the second zone plate fabricated on the membrane, and an optical port to the membrane.

13. A system as claimed in claim 12 , wherein the first zone plate is positioned laterally entirely within the optical port.

14. A system as claimed in claim 10 , wherein the compound zone plate optic further includes a third zone plate frame comprising a third zone plate that is bonded to the second zone plate frame.

15. A system as claimed in claim 14 , wherein the compound zone plate optic further includes a spacer between the second zone plate frame and third zone plate frame.

16. A system as claimed in claim 14 , wherein the compound zone plate optic further includes a fourth zone plate frame comprising a fourth zone plate that is bonded to the third zone plate frame.

Assignments (1)
MERGER Recorded Jan 10, 2014
From: XRADIA, INC.
To: CARL ZEISS X-RAY MICROSCOPY, INC.
Reel/Frame 031938/0108 →
Continuity (2)
Division 12855463 · Aug 12, 2010
Provisional Application 61233375 · Aug 12, 2009