Surface treatment method by using the NH
The NH 3 plasma treatment by remote plasma is firstly proposed to replace the covalent bonding process during surface modification procedure that for amine bond generation.
1. A surface treatment method for modifying a sensing thin-film by providing a tetrakis(ethylmethylamino)hafnium as a precursor, using an Atomic Layer Deposition method, using a NH 3 plasma method, sputtering an aluminum metal layer, defining a hafnium dioxide sensing membrane area, forming a cross-linking agent layer and dropping a bio-reactor, comprising:
providing a tetrakis(ethylmethylamino)hafnium as a precursor;
using an Atomic Layer Deposition method to form a 15 nm thick hafnium dioxide sensing membrane on a p-type silicon substrate, wherein the Atomic Layer Deposition method comprises using argon as a carries and providing oxygen by introducing water steam, and wherein the Atomic Layer Deposition method is conducted at a temperature of 200°C.;
using a NH 3 plasma method to treat a surface of the hafnium dioxide sensing membrane to form an amino group on the hafnium dioxide sensing membrane, wherein the NH 3 plasma method comprises providing a constant supply of argon and an ammonia;
sputtering an aluminum metal layer on a back of the silicon substrate to form an ohmic contact layer, wherein the aluminum metal layer is 300 nm thick;
defining a sensing area of the hafnium dioxide sensing membrane by a negative-photoresist;
forming a cross-linking agent layer on the sensing area, wherein the step of forming a cross-linking agent layer on the sensing area comprises using a Glutaraldehyde solution to form a Glutaraldehyde layer on the sensing area; and
dropping a bio-reactor into the sensing area of the hafnium dioxide sensing membrane, wherein the bio-reactor is selected from the group consisting of an enzyme, and an antibody.