Method for forming oxide thin film transistor
A method for manufacturing oxide thin film transistors includes steps of: forming a gate, a drain electrode, a source electrode, and an oxide semiconductor layer respectively. The oxide semiconductor layer is formed on the gate electrode; the drain electrode and the source electrode are formed at two opposite sides of the oxide semiconductor layer. The method further includes a step of depositing a dielectric layer of silicon oxide, and a reacting gas for depositing the silicon oxide includes silane and nitrous oxide. A flow rate of nitrous oxide is in a range from 10 to 200 standard cubic centimeters per minute (SCCM). Oxide thin film transistors manufactured by above method has advantages of low leakage, high mobility, and other integrated circuit member can be directly formed on the thin film transistor array substrate of a display device.
1. A method for forming an oxide thin film transistor, comprising:
providing a substrate;
forming a gate electrode, a source electrode, a drain electrode and an oxide semiconductor layer on the substrate, the oxide semiconductor layer being formed on a surface of the gate electrode, and the source electrode and the drain electrode being respectively formed on two opposite sides of the oxide semiconductor layer, the oxide semiconductor layer being composed of indium gallium zinc oxide, a flow rate of argon gas used in a process for forming the oxide semiconductor layer being 50 SCCM, an electric power used in the process for forming the oxide semiconductor layer being 3.5 KW, and a volume ratio of oxygen in a reacting gas for forming the oxide semiconductor layer being 9%; and
performing a depositing process to form at least one dielectric layer of silicon oxide, a reacting gas for the depositing process comprising silane and nitrous oxide, a flow rate of nitrous oxide being in the range from 10 to 200 SCCM,
wherein a thickness of the dielectric layer of silicon oxide is in the range from 300 Å to 5000 Å, the depositing process is a plasma enhanced chemical vapor deposition (PECVD) process, an electric power applied in the PECVD process is in the range from 0.5 KW to 10 KW.
2. A method for forming an oxide thin film transistor, comprising:
providing a substrate;
forming a gate electrode on an upper surface of the substrate;
performing a first depositing process to form a gate dielectric layer on a portion of the upper surface of the substrate and the gate electrode, a thickness of the gate dielectric layer being in the range from 300 Å to 5000 Å;
forming an oxide semiconductor layer on the gate dielectric layer, the oxide semiconductor layer being composed of indium gallium zinc oxide;
forming a source electrode and a drain electrode on the oxide semiconductor layer;
performing a second depositing process to form a protective layer covering the substrate, the source electrode, the drain electrode and the oxide semiconductor layer;
wherein the gate dielectric layer and the protective layer comprise silicon oxide, a reacting gas for at least one of the first and second depositing process comprising silane and nitrous oxide, a flow rate of nitrous oxide being in the range from 10 to 200 SCCM, a flow rate of argon gas used in a process for forming the oxide semiconductor layer is 50 SCCM, an electric power used in a process for forming the oxide semiconductor layer is 3.5 KW, a volume ratio of oxygen in the reacting gas for forming the oxide semiconductor layer is 9%, the depositing process is a PECVD process and an electric power applied in the PECVD process is in the range from 0.5 KW to 10 KW.
3. The method of claim 2 , wherein the substrate is a glass substrate.
4. The method of claim 2 , wherein the oxide semiconductor layer comprises zinc oxide, zinc tin oxide, chromium tin oxide, gallium tin oxide, titanium tin oxide, indium gallium zinc oxide, copper aluminum oxide, strontium copper oxide, or lanthanum copper oxysulfide.
5. The method of claim 1 , wherein the oxygen loss from the oxide semiconductor layer during the forming process thereof is compensated by the nitrous oxide for enhancing stability of the oxide thin film transistor.
6. The method of claim 2 , wherein the oxygen loss from the oxide semiconductor layer during the forming process thereof is compensated by the nitrous oxide for enhancing stability of the oxide thin film transistor.