IP Library Granted Patent US 8,753,748
Granted Patent B2
US 8,753,748 · App. 13/823,526 · Granted Jun 17, 2014

Process for forming metal film, and product equipped with metal film

Inventors: Kunio Mori (Morioka, JP); Yusuke Matsuno (Morioka, JP); Katsuhito Mori (Morioka, JP); Takahiro Kudo (Morioka, JP); Shigeru Michiwaki (Yokohama, JP); Manabu Miyawaki (Fujisawa, JP)
Assignees: Kunio Mori; Sulfur Chemical Laboratory Incorporated; Meiko Electronics Co., Ltd.
C23C18/1608C23C18/2086C23C18/20
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Quick Facts
Patent No.
US 8,753,748
App. No.
13/823,526
Granted
Jun 17, 2014
Kind
B2
Abstract

The purpose of the present invention is to provide a wiring substrate from which a metal film cannot be detached easily. A process for forming a metal film comprises a step (X) of applying an agent containing a compound (α) onto the surface of a base and a step (Y) of forming a metal film on the surface of the compound (α) by a wet-mode plating technique, wherein the compound (α) is a compound having either an OH group or an OH-generating group, an azide group and a triazine ring per molecule, and the base comprises a polymer.

Claims (196)

1. A method of forming a metal film, the method comprising

applying a compound (α) onto a surface of a base; and

forming a metal film on a surface of the compound (α) by a wet-type plating technique:

wherein the compound (α) is a compound comprising an alkoxysilyl group, an azide group, and a triazine ring per molecule; and

the base comprises a polymer.

2. The method according to claim 1 , further comprising irradiating the compound (α) with light having a predetermined pattern after the applying of the agent but before the forming of the metal film.

3. The method according to claim 2 , wherein the irradiating allows the base and the azide group of the compound (α) to chemically react to each other, and allows the compound (α) to be bonded to the surface of the base.

4. The method according to claim 2 , wherein the light is ultraviolet rays.

5. The method according to claim 1 , further comprising applying a substance of formula [II]:

onto the surface of the compound (α) after the applying the compound (α) to the surface of the base but before the forming of the metal film,

wherein

X′ and Y′ are each independently Si or Ti,

Z is Al,

G is a hydrocarbon group having a carbon number of 1 to 3 or an alkoxy group having a carbon number of 1 to 3,

B is an alkoxy group having a carbon number of 1 to 3,

n and m are each independently an integer of from 0 to 200,

2≦n+m≦400, and

p is an integer of from 0 to 100.

6. The method according to claim 1 , further comprising applying a compound (β) which comprises at least one selected from the group consisting of an alkoxysilyl group, an alkoxy alminate group, and an alkoxy titanate group onto the surface of the compound (α) after the applying the compound (α) to the surface of the base but before the forming of the metal film.

7. The method according to claim 5 , further comprising applying a compound (β) which comprises at least one selected from the group consisting of an alkoxysilyl group, an alkoxy alminate group, and/or an alkoxy titanate group onto the surface of the compound (α) after the applying of the substance of formula [II], but before the forming of the metal film.

8. The method according to claim 6 , wherein the compound (β) is a compound of formula [T]:

L-Si(M′) n (OM) 3−n ,  Formula [T]

wherein

L is an organic group,

M′ is a chain hydrocarbon group having a carbon number of 1 to 4,

M is H or a chain hydrocarbon group having a carbon number of 1 to 4,

n is an integer of from 0 to 2, and

M′ and M could be identical or could be different.

9. The method according to claim 6 , wherein the compound (β) is a compound of formula [III]:

wherein

R 5 is a hydrocarbon group having a carbon number of 1 to 12,

R 6 is H or a hydrocarbon group having a carbon number of 1 to 10,

X″ is H or a hydrocarbon group having a carbon number of 1 to 10,

Y″ is an alkyloxy group having a carbon number of 1 to 10,

n is an integer of from 1 to 3, and

M 1 is H, Li, Na, K, or Cs.

10. The method according to claim 6 , wherein compound (β) is a compound of formula [IV]:

wherein

R 5 is a hydrocarbon group having a carbon number of 1 to 12,

R 7 is a hydrocarbon group having a carbon number of 1 to 12,

X″ is H or a hydrocarbon group having a carbon number of 1 to 10,

Y″ is an alkyloxy group having a carbon number of 1 to 10,

each of all X″s and all Y″s could be identical or could be different,

n and m are each independently an integer of from 1 to 3, and

M 1 is H, Li, Na, K or Cs.

11. The method according to claim 1 , wherein the base is a wiring substrate and one part of the metal film is a plating film comprising Cu.

12. A product equipped with a metal film, the product comprising:

a base,

a compound (α) applied onto a surface of the base; and

a wet-type plating metal film formed on the compound (α):

wherein the compound (α) is a compound having an alkoxysilyl group, an azide group, and a triazine ring per molecule; and

the base comprises a polymer.

13. The product according to claim 12 , wherein the base and the compound (α) are chemically bonded to each other.

14. The product according to claim 12 , wherein a substance of formula [II]:

is applied onto the surface of the compound (α),

wherein

X′ and Y′ are each independently Si or Ti,

Z is Al,

G is a hydrocarbon group having a carbon number of 1 to 3, or an alkoxy group having a carbon number of 1 to 3,

B is an alkoxy group having a carbon number of 1 to 3,

n and m are each independently an integer of from 0 to 200,

2≦n+m≦400, and

p is an integer of from 0 to 100.

15. The product according to claim 12 , wherein a compound (β) comprising at least one selected from the group consisting of an alkoxysilyl group, an alkoxy alminate group, and an alkoxy titanate group is applied onto the surface of the compound (α).

16. The product according to claim 15 , wherein the compound (β) is a compound of formula [T]:

L-Si(M′) n (OM) 3−n ,  General formula [T]

wherein

L is an organic group,

M′ is a chain hydrocarbon group having a carbon number of 1 to 4,

M is H or a chain hydrocarbon group having a carbon number of 1 to 4,

n is an integer of from 0 to 2, and

M′ and M could be identical or could be different.

17. The product according to claim 15 , wherein the compound (β) is a compound of formula [III]:

wherein

R 5 is a hydrocarbon group having a carbon number of 1 to 12,

R 6 is H or a hydrocarbon group having a carbon number of 1 to 10,

X″ is H or a hydrocarbon group having a carbon number of 1 to 10,

Y″ is an alkyloxy group having a carbon number of 1 to 10,

n is an integer of from 1 to 3, and

M 1 is H, Li, Na, K, or Cs.

18. The product according to claim 15 , wherein the compound (β) is a compound of formula [IV]:

wherein

R 5 is a hydrocarbon group having a carbon number of 1 to 12,

R 7 is a hydrocarbon group having a carbon number of 1 to 12,

X″ is H or a hydrocarbon group having a carbon number of 1 to 10,

Y″ is an alkyloxy group having a carbon number of 1 to 10,

each of all X″s and all Y″s could be identical or could be different,

n and m are each independently an integer of from 1 to 3, and

M 1 is H, Li, Na, K or Cs.

19. The product according to claim 12 , wherein the product is a wiring substrate.

20. The method according to claim 7 , wherein the compound (β) is a compound of formula [T]:

L-Si(M′) n (OM) 3−n ,  Formula [T]

wherein

L is an organic group,

M′ is a chain hydrocarbon group having a carbon number of 1 to 4,

M is H or a chain hydrocarbon group having a carbon number of 1 to 4,

n is an integer of from 0 to 2, and

M′ and M could be identical or could be different.

21. The method according to claim 7 , wherein the compound (β) is a compound of formula [III]:

wherein

R 5 is a hydrocarbon group having a carbon number of 1 to 12,

R 6 is H or a hydrocarbon group having a carbon number of 1 to 10,

X″ is H or a hydrocarbon group having a carbon number of 1 to 10,

Y″ is an alkyloxy group having a carbon number of 1 to 10,

n is an integer of from 1 to 3, and

M 1 is H, Li, Na, K, or Cs.

22. The method according to claim 7 , wherein the compound (β) is a compound of formula [IV]:

wherein

R 5 is a hydrocarbon group having a carbon number of 1 to 12,

R 7 is a hydrocarbon group having a carbon number of 1 to 12,

X″ is H or a hydrocarbon group having a carbon number of 1 to 10,

Y″ is an alkyloxy group having a carbon number of 1 to 10,

each of all X″s and all Y″s could be identical or could be different,

n and m are each independently an integer of from 1 to 3, and

M 1 is H, Li, Na, K or Cs.

23. A method of forming a metal film, the method comprising

applying a compound (α) onto a surface of a base; and

forming a metal film on a surface of the compound (α) by a wet-type plating technique:

wherein the compound (α) is a compound comprising an OH group or an OH yielding group, an azide group, and a triazine ring per molecule; and

wherein the base comprises a polymer,

wherein the compound (α) is a compound of formula [I]:

wherein

E is N,

F is the OH group or the OH yielding group,

-Q is —N 3 or —NR 1 (R 2 ),

R 1 and R 2 are each independently a H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,

R is a chain hydrocarbon group having a carbon number of 1 to 12,

R′ is a chain hydrocarbon group having a carbon number of 1 to 4,

A is H or a chain hydrocarbon group having a carbon number of 1 to 4, and

n is an integer of from 0 to 2.

24. The method according to claim 23 , wherein the compound (α) is a compound of formula [Io]:

wherein

-Q is —N 3 or —NR 1 (R 2 ),

R 1 and R 2 are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,

R is a chain hydrocarbon group having a carbon number of 1 to 12,

R′ is a chain hydrocarbon group having a carbon number of 1 to 4,

A is H or a chain hydrocarbon group having a carbon number of 1 to 4,

n is an integer of from 0 to 2, and

at least one, out of R 1 and R 2 , is —RSi(R′) n (OA) 3−n .

25. The method according to claim 23 , wherein the compound (α) is a compound of formula [Ia]:

wherein

R 1 and R 2 are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,

R is a chain hydrocarbon group having a carbon number of 1 to 12,

R′ is a chain hydrocarbon group having a carbon number of 1 to 4,

A is H or a chain hydrocarbon group having a carbon number of 1 to 4,

n is an integer of from 0 to 2, and

at least one, out of R 1 and R 2 , is —RSi(R′) n (OA) 3−n .

26. The method according to claim 23 , wherein compound (α) is a compound of formula [Ib]:

wherein

R 1 and R 2 are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,

R is a chain hydrocarbon group having a carbon number of 1 to 12,

R′ is a chain hydrocarbon group having a carbon number of 1 to 4,

A is H or a chain hydrocarbon group having a carbon number of 1 to 4,

n is an integer of from 0 to 2, and

at least one, out of all R 1 s and all R 2 s, is —RSi(R′) n (OA) 3−n .

27. A product equipped with a metal film, the product comprising:

a base,

a compound (α) applied onto a surface of the base; and

a wet-type plating metal film formed on the compound (α):

wherein the compound (α) is a compound having an OH group or an OH yielding group, an azide group, and a triazine ring per molecule; and

the base comprises a polymer,

wherein the compound (α) is a compound of formula [I]:

wherein

E is N,

F is the OH group or the OH yielding group,

-Q is —N 3 or —NR 1 (R 2 ),

R 1 and R 2 of —NR 1 (R 2 ) are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,

R is a chain hydrocarbon group having a carbon number of 1 to 12,

R′ is a chain hydrocarbon group having a carbon number of 1 to 4,

A is H or a chain hydrocarbon group having a carbon number of 1 to 4, and

n is an integer of from 0 to 2.

28. The product according to claim 27 , wherein the compound (α) is a compound of formula [Io]:

wherein

-Q is —N 3 or —NR 1 (R 2 ),

R 1 and R 2 are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,

R is a chain hydrocarbon group having a carbon number of 1 to 12,

R′ is a chain hydrocarbon group having a carbon number of 1 to 4,

A is H or a chain hydrocarbon group having a carbon number of 1 to 4,

n is an integer of from 0 to 2, and

at least one, out of R 1 and R 2 , is —RSi(R′) n (OA) 3−n .

29. The product according to claim 27 , wherein the compound (α) is a compound of formula [Ia]:

wherein

R 1 and R 2 are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,

R is a chain hydrocarbon group having a carbon number of 1 to 12,

R′ is a chain hydrocarbon group having a carbon number of 1 to 4,

A is H or a chain hydrocarbon group having a carbon number of 1 to 4,

n is an integer of from 0 to 2, and

at least one, out of R 1 and R 2 , is —RSi(R′) n (OA) 3−n .

30. The product according to claim 27 , wherein the compound (α) is a compound of formula [Ib]:

wherein

R 1 and R 2 are each independently H, a hydrocarbon group having a carbon number of 1 to 24, or —RSi(R′) n (OA) 3−n ,

R is a chain hydrocarbon group having a carbon number of 1 to 12,

R′ is a chain hydrocarbon group having a carbon number of 1 to 4,

A is H or a chain hydrocarbon group having a carbon number of 1 to 4,

n is an integer of from 0 to 2, and

at least one, out of all R 1 s and all R 2 s, is RSi(R′) n (OA) 3−n .

Assignments (3)
NUNC PRO TUNC ASSIGNMENT Recorded Jan 31, 2022
From: MEIKO ELECTRONICS CO., LTD.
To: KUNIO MORI; SULFUR CHEMICAL LABORATORY INC.
Reel/Frame 058824/0332 →
CHANGE OF NAME Recorded Apr 24, 2014
From: SULFUR CHEMICAL INSTITUTE INCORPORATED
To: SULFUR CHEMICAL LABORATORY INCORPORATED
Reel/Frame 032747/0326 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 9, 2013
From: MORI, KUNIO; MATSUNO, YUSUKE; MORI, KATSUHITO; KUDO, TAKAHIRO; MICHIWAKI, SHIGERU; MIYAWAKI, MANABU
To: MORI, KUNIO; SULFUR CHEMICAL INSTITUTE INCORPORATED; MEIKO ELECTRONICS CO., LTD.
Reel/Frame 030178/0641 →
Priority Claims (1)
JP 2010-225165 · Oct 4, 2010 · national
Continuity (1)
Related Publication 20130183534A1 · Jul 18, 2013