Texturing of monocrystalline semiconductor substrates to reduce incident light reflectance
Monocrystalline semiconductor substrates are textured with alkaline solutions to form pyramid structures on their surfaces to reduce incident light reflectance and improve light absorption of the wafers. The alkaline baths include hydantoin compounds and derivatives thereof in combination with alkoxylated glycols to inhibit the formation of flat areas between pyramid structures to improve the light absorption.
1. A method comprising:
a) providing a monocrystalline semiconductor substrate;
b) providing a composition comprising one or more compounds chosen from hydantoin and hydantoin derivatives, one or more alkoxylated glycols, one or more oxygen scavengers and one or more alkaline compounds; and
c) contacting the monocrystalline semiconductor substrate with the composition to anisotropically texture the monocrystalline semiconductor substrate.
2. The method of claim 1 , wherein the one or more of hydantoin and hydantoin derivatives range from 0.005 wt % to 0.09 wt % of the composition.
3. The method of claim 1 , wherein the one or more alkoxylated glycols have molecular weights of 100 g/mole or greater.
4. The method of claim 1 , wherein the solution further comprises one or more organic solvents.