Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots
Methods of correction of rotational and linear misalignment in multi-link robots are provided. The method allows for precise orientation of an end effector to put or pick substrates at a target destination by correcting for both positional and rotational orientation errors. The method rotates a boom linkage to a position adjacent to the target destination, corrects for linear and rotational error by rotating a boom linkage as well as an upper arm link as well as extending or retracting a wrist member. Systems including long boom linkages are disclosed. Numerous other aspects are provided.
1. A method of correcting misalignment in a robot, comprising:
providing a robot apparatus having a boom linkage, an upper arm link coupled to the boom linkage, a forearm link coupled to the upper arm link, and a wrist member coupled to the forearm link, and an end effector coupled to the wrist member;
providing the upper arm link to rotate in a X-Y plane relative to the boom linkage about a second rotational axis offset and spaced from a first rotational axis, the upper arm link rotates around the second rotational axis, so the upper arm link, the forearm link, the wrist member, and the end effector rotate about the second rotational axis in unison such that in unison sweeping involves no relative rotation between the upper arm link, the forearm link, and the wrist member;
positioning the boom linkage at a location adjacent to a target location;
translating the end effector to near the target location;
determining an extent of offset;
correcting linear positional misalignment, at least in part, by rotation of the boom linkage, and
correcting rotational misalignment.
2. The method of claim 1 , comprising correcting linear positional misalignment in the X direction, at least in part, by rotating the boom linkage and rotating the upper arm link relative to the boom linkage.
3. The method of claim 1 , comprising correcting rotational misalignment, at least in part, by rotation of the upper arm link relative to the boom linkage.
4. The method of claim 1 , comprising correcting rotational misalignment, at least in part, by rotation of the boom linkage and rotation of the upper arm link relative to the boom linkage.
5. The method of claim 1 , comprising providing a length of the boom linkage that is greater than a distance between a first rotational axis of the boom linkage and a distance in the X direction to the normal axial centerline of the process chamber.
6. The method of claim 1 comprising correcting linear positional misalignment in the Y direction, at least in part, by rotating the boom linkage and rotating the upper arm link relative to the boom linkage.
7. The method of claim 1 comprising
correcting linear positional misalignment in an X direction and in a Y direction; and then
correcting rotational misalignment by self motion of the robot apparatus.
8. A method of correcting misalignment in a robot, comprising:
providing a robot apparatus having a boom linkage, an upper arm link coupled to the boom linkage, a forearm link coupled to the upper arm link, and a wrist member coupled to the forearm link, and an end effector coupled to the wrist member;
providing the upper arm link to rotate in a X-Y plane relative to the boom linkage about a second rotational axis offset and spaced from a first rotational axis, the upper arm link rotates around the second rotational axis, so the upper arm link, the forearm link, the wrist member, and the end effector rotate about the second rotational axis in unison such that in unison sweeping involves no relative rotation between the upper arm link, the forearm link, and the wrist member;
positioning the boom linkage at a location adjacent to a target location;
rotating and translating the upper arm link, the forearm link, and the wrist member to position the end effector near the target location;
determining an extent of rotational misalignment and positional misalignment in the X and Y directions;
correcting linear positional misalignment in the X direction, at least in part, by rotation of the boom linkage and upper arm linkage relative to the boom linkage;
correcting linear positional misalignment in the Y direction, at least in part, by extending the end effector relative to the boom linkage; and
correcting rotational misalignment, at least in part, by rotation of the upper arm linkage relative to the boom linkage.
9. An electronic device processing system having a multi-linkage robot apparatus, comprising:
a process chamber including a normal axis, the process chamber adapted to be serviced by a multi-linkage robot;
the multi-linkage robot having
a boom linkage rotatable about a first axis,
an upper arm link coupled to the boom linkage at a second axis,
a forearm link coupled to the upper arm link, the forearm link being kinematically driven by the motion of the upper arm link such that rotation of the upper arm link causes a defined rotation of the forearm link because of the kinematic linkage of the forearm link and the upper arm link,
a wrist member coupled to the forearm link, and
an end effector coupled to the wrist member,
providing the upper arm link to rotate in a X-Y plane relative to the boom linkage about the second axis offset and spaced from the first axis, the upper arm link rotates around the second axis, so the upper arm link, the forearm link, the wrist member, and the end effector rotate about the second axis in unison,
wherein a length of the boom linkage between the first and second axes is greater than a distance between the first axis and the normal axis.
10. An electronic device processing system having a multi-linkage robot apparatus, comprising:
a process chamber including a normal axis, the process chamber adapted to be serviced by a multi-linkage robot;
the multi-linkage robot having
a boom linkage rotatable about a first axis,
an upper arm link coupled to the boom linkage at a second axis,
a forearm link coupled to the upper arm link, the forearm link being kinematically driven by the motion of the upper arm link such that rotation of the upper arm link causes a defined rotation of the forearm link because of the kinematic linkage of the forearm link and the upper arm link,
a wrist member coupled to the forearm link, and
an end effector coupled to the wrist member,
wherein rotational misalignment is accomplished by in unison sweeping of the upper arm link, forearm link, and wrist member about the second axis, such that in unison sweeping involves no relative rotation between the upper arm link, the forearm link, and the wrist member.