Devices with covering layer and filler
View Patent ↗A method of manufacturing a device includes forming a covering layer having affinity for a filler to be injected into a space between a first base and a second base, on at least one of the opposing surfaces of the first base and the second base, and then injecting the filler into the space between the first base and the second base.
1. A device comprising:
a first base;
a second base arranged above the first base to leave a space;
a filler disposed in the space; and
a covering layer formed on both of the opposing surfaces of the first base and the second base and contacting the filler, wherein the covering layer is higher in wettability with respect to the filler than with respect to at least one of the opposing surfaces of the first base and the second base,
wherein the covering layer is a polyimide film.
2. The device as claimed in claim 1 , wherein both of the first base and the second base are a semiconductor chip.
3. The semiconductor device as claimed in claim 1 , wherein the first base is a mounting board, and the second base is a semiconductor chip.
4. A device comprising:
a first base;
a second base arranged above the first base to leave a space;
a filler disposed in the space; and
a covering layer formed on at least one of the opposing surfaces of the first base and the second base and contacting the filler, wherein the covering layer is higher in wettability with respect to the filler than with respect to the at least one of the opposing surfaces of the first base and the second base,
wherein the filler is an epoxy resin mixed with a curing agent, and material of the covering layer is an epoxy resin that is not mixed with a curing agent.
5. A semiconductor device comprising:
a first substrate;
a second substrate that is stacked over the first substrate via a bump electrode to form a gap between the first substrate and the second substrate;
a resin layer that is formed in the gap; and
a first covering layer that is intervening between the resin layer and the first substrate and contacts the resin layer and the first substrate,
wherein the first covering layer is higher in wettability with respect to the resin layer than with respect to the first substrate,
wherein the first covering layer is a polyimide film.
6. The semiconductor device as claimed in claim 5 , wherein both of the first substrate and the second substrate are a semiconductor chip.
7. The semiconductor device as claimed in claim 5 , wherein the first substrate is a mounting board, and the second substrate is a semiconductor chip.
8. The semiconductor device as claimed in claim 5 , further comprising:
a second covering layer that is intervening between the resin layer and the second substrate and contacts the resin layer, wherein the second covering layer is higher in wettability with respect to the resin layer than with respect to the second substrate.
9. A semiconductor device comprising:
a first substrate;
a second substrate that is stacked over the first substrate via a bump electrode to form a gap between the first substrate and the second substrate;
a resin layer that is formed in the gap; and
a first covering layer that is intervening between the resin layer and the first substrate and contacts the resin layer,
wherein the first covering layer is higher in wettability with respect to the resin layer than with respect to the first substrate,
wherein the resin layer is an epoxy resin mixed with a curing agent, and material of the first covering layer is an epoxy resin that is not mixed with a curing agent.
10. The semiconductor device as claimed in claim 5 , wherein the first substrate is larger in size than the second substrate.
11. The semiconductor device as claimed in claim 5 , wherein the first covering layer is extending from the first substrate to the bump electrode.
12. A semiconductor device comprising:
a stack structure including a plurality of substrates stacked over with one another via a bump electrode to form gaps between adjacent ones of the plurality of substrates, the substrates including an intermediate substrate sandwiching between the substrates, the intermediate substrate having a first surface, a second surface opposite to the first surface and a polyimide film formed over the first surface;
a resin layer that is formed in the gaps; and
a covering layer provided over the second surface of the intermediate substrate, and the covering layer being between the resin layer and the intermediate substrate,
wherein the covering layer is higher in wettability with respect to the resin layer than with respect to the second surface of the intermediate substrate, and
each of the polyimide film and the covering layer is in contact with the resin layer.
13. The semiconductor device as claimed in claim 12 , wherein the plurality of substrates are semiconductor chips.
14. The semiconductor device as claimed in claim 12 , wherein a lowermost of the plurality of substrates is a mounting board, and another of the plurality of substrates is a semiconductor chip.
15. The semiconductor device as claimed in claim 12 , wherein a lowermost of the plurality of substrates of the stack structure is larger in size than another of the plurality of substrates of the stack structure.
16. The semiconductor device as claimed in claim 12 , wherein the covering layer is extending to the bump electrode.
17. The semiconductor device as claimed in claim 6 , wherein at least one of the first substrate and the second substrate includes a through electrode that is electrically connected to the bump electrode.
18. The semiconductor device as claimed in claim 12 , wherein the covering layer is a polyimide film.
19. The semiconductor device as claimed in claim 12 , wherein the resin layer is an epoxy resin mixed with a curing agent, and the covering layer is an epoxy resin that is not mixed with a curing agent.
20. The semiconductor device as claimed in claim 13 , wherein the intermediate substrate includes a through electrode that is electrically connected to the bump electrode.