Thin film transistor substrate including a fluorine layer in an active pattern
A thin film transistor substrate includes a base substrate, an active pattern, a gate insulation pattern and a gate electrode. The active pattern is disposed on the base substrate. The active pattern includes a source electrode, a drain electrode, and a channel disposed between the source electrode and the drain electrode. The gate insulation pattern and the gate electrode overlap with the channel. The gate insulation pattern is disposed between the channel and the gate electrode. The source electrode and the drain electrode each include a fluorine deposition layer.
1. A thin film transistor substrate comprising:
a base substrate;
an active pattern on the base substrate, and comprising:
a source electrode, a drain electrode, and a channel disposed between the source electrode and the drain electrode, each comprising a semiconductor material,
wherein the source electrode and the drain electrode further comprise a fluorine deposition layer;
a gate insulation pattern overlapping the channel; and
a gate electrode overlapping the channel, wherein the gate insulation pattern is between the channel and the gate electrode.
2. The thin film transistor substrate of claim 1 , wherein the channel comprises amorphous indium-gallium-zinc oxide.
3. The thin film transistor substrate of claim 1 , wherein the source electrode, the drain electrode and the channel are in a same single layer of the thin film transistor substrate.
4. The thin film transistor substrate of claim 1 , wherein the gate insulation pattern is between the base substrate and the gate electrode.
5. The thin film transistor substrate of claim 1 , wherein the gate electrode is between the base substrate and the gate insulation pattern.
6. The thin film transistor substrate of claim 1 , wherein a thickness of the fluorine deposition layer is between about 1 nanometer and about 10 nanometers.
7. The thin film transistor substrate of claim 3 , wherein the fluorine deposition layer of the source electrode and the drain electrode comprises fluorine plasma-treated semiconductor material.
8. The thin film transistor substrate of claim 7 , wherein
the active pattern has a uniform specific resistance, and
the source electrode and the drain electrode of the active pattern further comprise helium plasma-treated semiconductor material.
9. The thin film transistor substrate of claim 1 , wherein the source electrode and the drain electrode further comprise a hydrogen doped layer.
10. The thin film transistor substrate of claim 9 , wherein the fluorine deposition layer is closer to upper surfaces of the source electrode and the drain electrode than the hydrogen doped layer.