Flow controller
A flow controller includes a flow detection unit that includes a detection unit for detecting the flow rate of a fluid; and a flow control unit that is coupled to the flow detection unit and that is capable of adjusting the flow rate of the fluid. The detection sensor constituting the detection unit includes a thermal flow sensor using MEMS technology, and the flow rate of the fluid that has been detected by the detection sensor is output to a control unit. In addition, in the flow control unit, the supply state of air to a supply room is switched by each of a supply-use solenoid valve and an exhaust-use solenoid valve, and on the basis of the supply state of the air, a control valve opens and closes.
1. A flow controller comprising:
a body including a first passage disposed on an upstream side through which a fluid flows, a second passage disposed on a downstream side with respect to the first passage, and a throttling section disposed between the first passage and the second passage;
a flow rate detector disposed on the body and which includes a detection unit configured to detect flow rate of the fluid that flows from the first passage to the second passage;
a flow rate controller for controlling a flow rate of the fluid through the body and which is disposed in parallel with the flow rate detector, the flow rate controller including a diaphragm assembly which is displaced by supply of pilot air, a stem having a first end connected to the diaphragm assembly, a valve body fixed to a second end of the stem which opposes the first end such that the valve body is connected to the diaphragm assembly through the stem, and a spring that urges the valve body in a direction to be seated on a valve seat formed in the body,
wherein the detection unit includes a MEMS sensor, the flow rate controller further comprising a balancing structure for balancing a first pressing force applied from the diaphragm assembly to the valve body with a second pressing force applied from the spring to the valve body and which opposes the first pressing force.
2. The flow controller according to claim 1 , wherein the flow rate control unit further comprises a switching valve for switching a supply state of the pilot air, the switching valve being operated by a control signal output from a control unit, wherein the control signal is a PWM signal or a PFM signal.
3. The flow controller according to claim 2 , wherein the switching valve comprises a supply valve that supplies the pilot air to a supply chamber formed between the diaphragm assembly and the body to operate the diaphragm assembly, and an exhaust valve that discharges the pilot air from the supply chamber to the exterior thereof to return the diaphragm assembly, the supply valve and the exhaust valve comprising two-way valves that are operated by the control signal.
4. The flow controller according to claim 3 , wherein each of the supply valve and the exhaust valve comprises a two-way valve that is switched electrically by a control signal.
5. The flow controller according to claim 1 , wherein an elastic force of the spring is applied to the valve body in a same direction as the flow direction of the fluid.
6. The flow controller according to claim 1 , wherein the pilot air is supplied to the diaphragm assembly from an upstream side of the flow rate detector.
7. The flow controller according to claim 1 , further comprising a flow rectifier for rectifying the flow of the fluid disposed in the first passage on an upstream side of the throttling section.
8. The flow controller according to claim 1 , wherein the detection unit comprises a detection passage communicating between an upstream side and a downstream side of the throttling section thereby to bypass the first passage, and a detection sensor disposed to confront the detection passage.
9. The flow controller according to claim 1 , wherein said spring is set with a small elastic force which provides an upward force which substantially matches a downward force provided by the diaphragm assembly.