Semiconductor device having metal alloy gate and method for manufacturing the same
View Patent ↗A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device uses an aluminum alloy, rather than aluminum, for a metal gate. Therefore, the surface of the high-k metal gate after the CMP is aluminum alloy rather than pure aluminum, which can greatly reduce defects, such as corrosion, pits and damage, in the metal gate and improve reliability of the semiconductor device.
1. A method for manufacturing a semiconductor device, comprising:
forming a substrate;
forming an interlayer dielectric layer on the substrate and a dummy gate embedded in the interlayer dielectric layer;
removing the dummy gate to form a recess in the interlayer dielectric layer;
depositing a gate insulating layer having a high dielectric constant over the interlayer dielectric layer and the substrate;
depositing a first barrier layer on the gate insulating layer;
depositing a first metal layer on the first barrier layer;
depositing a second metal layer on the first metal layer;
performing annealing to melt an upper portion of the first metal layer and a lower portion of the second metal layer into an alloy; and
performing chemical mechanical polishing until the interlayer dielectric layer and the alloy are exposed.
2. The method according to claim 1 , wherein the first metal layer comprises titanium, indium, or gallium.
3. The method according to claim 1 , wherein the second metal layer comprises aluminum or tungsten.
4. The method according to claim 1 , after the step of depositing the first barrier layer and before the step of depositing the first metal layer, further comprising:
depositing a work function metal layer on the first barrier layer.
5. The method according to claim 4 , after the step of depositing the work function metal layer and before the step of depositing the first metal layer, further comprising:
depositing a second barrier layer on the work function metal layer.
6. The method according to claim 5 , wherein the work function metal layer is a TiAl alloy layer having a thickness in a range of 40 Å to 120 Å, and the second barrier layer is a TiN barrier layer having a thickness in a range of 10 Å to 50 Å.
7. The method according to claim 1 , wherein the gate insulating layer is a hafnium oxide layer having a thickness in a range of 10 Å to 30 Å.
8. The method according to claim 1 , wherein the step of depositing a first barrier layer comprises: depositing a TiN layer and sequentially depositing a TaN layer on the TiN layer, the TiN layer having a thickness in a range of 10 Å to 50 Å and the TaN layer having a thickness in a range of 5 Å to 15 Å.
9. The method according to claim 1 , wherein the annealing is performed at a temperature from 300° C. to 460° C.
10. The method according to claim 1 , wherein the alloy is an AlTi alloy.
11. The method according to claim 10 , wherein the alloy has a thickness in a range of 250 Å to 300 Å after a chemical mechanical polishing process.