Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction of gases or liquids to specimens for in situ imaging, as well as electrical contacts for electrochemical or thermal experiments.
1. A sample holder for an electron microscope, said sample holder comprising a sample holder body and a sample holder lid, wherein the sample holder body comprises a deep pocket having a deep pocket bottom and deep pocket walls for the positioning of a first microelectronic device therein and a shallow pocket having a shallow pocket bottom and shallow pocket walls for the positioning of a second microelectronic device therein, wherein a deep sealing means is positioned on the deep pocket bottom and surrounds a hole such that a seal is formed around the hole when pressure is applied to the first microelectronic device, and wherein a shallow sealing means is positioned on the shallow pocket bottom and surrounds the first microelectronic device such that when pressure is applied to the second microelectronic device a seal is formed and fluids cannot escape from around the first and second microelectronic devices, and the sample holder lid has a top side and a bottom side.
2. The sample holder of claim 1 , wherein the sample holder body and the sample holder lid have a hole for passage of an electron beam through the sample holder.
3. The sample holder of claim 1 , wherein the sample holder body comprises at least one component selected from the group consisting of:
(a) at least one electrical contact;
(b) at least one inlet supply line;
(c) at least one outlet supply line;
(d) at least one sealing means;
(e) securing means for securing the sample holder lid to the sample holder body; and
(f) combinations of (a)-(e) thereof.
4. The sample holder of claim 1 , wherein the holder lid comprises
securing means for securing the sample holder lid to the sample holder body.
5. The sample holder of claim 1 , wherein the sealing means comprises an o-ring.
6. The sample holder of claim 3 , wherein the securing means comprise screws.
7. The sample holder of claim 1 , wherein the first and second microelectronic devices can be the same as or different from one another and are selected from the group consisting of a window device, a thermal device, an electrical device, and combinations thereof.
8. The sample holder of claim 1 , wherein the first and second microelectronic devices are aligned so that the electron beam passes through the sample holder having the first and second microelectronic devices therein.
9. The sample holder of claim 1 , wherein the length and width of the second microelectronic device is greater than the length and width of the first microelectronic device.
10. The sample holder of claim 1 , wherein at least one electrical contact is positioned on the deep pocket bottom.
11. The sample holder of claim 1 , wherein the deep and shallow pocket walls comprise at least two protrusions for aligning the two microelectronic devices therein.
12. The sample holder of claim 1 , wherein the deep and shallow pocket walls include at least two protrusions for each straight edge of each microelectronic device.
13. A method of imaging a sample in a liquid and/or gaseous environment in an electron microscope, said method comprising inserting a sample in a sample holder, inserting the sample holder comprising the sample in an electron microscope, introducing a liquid and/or gas to the sample in the sample holder, and imaging the sample in the electron microscope, wherein the sample holder comprises a sample holder body and a sample holder lid, wherein the sample holder body comprises a deep pocket having a deep pocket bottom and deep pocket walls for the positioning of a first microelectronic device therein and a shallow pocket having a shallow pocket bottom and shallow pocket walls for the positioning of a second microelectronic device therein, wherein a deep sealing means is positioned on the deep pocket bottom and surrounds a hole such that a seal is formed around the hole when pressure is applied to the first microelectronic device, and wherein a shallow sealing means is positioned on the shallow pocket bottom and surrounds the first microelectronic device such that when pressure is applied to the second microelectronic device a seal is formed and fluids cannot escape from around the first and second microelectronic devices, and the sample holder lid has a top side and a bottom side.
14. The method of claim 13 , wherein the first and second two microelectronic device may be the same as or different from one another and can comprise a device selected from the group consisting of a window device, a heating device, an electrical biasing device, and combinations thereof.