Apparatus and method for manufacturing vitreous silica crucible
Provided are an apparatus and a method for manufacturing a vitreous silica crucible, which enable accurate measurement of a fume generation amount, prevention of deterioration of an inner surface property, and real-time control of a raw material melting state. Provided is an apparatus for manufacturing a vitreous silica crucible 50 by supplying silica powder into a mold 10 to form a silica powder layer 11 , and heating and melting the silica powder layer 11 by arc discharge. The apparatus includes the mold 10 for defining an outer shape of a vitreous silica crucible, an arc discharge unit having a plurality of carbon electrodes 13 and a power-supply unit 40 , and a fume-amount measurement unit 30 for detecting an amount of fumes 80 generated in the mold 10.
1. An apparatus for manufacturing a vitreous silica crucible comprising:
a mold for defining an outer shape of the vitreous silica crucible and in which silica power is supplied to form a silica powder layer;
an arc discharge unit comprising a plurality of carbon electrodes and a power-supply unit with which the silica powder layer is heated and melted by arc discharge caused by the plurality of carbon electrodes; and
a silica fume-amount measurement unit for detecting an amount of silica fumes generated in the mold.
2. The apparatus of claim 1 , wherein the silica fume-amount measurement unit detects an amount of silica fumes, generated when the silica powder layer is subjected to arc discharge, by a photosensor, an imaging unit, an electrostatic sensor, or a dielectric sensor.
3. The apparatus of claim 1 , further comprising
an electrode position setting unit for changing a relative position between the mold and the electrodes, and positions of the electrodes,
a mold position setting unit for changing a position of the mold, and
a control unit for connecting and controlling the electrode position setting unit, the mold position setting unit and the power-supply unit,
wherein the power-supply unit changes a power supplied to the electrodes, the control unit controls the electrode position setting unit, the mold position setting unit and the power-supply unit to control a melting state of vitreous silica in the mold by changing any of the relative position between the mold and the electrodes, the position of the mold, the power supplied to the electrodes, or the positions of the electrodes, and
the control unit is configured to, when the amount of silica fumes exceeds a certain threshold, decrease the power supplied to the electrodes or increase the distance between the electrodes and the mold,
and when the amount of silica fumes is below a certain threshold, increase the power supplied to the electrodes or decrease the distance between the electrodes and the mold.
4. The apparatus of claim 3 , wherein the control unit conducts any control of horizontally moving, tilting, rotating or pivoting the mold, or vertically relatively moving the electrodes and the mold, based on the amount of silica fumes.
5. The apparatus of claim 3 , wherein the control unit changes any of a relative position between the mold and the electrodes, a position of the mold, power supplied to the electrodes, or positions of the electrodes, when the silica fume-amount measurement unit detects a change in the amount of silica fumes by more than 20% with respect to a reference silica fume amount.
6. The apparatus of claim 1 , wherein the silica fume-amount measurement unit is placed within a furnace in which the mold and the electrodes are accommodated for arc discharge and/or in an outlet tube to release silica fumes generated in the mold out of the furnace.