Resistive memory having confined filament formation
Resistive memory having confined filament formation is described herein. One or more method embodiments include forming an opening in a stack having a silicon material and an oxide material on the silicon material, and forming an oxide material in the opening adjacent the silicon material, wherein the oxide material formed in the opening confines filament formation in the resistive memory cell to an area enclosed by the oxide material formed in the opening.
1. A method of processing a resistive memory cell, comprising:
forming an opening in a stack having a resistive memory material, a silicon material on the resistive memory material, and a first oxide material on the silicon material; and
forming a second oxide material in the opening adjacent the silicon material by:
selectively forming a metal material in the opening adjacent the silicon material and in contact with the resistive memory material and adjacent a lower portion of the opening; and
oxidizing all of the metal material;
wherein the second oxide material formed in the opening confines filament formation in the resistive memory cell to an area enclosed by the second oxide material formed in the opening.
2. The method of claim 1 , wherein the method includes forming an ion source material in the opening adjacent the oxidized metal material and the first oxide material.
3. A method of processing a resistive memory cell, comprising:
forming an opening in a stack having a silicon material and a first oxide material on the silicon material;
forming a second oxide material in the opening adjacent the silicon material by oxidizing the silicon material adjacent the opening such that a portion of the silicon material is consumed, wherein the second oxide material formed in the opening confines filament formation in the resistive memory cell to an area enclosed by the second oxide material formed in the opening; and
forming an ion source material in the opening adjacent the first oxide material and the second oxide material, wherein the ion source material is copper telluride or silver sulfide.
4. The method of claim 1 , wherein:
the silicon material is silicon nitride; and
the second oxide material adjacent the silicon material is copper oxide.
5. The method of claim 3 , wherein:
the silicon material is silicon; and
the second oxide material adjacent the silicon material is silicon dioxide.
6. The method of claim 3 , wherein the second oxide material adjacent the silicon material is an annular shaped oxide material.
7. A method of processing a resistive memory cell, comprising:
forming an opening in a vertical stack having a resistive memory material, a silicon material on the resistive memory material, and an oxide material on the silicon material;
selectively forming a metal material in the opening adjacent the silicon material and in contact with the resistive memory material and adjacent a lower portion of the opening;
oxidizing all of the metal material, wherein oxidizing the metal material forms a metal oxide material in the opening adjacent the silicon material and on the resistive memory material that confines filament formation in the resistive memory cell to an area enclosed by the metal oxide material; and
forming an ion source material in the opening on the resistive memory material and adjacent the metal oxide material and the oxide material.
8. The method of claim 7 , wherein the method includes selectively forming the metal material in the opening using a selective atomic layer deposition process.
9. The method of claim 7 , wherein selectively forming the metal material in the opening includes forming the metal material in the opening such that metal material is formed exclusively adjacent the silicon material in contact with the resistive memory material and adjacent the lower portion of the opening.
10. The method of claim 7 , wherein the resistive memory material is zirconium dioxide.
11. A method of processing a resistive memory cell, comprising:
forming an opening in a vertical stack having an electrode, a silicon material on the electrode, and an oxide material on the silicon material;
oxidizing the silicon material adjacent the opening such that a portion of the silicon material is consumed, wherein oxidizing the silicon material adjacent the opening forms a silicon dioxide material in the opening adjacent the silicon material and on the electrode that confines filament formation in the resistive memory cell to an area enclosed by the silicon dioxide material;
forming a resistive memory material in the opening on the electrode and adjacent the silicon dioxide material and the oxide material; and
forming an ion source material in the opening adjacent the resistive memory material and in the area enclosed by the silicon dioxide material, wherein the ion source material is copper telluride or silver sulfide.
12. The method of claim 11 , wherein the oxide material is silicon dioxide.
13. The method of claim 11 , wherein the oxide material is zirconium dioxide.
14. The method of claim 11 , wherein the opening has a width equal to one feature width; wherein one feature width is equal to a total width of the ion source material and the resistive memory material in the opening.