Package structure having MEMS element
A package structure having at least an MEMS element is provided, including a chip having electrical connecting pads and the MEMS element; a lid disposed on the chip to cover the MEMS element and having a metal layer provided thereon; first sub-bonding wires electrically connecting to the electrical connecting pads; second sub-bonding wires electrically connecting to the metal layer; an encapsulant disposed on the chip, wherein the top ends of the first and second sub-bonding wires are exposed from the encapsulant; and metallic traces disposed on the encapsulant and electrically connecting to the first sub-bonding wires. The package structure advantageously features reduced size, relatively low costs, diverse bump locations, and an enhanced EMI shielding effect.
1. A package structure having at least a Micro Electro Mechanical System (MEMS) element, comprising:
a chip provided thereon with a plurality of electrical connection pads and the at least an MEMS element;
a lid disposed on the chip to cover the MEMS element;
a metal layer only disposed on a top surface of the lid and in direct physical contact with the lid;
a plurality of first sub-bonding wires electrically connecting to the electrical connection pads, respectively;
a plurality of second sub-bonding wires electrically connecting to the metal layer;
an encapsulant disposed on the chip to cover the lid, the first sub-bonding wires and the second sub-bonding wires, wherein top ends of the first sub-bonding wires and the second sub-bonding wires are exposed from a top surface of the encapsulant; and
a plurality of metallic traces disposed on the encapsulant and electrically connected to the first sub-bonding wires.
2. The structure of claim 1 , further comprising a first insulation layer provided on the encapsulant and the metallic traces and having a plurality of openings for exposing the metallic traces.
3. The structure of claim 1 , further comprising a second insulation layer provided on the encapsulant and having a plurality of openings for exposing the first sub-bonding wires such that the metallic traces are provided in the openings and on the second insulation layer.
4. The structure of claim 1 , wherein the electrical connection pads are disposed at an outer periphery of the lid.
5. The structure of claim 1 , wherein each of the metallic traces has an end extending towards the MEMS element and having a bump provided thereon.
6. The structure of claim 1 , wherein the metal layer is composed of a plurality of bonding pads.
7. The structure of claim 1 , wherein the metallic traces further electrically connect to the second sub-bonding wires.
8. The structure of claim 1 , wherein the metallic traces are electrically isolated from the second sub-bonding wires.
9. A package structure having at least a Micro Electro Mechanical System (MEMS) element, comprising:
a chip provided thereon with a plurality of electrical connection pads and the at least an MEMS element;
a lid disposed on the chip to cover the MEMS element;
a metal layer only disposed on a top surface the lid and in direct physical contact with the lid;
a plurality of first sub-bonding wires electrically connecting to the electrical connection pads, respectively;
a plurality of second sub-bonding wires electrically connecting to the metal layer;
an encapsulant disposed on the chip to cover the lid, the first sub-bonding wires and the second sub-bonding wires, wherein top ends of the first sub-bonding wires and the second sub-bonding wires are exposed from a top surface of the encapsulant; and
a plurality of metallic traces disposed on the encapsulant and electrically connected to the second sub-bonding wires.
10. The structure of claim 9 , further comprising a first insulation layer provided on the encapsulant and the metallic traces and having a plurality of openings for exposing the metallic traces.
11. The structure of claim 9 , further comprising a second insulation layer provided on the encapsulant and having a plurality of openings for exposing the second sub-bonding wires such that the metallic traces are provided in the openings and on the second insulation layer.
12. The structure of claim 9 , wherein the electrical connection pads are disposed at an outer periphery of the lid.
13. The structure of claim 9 , wherein each of the metallic traces has an end extending towards the MEMS element and having a bump provided thereon.
14. The structure of claim 9 , wherein the metallic traces are electrically isolated from the first sub-bonding wires.