Laser processing device and laser processing method
A laser processing device includes a laser light source, a spatial light modulator, a control section, and a condensing optical system. The spatial light modulator, presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section causes a part of the phase-modulated laser light (incident light) to be condensed at a condensing position in a processing region as a laser light (contribution light) having a constant energy not less than a predetermined threshold X. The control section causes a laser light (unnecessary light) other than the contribution light condensed to the condensing position existing in the processing region to be dispersed and condensed at a condensing position existing in a non-processing region as a plurality of laser lights (non-contribution lights) having an energy less than the predetermined threshold.
1. A laser processing device, which is a device configured to process a processing object by condensing and irradiating laser light to the processing object, comprising:
a laser light source configured to output laser light;
a phase modulating spatial light modulator configured to be input with the laser light, present a hologram configured to modulate the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and output the phase-modulated laser light;
a condensing optical system provided at a subsequent stage of the spatial light modulator; and
a control section configured to cause the spatial light modulator to present the hologram configured to condense the phase-modulated laser light to a plurality of condensing positions by the condensing optical system,
the control section causing the spatial light modulator to present holograms such that a part of the phase-modulated laser light to be condensed at condensing positions in a processing region of the processing object is laser light having constant intensity not less than a predetermined threshold, and a remaining part of the phase-modulated laser light to be condensed at condensing positions in a non-processing region of the processing object is a plurality of laser lights having intensity more than 0 and less than the threshold, thereby processing the processing object,
wherein the predetermined intensity is enough to process the processing object.
2. The laser processing device according to claim 1 , wherein when intensity of the phase-modulated laser light is the same as intensity configured to process a predetermined processing region that requires the greatest intensity configured to process,
the control section causes the entire part of the phase-modulated laser light to be condensed, as a plurality of laser lights having a constant intensity not less than the threshold, to a plurality of condensing positions existing in the predetermined processing region, respectively.
3. The laser processing device according to claim 1 , wherein the processing region exists inside of the processing object, and
a condensing position existing in the processing region with reference to a bottom surface of the processing object and a condensing position existing in a non-processing region with reference to the bottom surface are different in height from each other.
4. A laser processing method, which is a method configured to process a processing object by condensing and irradiating laser light to the processing object, using:
a laser light source configured to output laser light;
a phase modulating spatial light modulator configured to be input with the laser light, present a hologram configured to modulate the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and output the phase-modulated laser light;
a condensing optical system provided at a subsequent stage of the spatial light modulator; and
a control section configured to cause the spatial light modulator to present the hologram configured to condense the phase-modulated laser light to a plurality of condensing positions by the condensing optical system, wherein the laser processing method causes, by the control section:
the spatial light modulator to sequentially present a plurality of holograms; and
a part of the phase-modulated laser light that is condensed at condensing positions in a processing region of the processing object to be laser light having constant intensity not less than a predetermined threshold, and a remaining part of the phase-modulated laser light that is condensed at condensing positions in a non-processing region of the processing object to be a plurality of laser lights having intensity more than 0 and less than the threshold, thereby processing the processing object,
wherein the predetermined intensity is enough to process the processing object.
5. The laser processing method according to claim 4 , causing, when intensity of the phase-modulated laser light is the same as intensity configured to process a predetermined processing region that requires the greatest intensity configured to process,
by the control section, the entire part of the phase-modulated laser light to be condensed, as a plurality of laser lights having constant intensity not less than the threshold, to a plurality of condensing positions existing in the predetermined processing region, respectively.
6. The laser processing method according to claim 4 , wherein the processing region exists inside of the processing object, and
a condensing position existing in the processing region with reference to a bottom surface of the processing object and a condensing position existing in a non-processing region with reference to the bottom surface are different in height from each other.
7. A laser processing device, which is a device configured to process a processing object by condensing and irradiating laser light to the processing object, comprising:
a laser light source configured to output laser light;
a phase modulating spatial light modulator configured to be input with the laser light, present a hologram configured to modulate the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and output the phase-modulated laser light;
a condensing optical system provided at a subsequent stage of the spatial light modulator; and
a control section configured to cause the spatial light modulator to present the hologram configured to condense the phase-modulated laser light to a predetermined condensing region by the condensing optical system,
the control section causing:
the spatial light modulator to sequentially present a plurality of holograms; and
a part of the phase-modulated laser light that is condensed at condensing positions in a processing region of the processing object of the predetermined condensing region to be laser light having constant intensity not less than a predetermined threshold, and a remaining part of the phase-modulated laser light that is condensed at condensing positions in a non-processing region of the processing object of the predetermined condensing region to be laser light having intensity more than 0 and less than the threshold, thereby processing the processing object,
wherein the predetermined intensity is enough to process the processing object.
8. The laser processing device according to claim 7 , wherein when an intensity of the phase-modulated laser light is the same as an intensity configured to process a predetermined processing region that requires the greatest intensity configured to process,
the control section causes the entire part of the phase-modulated laser light to be condensed, as laser light having a constant intensity not less than the threshold, to a condensing region existing in the predetermined processing region.
9. The laser processing device according to claim 7 , wherein the processing region exists inside of the processing object, and
a condensing region existing in the processing region with reference to a bottom surface of the processing object and a condensing region existing in a non-processing region with reference to the bottom surface are different in height from each other.
10. A laser processing method, which is a method configured to process a processing object by condensing and irradiating laser light to the processing object, using:
a laser light source configured to output laser light;
a phase modulating spatial light modulator configured to be input with the laser light, present a hologram configured to modulate the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and output the phase-modulated laser light;
a condensing optical system provided at a subsequent stage of the spatial light modulator; and
a control section configured to cause the spatial light modulator to present the hologram configured to condense the phase-modulated laser light to a predetermined condensing region by the condensing optical system, wherein the laser processing method causes, by the control section:
the spatial light modulator to sequentially present a plurality of holograms; and
a part of the phase-modulated laser light that is condensed at condensing positions in a processing region of the processing object of the predetermined condensing region to be laser light having constant intensity not less than a predetermined threshold, and a remaining part of the phase-modulated laser light that is condensed at condensing positions in a non-processing region of the processing object of the predetermined condensing region to be laser light having intensity more than 0 and less than the threshold, thereby processing the processing object,
wherein the predetermined intensity is enough to process the processing object.
11. The laser processing method according to claim 10 , causing, when intensity of the phase-modulated laser light is the same as intensity configured to process a predetermined processing region that requires the greatest intensity configured to process,
by the control section, the entire part of the phase-modulated laser light to be condensed, as laser light having constant intensity not less than the threshold, to a condensing region existing in the predetermined processing region.
12. The laser processing method according to claim 10 , wherein the processing region exists inside of the processing object, and
a condensing region existing in the processing region with reference to a bottom surface of the processing object and a condensing region existing in a non-processing region with reference to the bottom surface are different in height from each other.
13. A laser processing apparatus, comprising:
a laser light source configured to output laser light;
a spatial light modulator configured to modulate the laser light and output the modulated laser light; and
a control section configured to cause the spatial light modulator to present a hologram configured to form a desired processing pattern and a non-contribution pattern,
wherein the desired processing pattern is composed of modulated laser light at a condensing position in a processing region having intensity not less than a predetermined intensity, and the non-contribution pattern is composed of the modulated laser light at a condensing position in a non-processing region having intensity more than 0 and less than the predetermined intensity,
wherein the predetermined intensity is enough to process an object.
14. A laser processing method, comprising:
outputting laser light from a laser light source;
modulating the laser light and outputting the modulated laser light by a spatial light modulator; and
causing the spatial light modulator to present a hologram configured to form a desired processing pattern and a non-contribution pattern by a control section;
wherein the desired processing pattern to be composed of modulated laser light at a condensing position in a processing region having intensity not less than a predetermined intensity, and the non-contribution pattern to be composed of the modulated laser light at a condensing position in a non-processing region having intensity more than 0 and less than the predetermined intensity,
wherein the predetermined intensity is enough to process an object.