IP Library Granted Patent US 8,873,021
Granted Patent B2
US 8,873,021 · App. 11/917,207 · Granted Oct 28, 2014

Debris mitigation system with improved gas distribution

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Quick Facts
Patent No.
US 8,873,021
App. No.
11/917,207
Granted
Oct 28, 2014
Kind
B2
Abstract

A debris mitigation system for use in a radiation unit for EUV radiation and/or X-rays, for example, includes a foil trap having several passages allowing a straight passage of radiation, and one or several feed pipes for gas supply of buffer gas to the foil trap. The foil trap has an interior space extending over several of the passages, where the feed pipes open into the interior space.

Claims (4)

1. A debris mitigation system comprising a debris mitigation unit including a foil trap, said debris mitigation unit having passages allowing a straight passage of radiation, and one or several feed pipes for gas supply of a buffer gas to said debris mitigation unit, wherein said debris mitigation unit has an interior space extending over several of said passages and wherein said feed pipes open into said interior space via outlet portions, wherein said foil trap comprises a plurality of foils extending in a radial direction from a central axis, and said interior space is formed by openings in said plurality of foils that are aligned with each other to form a circumferential gas flow channel for flow of the buffer gas in the circumferential gas flow channel in a circumferential direction around said central axis, and wherein at least one outlet portion of said outlet portions of said feed pipes includes a first part and a second part which are located in the circumferential gas flow channel, the second part being perpendicular to the first part to enhance the flow of the buffer gas in the circumferential gas flow channel in the circumferential direction.

2. The debris mitigation system according to claim 1 , wherein said debris mitigation unit has essentially rotational symmetry about said central axis.

3. The debris mitigation system according to claim 1 , wherein said interior space further forms connection channels extending in the radial direction and connecting said one or several openings to said circumferential gas flow channel.

4. The debris mitigation system according to claim 2 , wherein said debris mitigation unit is mounted rotatably around said central axis.

Assignments (3)
CORRECTIVE ASSIGNMENT TO CORRECT THE EFFECTIVE DATE PREVIOUSLY RECORDED AT REEL: 049771 FRAME: 0112. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jul 30, 2019
From: KONINKLIJKE PHILIPS N.V.
To: USHIO DENKI KABUSHIKI KAISHA
Reel/Frame 049897/0339 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 17, 2019
From: KONINKLIJKE PHILIPS N.V.
To: USHIO DENKI KABUSHIKI KAISHA
Reel/Frame 049771/0112 →
CHANGE OF NAME AND ADDRESS Recorded Jul 17, 2019
From: KONINKLIJKE PHILIPS ELECTRONICS, N.V.
To: KONINKLIJKE PHILIPS N.V.
Reel/Frame 049772/0209 →