Vertical non-volatile memory device and electric-electronic system having the same device
Provided is a vertical non-volatile memory device having a metal source line. The vertical non-volatile memory device includes cell string units that are formed on first portions of a semiconductor substrate and are vertically arranged with respect to a surface of the semiconductor substrate, impurity regions formed on second portions of the semiconductor substrate between the cell string units, conductive lines formed on the impurity regions, and spacers that are formed on the sidewalls of the cell string units and insulate the conductive lines from the cells string units.
1. A vertical non-volatile memory device comprising:
cell string units that are formed on first portions of a semiconductor substrate and are vertically arranged with respect to a surface of the semiconductor substrate;
impurity regions formed on second portions of the semiconductor substrate between the cell string units, wherein the second portions of the semiconductor substrate are different from the first portions of the semiconductor substrate;
conductive lines formed on the impurity regions between the cell string units without being formed underneath the cell string units; and
spacers that are formed only on sidewalls of the cell string units and insulate the conductive lines from the cells string units.
2. The vertical non-volatile memory device of claim 1 , wherein each of the cell string units comprises selecting transistors and a plurality of memory cell transistors arranged between the selecting transistors, wherein
channel layers are formed to contact the first portions and are vertical to the surface of the semiconductor substrate, and wherein
the selecting transistors and the plurality of memory cell transistors are arranged on the sidewalk of the channel layers.
3. The vertical non-volatile memory device of claim 1 , further comprising:
insulation pillars that are formed on the centers of the first portions and vertical to the surface of the semiconductor substrate, wherein
the cell string units comprises,
channel layers that surround bottom surfaces and sidewalls of the insulation pillars and contact the first portions of the semiconductor substrate,
gates of selecting transistors that are arranged on the channel layers formed on two opposite sidewalls of each of the insulation pillars and are vertically stacked with respect to the surface of the semiconductor substrate, and
gates of memory cell transistors that are arranged between the gates of the selecting transistors.
4. The vertical non-volatile memory device of claim 3 , wherein the conductive lines are formed to be located lower than bottom surfaces of the bottommost gates from among the gates of the memory cell transistors.
5. The vertical non-volatile memory device of claim 1 , wherein the spacers are formed on the entire sidewalls of the cells string units, and wherein
the conductive lines are formed in the entire gaps between the spacers or formed in a part of the gaps between the spacers.
6. The vertical non-volatile memory device of claim 1 , wherein the spacers are formed on a part of the sidewalk of the cell string units, and wherein
the conductive lines are formed between the spacers.
7. The vertical non-volatile memory device of claim 6 , wherein an insulation layer is formed on the conductive lines and the spacers.
8. The vertical non-volatile memory device of claim 1 , further comprising:
conductive signal lines formed on the cell string units.
9. The vertical non-volatile memory device of claim 1 , further comprising:
metal silicide layers formed between the impurity regions and the conductive lines.
10. The vertical non-volatile memory device of claim 1 , wherein the conductive lines comprises a metal layer selected from among a tungsten (W) layer, an aluminium (Al) layer, and a copper (Cu) layer.
11. An electric-electronic system comprising:
an input/output device via which data is input and output;
an interface receiving and transmitting the data;
a memory chip having the non-volatile memory chip of claim 1 , the memory chip storing the data; and
a controller controlling the input/output device, the interface, and the memory chip.
12. A vertical non-volatile memory device comprising:
a semiconductor substrate including a cell region and a peripheral region;
cell string units that are formed on first portions within the cell region and are vertically arranged with respect to a surface of the semiconductor substrate;
impurity regions formed on second portions between the cell string units within the cell region; and
conductive lines formed on the impurity regions,
wherein a bottom surface of a gate dielectric layer of a bottommost selecting transistor in each of the cell string units is located lower than a top surface of the semiconductor substrate in the peripheral region.
13. The vertical nonvolatile memory device of claim 12 , wherein each of the cell string units comprises selecting transistors and a plurality of memory cell transistors arranged between the selecting transistors, wherein
channel layers are formed to contact the first portions and are vertical to the surface of the semiconductor substrate, and wherein
the selecting transistors and the plurality of memory cell transistors are arranged on the sidewalls of the channel layers.
14. The vertical non-volatile memory device of claim 13 , wherein bottom surfaces of gate dielectric layers of the selecting transistors are formed at a position where the channel layers and the semiconductor substrate contact each other.
15. The vertical non-volatile memory device of claim 12 , further comprises:
insulation pillars that are formed on the centers of the first portions and vertical to the surface of the semiconductor substrate, wherein
the cell string units comprises,
channel layers that surround bottom surfaces and sidewalls of the insulation pillars and contact the first portions of the semiconductor substrate at the bottom surfaces of the gate dielectric layers,
gates of selecting transistors that are arranged on the channel layers formed on two opposite sidewalls of each of the insulation pillars and are vertically stacked with respect to the surface of the semiconductor substrate, and
gates of memory cell transistors that are arranged between the gates of the selecting transistors.
16. The vertical non-volatile memory device of claim 15 , further comprising:
gate dielectric layers interposed between the channel layers and the gates of the memory cell transistors,
wherein the gate dielectric layers are formed on the sidewalls of the gates of the memory cell transistors to be vertical to the surface of the substrate or formed to surround sidewalls, bottom surfaces, and top surfaces of the gates of the memory transistors.
17. The vertical non-volatile memory device of claim 12 , wherein the conductive lines comprise metal silicide layers formed on the impurity regions, wherein
the metal silicide layers are formed at a position lower than the bottom surface of the gate dielectric layer.
18. The vertical non-volatile memory device of claim 17 , wherein the conductive lines further comprise metal layers formed on the metal silicide layers.
19. A vertical non-volatile memory device comprising:
cell string units that are formed on first portions of a semiconductor substrate and are vertically arranged with respect to a surface of the semiconductor substrate;
impurity regions formed on second portions of the semiconductor substrate between the cell string units;
conductive lines formed on the impurity regions; and
spacers that are formed on the sidewalls of the cell string units and insulate the conductive lines from the cells string units,
wherein each of the impurity regions comprises,
low concentration impurity regions that are arranged on the second portions below the spacers, and
high concentration impurity regions that are arranged on the second portions between the low concentration impurity regions and have the same conductive type as the low concentration impurity regions.