IP Library Granted Patent US 8,895,935
Granted Patent B2
US 8,895,935 · App. 13/417,404 · Granted Nov 25, 2014

High efficiency secondary and back scattered electron detector

Inventors: Zhibin Wang (Beijing, CN); Wei He (Beijing, CN); Qingpo Xi (Beijing, CN); Shuai Li (Beijing, CN); Fumin He (Beijing, CN)
Assignee: Hermes Microvision, Inc.
G01T1/20
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Quick Facts
Patent No.
US 8,895,935
App. No.
13/417,404
Granted
Nov 25, 2014
Kind
B2
Abstract

An assembly for a charged particle detection unit is described. The assembly comprises a scintillator disc, a partially coated light guide a thin metal tube for allowing the primary charged particle beam to pass through and a photomultiplier tube (PMT). The shape of scintillator disc and light guide are redesigned to improved the light signal transmission thereafter enhance the light collection efficiency. A light guide with a conicoidal surface over an embedded scintillator improved the light collection efficiency of 34% over a conventional design.

Claims (39)

1. A charged particle detection device, comprising:

a scintillator disc, with a center hole, to collect and convert received charged particles into photons;

a light guide, to transmit said photons, comprising:

a conicoidal surface portion;

a plan surface portion; and

a through hole;

a metal tube, for permitting a charged particle beam to pass through; and

a photomultiplier tube (PMT), cohered with the end of said light guide to receive said photons from said light guide.

2. The charged particle detection device of claim 1 , wherein the center hole of the scintillator disc, the through hole of the light guide and the center of the metal tube are aligned with the passing charged particle beam.

3. The charged particle detection device of claim 1 , wherein said metal tube is made of a material of relative magnetic permeability greater than 2000.

4. The charged particle detection device of claim 1 , wherein the scintillator disc is cohered to the light guide under the conicoidal surface portion and the shape of the scintillator disc is cylindrical type.

5. The charged particle detection device of claim 1 , wherein the scintillator disc is cohered to the light guide under the conicoidal surface portion and the shape of the scintillator disc is an upside-down truncated-cone type with a slant edge.

6. The charged particle detection device of claim 5 , wherein the slant edge of the scintillator disc has a slant angle between 40° and 90°.

7. The charged particle detection device of claim 1 , wherein the scintillator disc is fully embedded in the light guide under the conicoidal surface portion and the shape of the scintillator disc is cylindrical type.

8. The charged particle detection device of claim 1 , wherein the scintillator disc is fully embedded in the light guide under the conicoidal surface portion and the shape of the scintillator disc is a truncated-cone type with a slant edge.

9. The charged particle detection device of claim 5 , wherein the slant edge of the scintillator disc has a slant angle between 0° and 51°.

10. The charged particle detection device of claim 1 , wherein the conicoidal surface portion of the light guide is coated with aluminum.

11. The charged particle detection device of claim 1 , wherein an electron-entry surface of said scintillator disc is coated with aluminum.

12. The charged particle detection device of claim 1 , wherein the conicoidal surface portion of the light guide is part of an ellipsoid surface.

13. The charged particle detection device of claim 1 , wherein the conicoidal surface portion of the light guide is part of a hyperboloid surface.

14. The charged particle detection device of claim 1 , wherein the conicoidal surface portion of the light guide is part of a paraboloid surface.

15. A charged particle detection device, comprising:

a scintillator disc, to collect and convert received charged particles into photons;

a light guide, to transmit said photons, comprising:

a conicoidal surface portion; and

a plan surface portion; and

a photomultiplier tube (PMT), cohered with the end of said light guide to receive said photons from said light guide;

wherein said charged particles are directed to said scintillator disc by a Wien filter.

16. The charged particle detection device of claim 15 , wherein the scintillator disc is cohered to the light guide under the conicoidal surface portion and the shape of the scintillator disc is cylindrical type.

17. The charged particle detection device of claim 15 , wherein the scintillator disc is cohered to the light guide under the conicoidal surface portion and the shape of the scintillator disc is an upside-down truncated-cone type with a slant edge.

18. The charged particle detection device of claim 17 , wherein the slant edge of the scintillator disc has a slant angle between 40° and 90°.

19. The charged particle detection device of claim 15 , wherein said scintillator disc is fully embedded in said light guide under said conicoidal surface portion and said scintillator disc has a cylindrical type shape.

20. The charged particle detection device of claim 15 , wherein said scintillator disc is fully embedded in said light guide under said conicoidal surface portion and said scintillator disc has a truncated-cone type shape with a slant edge.

21. The charged particle detection device of claim 20 , wherein the slant edge of the scintillator disc of has a slant angle between 0° and 51°.

22. The charged particle detection device of claim 15 , wherein the conicoidal surface portion of the light guide is coated with aluminum.

23. The charged particle detection device of claim 15 , wherein an electron-entry surface of said scintillator disc is coated with aluminum.

24. The charged particle detection device of claim 15 , wherein the conicoidal surface portion of the light guide is part of an ellipsoid surface.

25. The charged particle detection device of claim 15 , wherein the conicoidal surface portion of the light guide is part of a hyperboloid surface.

26. The charged particle detection device of claim 15 , wherein the conicoidal surface portion of the light guide is part of a paraboloid surface.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2020
From: HERMES MICROVISION, INC.
To: HERMES MICROVISION INCORPORATED B.V.
Reel/Frame 054866/0742 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2020
From: HERMES MICROVISION INCORPORATED B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 054870/0156 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 12, 2012
From: WANG, ZHIBIN; HE, WEI; XI, QINGPO; LI, SHUAI; HE, FUMIN
To: HERMES MICROVISION, INC.
Reel/Frame 027841/0669 →
Continuity (1)
Related Publication 20130234032A1 · Sep 12, 2013