Photoelectric conversion device and image pick-up device
A photoelectric conversion device includes a semiconductor substrate, an insulating layer provided on the semiconductor substrate, an electrode provided on the insulating layer, a photoelectric conversion film provided on the electrode for converting received light to charges, a line connected between the electrode and the semiconductor substrate, a first planar electrode provided in the insulating layer and connected to the electrode, and a second planar electrode provided in the insulating layer between the first planar electrode and the semiconductor substrate.
1. A photoelectric conversion device comprising:
a semiconductor substrate;
an insulating layer on said semiconductor substrate;
a first electrode on said insulating layer;
a photoelectric conversion film on said first electrode, for converting received light to electric charges;
a line connected between said first electrode and said semiconductor substrate;
a first planar electrode in said insulating layer and connected to said first electrode; and
a second planar electrode in said insulating layer between said first planar electrode and said semiconductor substrate,
wherein charges converted by the photoelectric conversion film are stored in a capacitance disposed between the first and second planar electrodes and wherein the stored charges are provided to the semiconductor substrate through the line, and
wherein the line, the first planar electrode, and the second planar electrode are formed of the same material.
2. The photoelectric conversion device according to claim 1 , further comprising a read circuit on a surface of said semiconductor substrate, for outputting a read signal based on said charges provided through said line.
3. The photoelectric conversion device according to claim 1 , further comprising a second electrode on said photoelectric conversion film.
4. The photoelectric conversion device according to claim 3 , wherein said second electrode is a transparent electrode.
5. The photoelectric conversion device according to claim 4 , wherein said second electrode contains ZnO.
6. The photoelectric conversion device according to claim 3 , further comprising a buffer layer between said photoelectric conversion film and said second electrode.
7. The photoelectric conversion device according to claim 6 , wherein said buffer layer contains CdS.
8. The photoelectric conversion device according to claim 1 , comprising a plurality of said first electrodes, wherein
said line and said first planar electrode are in correspondence with each said first electrode,
said second planar electrode is in common to said plurality of said first planar electrodes, and
each said first planar electrode and said second planar electrode are opposed to each other at a prescribed distance from each other.
9. The photoelectric conversion device according to claim 1 , wherein
said first and second planar electrodes are provided opposed to each other, and
said second planar electrode and said semiconductor substrate are opposed to each other.
10. The photoelectric conversion device according to claim 1 , wherein said photoelectric conversion film contains Cu(In x ,Ga (1-x) )Se 2 (0≦x≦1).
11. The photoelectric conversion device according to claim 1 , wherein said first electrode contains Mo.
12. The photoelectric conversion device according to claim 1 , wherein a part of said line is between said first electrode and said first planar electrode, and said photoelectric conversion device further comprises:
a first via hole connecting said first electrode to a part of said line; and
a second via hole connecting a part of said line to said first planar electrode.
13. The photoelectric conversion device according to claim 12 , comprising:
a plurality of said first via holes, and
a plurality of said second via holes.
14. An image pick-up device, comprising:
the photoelectric conversion device according to claim 1 ; and
a lens arranged to condense light from a subject and to provide the light to said photoelectric conversion film.