IP Library › Granted Patent US 8,908,177
Granted Patent B2
US 8,908,177 · App. 13/743,038 · Granted Dec 9, 2014

Correction of second-order diffraction effects in fiber-optic-based spectrometers

Inventors: Scott A. Chalmers (San Diego, CA); Randall S. Geels (San Diego, CA)
Assignee: Filmetrics, Inc.
G01J3/10G01J3/28
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Quick Facts
Patent No.
US 8,908,177
App. No.
13/743,038
Granted
Dec 9, 2014
Kind
B2
Abstract

Embodiments described herein correct errors in spectrometer outputs due to the presence of second-order light. Embodiments determine a relationship between first-order light and second-order light of the spectrometer output. The relationship is a function of wavelength and an output of the spectrometer due to the first-order light. The relationship is used to determine an estimated contribution of the second-order light to the output. Spectrometer errors introduced by the second-order light are corrected by adjusting the spectrometer output according to the estimated contribution of the second-order light.

Claims (42)

1. A system comprising:

a spectrometer; and

an illumination source coupled to the spectrometer, wherein a relationship is determined between first-order light output and second-order light output of the spectrometer, wherein the relationship is a function of wavelength and first-order light output of the spectrometer, wherein an estimated contribution of the second-order light output of the spectrometer is determined with the relationship, wherein spectrometer errors introduced by the second-order light output are corrected by adjusting the spectrometer output according to the estimated contribution.

2. The system of claim 1 , wherein a wavelength range that comprises second-order light is determined for the illumination source.

3. The system of claim 2 , wherein the relationship comprises a ratio of a second-order output to a first-order output.

4. The system of claim 3 , wherein the ratio is determined for a plurality of discrete wavelengths within a wavelength range.

5. The system of claim 3 , wherein the estimated contribution is determined by calculating with use of the ratio the expected amount of second-order light.

6. The system of claim 5 , wherein the estimated contribution is calculated by multiplying the ratio by the first-order output.

7. The system of claim 5 , wherein the estimated contribution is determined for a plurality of discrete wavelengths within the wavelength range.

8. The system of claim 5 , wherein the spectrometer output is adjusted by subtracting the estimated contribution of the second-order light from the spectrometer output.

9. The system of claim 2 , wherein the wavelength range comprises a plurality of discrete wavelengths, wherein each discrete wavelength corresponds to a set of pixels of a detector of the spectrometer.

10. The system of claim 9 , wherein the spectrometer errors are corrected for by removing signal due to second-order light from an output of the spectrometer instead of positioning a linear-filter in front of the detector.

11. The system of claim 2 , wherein the illumination is controlled by diffracting light of the illumination source.

12. The system of claim 11 , wherein, for each wavelength of the diffracted light, the second-order light is proportional to first-order light.

13. The system of claim 1 , wherein a relationship between the first-order light and the second-order light is a function of wavelength.

14. The system of claim 1 , wherein a relationship is used between the first-order light and the second-order light along with measured first-order light to determine a contribution of the second-order light to an output of the spectrometer.

15. A method comprising:

coupling an illumination source to a spectrometer;

determining a relationship between first-order light and second-order light output by the spectrometer, wherein the relationship is a function of wavelength and an output of the spectrometer due to the first-order light;

determining by using the relationship an estimated contribution of the second-order light to the output; and

correcting for spectrometer errors introduced by the second-order light by adjusting the spectrometer output according to the estimated contribution of the second-order light.

16. The method of claim 15 , wherein the determining of the relationship comprises controlling the illumination source to prevent admission of the first-order light in a wavelength range that comprises the second-order light.

17. The method of claim 15 , comprising determining for the illumination source a wavelength range that comprises second-order light.

18. The method of claim 17 , wherein the determining of the estimated contribution comprises determining an expected amount of second-order light at each of the wavelengths.

19. The method of claim 17 , wherein the determining of the relationship comprises determining a ratio of a second-order light output to a first-order light output.

20. The method of claim 19 , comprising determining the ratio for a plurality of discrete wavelengths within the wavelength range.

21. The method of claim 19 , wherein the determining of the estimated contribution comprises calculating with use of the ratio the estimated contribution of second-order light output.

22. The method of claim 21 , wherein the calculating of the estimated contribution comprises multiplying the ratio by the first-order light output.

23. The method of claim 21 , comprising determining the estimated contribution for a plurality of discrete wavelengths within the wavelength range.

24. The method of claim 21 , wherein the adjusting of the spectrometer output comprises subtracting the estimated contribution of the second-order light output from the spectrometer output.

25. The method of claim 17 , wherein the wavelength range comprises a plurality of discrete wavelengths, wherein each discrete wavelength corresponds to a set of pixels of a detector of the spectrometer.

26. The method of claim 25 , wherein the correcting for the spectrometer errors comprises removing signal due to second-order light output from an output of the spectrometer instead of positioning a linear-filter in front of the detector.

27. The method of claim 17 , wherein the controlling of the illumination comprises diffracting light of the illumination source.

28. The method of claim 27 , wherein, for each wavelength of the diffracted light, the second-order light is proportional to first-order light.

29. The method of claim 17 , comprising using a relationship between the first-order light and the second-order light along with measured first-order light to determine a contribution of the second-order light to an output of the spectrometer.

30. A system comprising:

a spectrometer; and

an illumination source coupled to the spectrometer, wherein a relationship is determined between first-order light output and second-order light output of the spectrometer, wherein the relationship is a function of the first-order light output of the spectrometer, wherein an estimated contribution of the second-order light output of the spectrometer is determined with the relationship, wherein spectrometer errors introduced by the second-order light output are corrected by subtracting the estimated contribution from the spectrometer output.

31. A method comprising:

determining a relationship between first-order light and second-order light output by the spectrometer, wherein the relationship is a function of an output of the spectrometer due to the first-order light;

determining by using the relationship an estimated contribution of the second-order light to the output; and

correcting for spectrometer errors introduced by the second-order light by subtracting the estimated contribution from the spectrometer output.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 20, 2024
From: FILMETRICS, INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 066832/0987 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 17, 2013
From: CHALMERS, SCOTT A.; GEELS, RANDALL S.
To: FILMETRICS, INC.
Reel/Frame 030626/0688 →
Continuity (2)
Provisional Application 61586943 · Jan 16, 2012
Related Publication 20130258333A1 · Oct 3, 2013