IP Library Granted Patent US 8,914,911
Granted Patent B2
US 8,914,911 · App. 13/831,187 · Granted Dec 16, 2014

Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy

Inventors: William P. King (Champaign, IL); Craig Prater (Santa Barbara, CA); Byeonghee Lee (Seongnam, KR); Doug Gotthard (Santa Barbara, CA)
Assignees: The Board of Trustees of the University of Illinois; Anasys Instruments
G01Q60/38G01Q60/363G01Q10/045B82Y35/00G01Q60/58
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Quick Facts
Patent No.
US 8,914,911
App. No.
13/831,187
Granted
Dec 16, 2014
Kind
B2
Abstract

Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.

Claims (33)

1. A device for characterizing a region of a sample with sub-micron spatial resolution, the device comprising:

a self-heating cantilever probe having a tip;

a magnetic source placed in proximity to the cantilever probe; and

a current source in communication with the self-heating cantilever.

2. The device of claim 1 , further comprising a deflection measurement system and a demodulator.

3. The device of claim 1 , wherein the magnetic source comprises a permanent magnet coupled to a magnetic pole piece.

4. The device of claim 3 , wherein the magnetic pole piece has a permeability of more than 10,000.

5. The device of claim 3 , wherein the magnetic source and the magnetic pole piece generate a magnetic field having a strength of at least 0.2 T at the self-heating cantilever probe.

6. The device of claim 1 , wherein the magnetic source comprises a magnet and wherein the magnet is positioned on or in a slot, thereby permitting sliding the magnet between at least two locations.

7. The device of claim 6 , wherein the at least two locations include (a) a first location to maximize a magnetic field at the self-heating cantilever probe and (b) a second location to permit exchanging or removal of the self-heating cantilever probe.

8. The device of claim 1 , wherein the current source is configured to ramp the self-heating cantilever probe through a plurality of temperatures.

9. The device of claim 1 , wherein the current source is configured to include an AC current component that generates an oscillating force on the self-heating cantilever probe.

10. The device of claim 9 , wherein the current source is configured to generate AC currents over a plurality of frequencies.

11. The device of claim 2 , further comprising a resonance tracker to determine a resonance of the self-heating cantilever probe.

12. The device of claim 11 , further comprising a system for calculating one or more viscoelastic properties of a sample based on a resonance of the self-heating cantilever probe.

13. The device of claim 10 , wherein AC currents generated at a plurality of frequencies are used to create a spectrum of the self-heating cantilever probe response versus frequency.

14. The device of claim 13 , where the spectrum of the self-heating cantilever probe response versus frequency is substantially devoid of parasitic mechanical resonances.

15. The device of claim 9 , wherein the AC current comprises an AC frequency component in excess of 1 GHz.

16. The device of claim 15 , wherein the self-heating cantilever probe exerts a force on a sample at a frequency in excess of 1 GHz.

17. The device of claim 3 , further comprising a system for calculation of a plastic deformation property of a region of a sample based on a resonance of the self-heating cantilever probe.

18. The device of claim 17 , wherein the plastic deformation property comprises one or more of a yield strength of the sample, a hardness of the sample and a creep of the sample.

19. The device of claim 3 , further comprising a system for calculation of one or more glass transition temperature properties of a region of a sample based on a resonance of the self-heating cantilever probe.

20. A method of determining a material property of a sub-micron region of a sample, the method comprising the steps of:

interacting a probe tip of a self-heating cantilever probe with a surface of the sample;

applying a force between the probe tip and the surface of the sample, wherein the force is generated by an interaction between a current through the self-heating cantilever probe and a magnetic field;

measuring a response of the self-heating cantilever probe to the applied force; and

determining the property of a sub-micron region of the sample from the measured response.

21. The method of claim 20 , wherein the material property comprises one or more of a plastic deformation property, a yield strength, a hardness, a creep, a glass transition temperature, a melting temperature, a viscoelastic property and a stiffness.

22. The method of claim 20 , further comprising a step of heating at least the sub-micron region of the sample by passing a current through the self-heating cantilever probe.

23. The method of claim 22 , wherein the step of heating at least the sub-micron region of the sample occurs during the step of applying a force between the probe tip and the surface of the sample.

24. The method of claim 22 , further comprising repeating the interacting, applying, measuring and heating steps one or more times to measure a response of the self-heating cantilever probe at a plurality of temperatures of the sub-micron region of the sample.

25. The method of claim 20 , wherein the response of the self-heating cantilever probe comprises one or more of a cantilever deflection, a contact resonance frequency, an amplitude, a phase, an in-phase amplitude (X), and a quadrature amplitude (Y).

26. The method of claim 20 , further comprising repeating the interacting, applying and measuring steps at a plurality of locations of the surface of the sample.

Assignments (5)
CONFIRMATORY LICENSE Recorded Sep 16, 2024
From: UNIVERSITY OF ILLINOIS
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 068959/0571 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 21, 2018
From: ANASYS INSTRUMENTS CORP.
To: BRUKER NANO, INC.
Reel/Frame 046942/0185 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 22, 2014
From: GOTTHARD, DOUG
To: ANASYS INSTRUMENTS
Reel/Frame 033362/0784 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 23, 2013
From: PRATER, CRAIG
To: ANASYS INSTRUMENTS
Reel/Frame 030859/0590 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 23, 2013
From: KING, WILLIAM P.; LEE, BYEONGHEE
To: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Reel/Frame 030859/0677 →
Continuity (4)
Continuation In Part 13304306 · Nov 23, 2011
Provisional Application 61523572 · Aug 15, 2011
Provisional Application 61660195 · Jun 15, 2012
Related Publication 20130276175A1 · Oct 17, 2013