Semiconductor modules and methods of formation thereof
In accordance with an embodiment of the present invention, a semiconductor module includes a first semiconductor package having a first semiconductor die, which is disposed in a first encapsulant. An opening is disposed in the first encapsulant. A second semiconductor package including a second semiconductor die is disposed in a second encapsulant. The second semiconductor package is disposed at least partially within the opening in the first encapsulant.
1. A method of forming a semiconductor module, the method comprising:
providing a semiconductor package comprising a semiconductor die disposed in a first encapsulant;
forming an opening in the first encapsulant of the semiconductor package to expose a plurality of contact metallization of the semiconductor die;
forming contact pads over the plurality of contact metallization;
placing a semiconductor component within the opening; and
attaching the semiconductor component to the contact pads.
2. The method of claim 1 , further comprising forming a second encapsulant over the semiconductor component.
3. The method of claim 1 , wherein forming contact pads over the plurality of contact metallization comprises performing an electrochemical deposition process.
4. The method of claim 1 , wherein attaching the semiconductor component to the contact pads comprises electrically coupling the semiconductor component using a bonding process.
5. The method of claim 1 , further comprising applying a second encapsulant after attaching the semiconductor component to the contact pads.
6. The method of claim 1 , wherein the semiconductor die comprises a power semiconductor die.
7. The method of claim 1 , wherein the semiconductor component comprises a semiconductor die packaged within an encapsulant.
8. The method of claim 1 , wherein the semiconductor component comprises a semiconductor die after wafer singulation.
9. A method of forming a semiconductor module, the method comprising:
providing a semiconductor package comprising:
a plurality of leads;
a first semiconductor die supported by a die paddle and disposed in a first encapsulant,
a clip coupling a region to a lead of the plurality of leads of the semiconductor package;
forming an opening in the first encapsulant of the semiconductor package to expose a portion of a top surface of the clip;
placing a semiconductor component within the opening; and
attaching the semiconductor component to the exposed portion of the top surface of the clip.
10. The method of claim 9 , further comprising forming a second encapsulant over the semiconductor component.
11. The method of claim 9 , further comprising depositing a contact pad by performing an electrochemical deposition process after exposing the portion of the top surface of the clip.
12. The method of claim 9 , further comprising applying a second encapsulant after attaching the semiconductor component.
13. The method of claim 9 , wherein the semiconductor component comprises a semiconductor die packaged within an encapsulant.
14. The method of claim 9 , wherein the semiconductor component comprises a semiconductor die after wafer singulation.
15. A method of forming a semiconductor module, the method comprising:
providing a first semiconductor package comprising a first semiconductor die disposed in a first encapsulant;
forming an opening in the first encapsulant; and
providing a second semiconductor package comprising a second semiconductor die disposed in a second encapsulant, wherein the second semiconductor package is disposed at least partially within the opening in the first encapsulant.
16. The method of claim 15 , further comprising:
forming a third encapsulant over the second semiconductor package.
17. The method of claim 15 , wherein the first and the second semiconductor dies comprise discrete power semiconductors.
18. The method of claim 15 , wherein the first semiconductor package comprises a clip coupling a contact pad on the first semiconductor die to a lead, wherein the second semiconductor package comprises a contact pad coupled to a portion of the clip.
19. The method of claim 15 , wherein the first semiconductor die comprises a contact pad, wherein the second semiconductor package comprises a contact pad coupled to the contact pad of the first semiconductor die.
20. The method of claim 15 , further comprising:
forming a redistribution layer over the first semiconductor die; and
forming a contact pad on the redistribution layer, the second semiconductor package comprising a component pad coupled to the contact pad.
21. The method of claim 15 , wherein the second semiconductor package comprises an inductor, a resistor, and/or a capacitor.
22. The method of claim 15 , wherein the second semiconductor package comprises a discrete passive device.
23. A method of forming a semiconductor module, the method comprising:
providing a semiconductor package comprising a first semiconductor die disposed in a first encapsulant;
forming an opening in the first encapsulant; and
attaching a second semiconductor die at least partially within the opening in the first encapsulant.
24. The method of claim 23 , wherein the second die comprises an inductor, a resistor, and/or a capacitor.
25. The method of claim 23 , wherein the second die comprises a discrete passive device.
26. The method of claim 23 , further comprising:
forming a second encapsulant over the second semiconductor die and the semiconductor package.
27. The method of claim 26 , wherein the first and the second semiconductor dies comprise discrete power semiconductors.
28. The method of claim 26 , wherein the second semiconductor die protrudes out of the opening.
29. The method of claim 26 , wherein the second semiconductor die is disposed completely within the opening.
30. The method of claim 26 , wherein the semiconductor package comprises a clip coupling a contact pad on the first semiconductor die to a lead, wherein the second semiconductor die comprises a contact pad coupled to a portion of the clip, and wherein the second semiconductor die is attached over the clip.
31. The method of claim 26 , wherein the first semiconductor die comprises a first contact pad, wherein the second semiconductor die comprises a second contact pad attached to the first contact pad of the first semiconductor die.