Method of manufacturing packages
A method of manufacturing packages having contents sealed therein, including: a step of forming cavities in a plurality of package forming areas on a first wafer; a step of bonding the first wafer and a second wafer while arranging the contents in the cavities; and a step of irradiating a bonded wafer member with a laser and separating the packages into pieces, characterized in that dummy cavities are formed on an outside of the package forming area in an outermost periphery of the first wafer in the cavity forming step.
1. A method of manufacturing packages having components sealed therein, the method comprising:
forming an array of device cavities in a package area on a first wafer;
bonding the first wafer and a second wafer and enclosing the components in the device cavities to form an array of component packages in a bonded wafer member; and
irradiating the bonded wafer member with a laser and separating the packages,
wherein forming device cavities further comprises forming dummy cavities outside of an outer perimeter of the array and in an outermost periphery of the first wafer, such that upon bonding the first wafer and the second wafer the dummy cavities are empty, the dummy cavities devoid of components and having substantially the same structure as the device cavities.
2. The method of manufacturing packages according to claim 1 , wherein forming the dummy cavities comprises forming first dummy cavities that contact edge sides of the array in the outermost periphery and forming second dummy cavities that contact only corner portions of the array in the outermost periphery.
3. The method of manufacturing packages according to claim 1 , wherein the first wafer and the second wafer comprise glass substrates.
4. The method of manufacturing packages according claim 1 , wherein separating the packages includes laser irradiating a front surface of the bonded wafer member and forming a groove in the front surface, and
wherein separating the packages comprises breaking the bonded wafer member by applying an impact force along the groove from a back surface of the bonded wafer member opposite to the front surface.
5. The method of manufacturing packages according to claim 1 , wherein forming dummy cavities comprises forming an area of dummy cavities that surround the device cavities.