Device for calorimetric measurement
View Patent ↗In one aspect, provided herein is a single crystal silicon microcalorimeter, for example useful for high temperature operation and long-term stability of calorimetric measurements. Microcalorimeters described herein include microcalorimeter embodiments having a suspended structure and comprising single crystal silicon. Also provided herein are methods for making calorimetric measurements, for example, on small quantities of materials or for determining the energy content of combustible material having an unknown composition.
1. A microcalorimeter comprising a single crystal silicon suspended structure supported by one or more single crystal silicon tethers, wherein the single crystal silicon suspended structure comprises a heater-thermometer, wherein the heater-thermometer comprises a region of doped single crystal silicon within the single crystal silicon suspended structure, wherein the single crystal silicon suspended structure and heater-thermometer comprise a unitary structure and wherein the heater-thermometer provides both heating and temperature sensing in a single element comprising said region of doped single crystal silicon.
2. The microcalorimeter of claim 1 , wherein the single crystal silicon suspended structure and heater-thermometer comprise a single layer.
3. The microcalorimeter of claim 1 , wherein the single crystal silicon suspended structure has a planar surface.
4. The microcalorimeter of claim 1 , wherein the single crystal silicon suspended structure is a suspended platform.
5. The microcalorimeter of claim 1 , wherein the single crystal silicon suspended structure has a width selected from the range of 10 to 500 μm.
6. The microcalorimeter of claim 1 , wherein the heater-thermometer comprises a serpentine path across the single crystal silicon suspended structure.
7. The microcalorimeter of claim 1 , comprising four single crystal silicon tethers.
8. The microcalorimeter of claim 1 , wherein at least one single crystal silicon tether comprises doped single crystal silicon.
9. The microcalorimeter of claim 1 , wherein the one or more single crystal silicon tethers have a width selected from the range of 1 to 50 μm.
10. The microcalorimeter of claim 1 , wherein the one or more single crystal silicon tethers have a length selected from the range of 10 to 500 μm.
11. The microcalorimeter of claim 1 , wherein the one or more single crystal silicon tethers have a thickness selected from the range of 0.05 to 5.0 μm.
12. The microcalorimeter of claim 1 , further comprising a resistance measuring circuit electrically connected to the heater-thermometer for measuring a resistance of the heater-thermometer.
13. The microcalorimeter of claim 1 , further comprising a current source electrically connected to the heater-thermometer for providing a current to the heater-thermometer.
14. A method of making a calorimetric measurement, the method comprising:
providing a microcalorimeter comprising a single crystal silicon suspended structure supported by one or more single crystal silicon tethers, wherein the single crystal silicon suspended structure comprises a heater-thermometer, wherein the heater-thermometer comprises a region of doped single crystal silicon within the single crystal silicon suspended structure, wherein the single crystal silicon suspended structure and heater-thermometer comprise a unitary structure and wherein the heater-thermometer provides both heating and temperature sensing in a single element comprising said region of doped single crystal silicon; and
monitoring a temperature of the heater-thermometer.
15. The method of claim 14 , further comprising a step of providing a compound to a surface of the single crystal silicon suspended structure.
16. The method of claim 14 , further comprising a step of providing a current to the heater-thermometer to raise a temperature of the heater thermometer.
17. The method of claim 14 wherein the step of monitoring the temperature of the heater-thermometer comprises measuring a resistance of the heater-thermometer.
18. A method of determining the energy density of a combustible material, the method comprising:
providing a microcalorimeter comprising a single crystal silicon suspended structure supported by one or more single crystal silicon tethers, wherein the single crystal silicon suspended platform comprises a heater-thermometer, wherein the heater-thermometer comprises a region of doped single crystal silicon within the single crystal silicon suspended structure, wherein the single crystal silicon suspended structure and heater-thermometer comprise a unitary structure and wherein the heater-thermometer provides both heating and temperature sensing in a single element comprising said region of doped single crystal silicon;
providing a combustible material to a surface of the single crystal silicon suspended structure;
providing a current to the heater-thermometer to heat the heater-thermometer and the combustible material and initiate combustion of the combustible material; and
monitoring a temperature of the heater-thermometer.
19. The method of claim 18 wherein the step of monitoring the temperature of the heater-thermometer comprises measuring a resistance of the heater-thermometer.