Flexible stop for an acceleration sensor
A micromechanical acceleration sensor includes a seismic mass and a substrate that has a reference electrode. The seismic mass is deflectable in a direction perpendicular to the reference electrode, and the seismic mass has a flexible stop in the deflection direction. The flexible stop of the seismic mass includes an elastic layer.
1. A micromechanical acceleration sensor, comprising:
a seismic mass; and
a substrate which has a reference electrode;
wherein the seismic mass is deflectable in a direction perpendicular to the reference electrode, and wherein the seismic mass has a flexible stop in the deflection direction, and wherein the flexible stop of the seismic mass includes an elastic layer.
2. The micromechanical acceleration sensor as recited in claim 1 , wherein the seismic mass and the flexible stop are formed as functional layers, and wherein a layer thickness of the functional layer of the seismic mass is greater than a layer thickness of the functional layer of the flexible stop.
3. The micromechanical acceleration sensor as recited in claim 2 , wherein a further layer is disposed between the functional layer of the seismic mass and the functional layer of the flexible stop, the further layer being patterned in order to form the flexible stop in the form of a free-standing section.
4. The micromechanical acceleration sensor as recited in claim 3 , wherein the flexible stop is configured as an arm having a first end which is joined firmly to the seismic mass and a second end which is movable.
5. The micromechanical acceleration sensor as recited in claim 4 , wherein the flexible arm of the flexible stop points outward with the movable second end away from a torsion axis, and wherein the seismic mass is deflectable about the torsion axis.
6. The micromechanical acceleration sensor as recited in claim 4 , wherein the flexible arm of the flexible stop points inward with the movable second end toward a torsion axis, and wherein the seismic mass is deflectable about the torsion axis.
7. The micromechanical acceleration sensor as recited in claim 4 , wherein the flexible stop has a projection provided on the elastic layer and projecting essentially in the deflection direction.
8. The micromechanical acceleration sensor as recited in claim 4 , wherein a rigid stop is applied on the functional layer adjacent to the flexible stop, the rigid stop projecting essentially in the deflection direction, and wherein deflections of the flexible stop and of the seismic mass are limited by the rigid stop.
9. The micromechanical acceleration sensor as recited in claim 4 , wherein the seismic mass is (i) in the form of a rocker having a first crossbar and a second crossbar, and (ii) deflectable about a torsion axis relative to the substrate, and wherein the first and second crossbars of the rocker have different masses.
10. The micromechanical acceleration sensor as recited in claim 4 , wherein the flexible stop is formed on the side of the seismic mass which is oriented toward the substrate.
11. The micromechanical acceleration sensor as recited in claim 4 , wherein the flexible stop is formed on the side of the seismic mass facing away from the substrate.