Pixelated imager with motfet and process
A method of fabricating a pixelated imager includes providing a substrate with bottom contact layer and sensing element blanket layers on the contact layer. The blanket layers are separated into an array of sensing elements by trenches isolating adjacent sensing elements. A sensing element electrode is formed adjacent each sensing element overlying a trench and defining a TFT. A layer of metal oxide semiconductor (MOS) material is formed on a dielectric layer overlying the electrodes and on an exposed upper surface of the blanket layers defining the sensing element adjacent each TFT. A layer of metal is deposited on each TFT and separated into source/drain electrodes on opposite sides of the sensing element electrode. The metal forming one of the S/D electrodes contacts the MOS material overlying the exposed surface of the semiconductor layer, whereby each sensing element in the array is electrically connected to the adjacent TFT by the MOS material.
1. A method of fabricating a pixelated imager comprising the steps of:
providing a substrate with a bottom contact layer and sensing element blanket layers deposited or grown on the bottom contact layer;
separating the sensing element blanket layers into an array of sensing elements with trenches isolating adjacent sensing elements in the array;
forming a gate electrode adjacent each sensing element in the array, each gate electrode overlying an isolating trench and defining a Thin Film Transistor (TFT);
forming a layer of metal oxide semiconductor material on a gate dielectric layer overlying the gate electrode of each TFT and on an exposed upper surface of the sensing element blanket layers defining the sensing element adjacent each TFT; and
depositing a layer of source/drain metal on the layer of metal oxide semiconductor material of each TFT over an area surrounding the gate electrode and separating the layer of source/drain metal into S/D electrodes on opposite sides of the gate electrode, the metal forming one of the S/D electrodes being in electrical contact with the metal oxide semiconductor material overlying the exposed upper surface of the sensing element blanket layers of the adjacent sensing element, whereby each sensing element in the array is electrically connected to the adjacent TFT by the metal oxide semiconductor material.
2. A method as claimed in claim 1 wherein the pixelated imager is fabricated to be sensitive to one of top illumination, bottom illumination, or both top illumination and bottom illumination.
3. A method as claimed in claim 2 wherein the substrate and bottom contact layer are transparent to sensing wavelengths of the sensing elements.
4. A method as claimed in claim 1 wherein the step of forming the gate electrode includes planarizing the trenches before depositing the gate electrodes.
5. A method as claimed in claim 1 wherein the step of forming the layer of metal oxide semiconductor material includes forming a layer of metal oxide semiconductor material that is transparent to sensing wavelengths of the sensing elements.
6. A method as claimed in claim 3 wherein the step of forming the layer of metal oxide semiconductor material with the transparent metal oxide semiconductor material includes a transparent metal oxide semiconductor material that is one of amorphous or polycrystalline.
7. A method as claimed in claim 1 wherein the step of forming the gate electrode adjacent each sensing element in the array includes forming data lines and gate scan lines overlying the isolating trenches.
8. A method as claimed in claim 1 wherein the step of depositing the layer of source/drain metal includes forming a layer of etch stop material to define an active area in the metal oxide semiconductor material overlying the gate electrode.
9. A method as claimed in claim 8 wherein the step of forming a layer of etch stop material includes forming a portion on the upper surface of the metal oxide semiconductor material on the upper surface of the sensing element blanket layers defining a sensing element adjacent each TFT.
10. A method as claimed in claim 1 wherein the step of providing the sensing element blanket layers includes providing p-n photodiode blanket layers deposited or grown on the bottom contact layer and the step of separating the sensing element blanket layers into the array of sensing elements includes separating the p-n photodiode blanket layers into an array of photodiodes with trenches isolating adjacent photodiodes in the array.
11. A method as claimed in claim 10 wherein the step of providing the substrate with the p-n junction blanket layers includes providing a lower layer of semiconductor material having one of p-type and n-type conductivity and an overlying layer of semiconductor material having the other of n-type and p-type conductivity forming a p-n junction.
12. A method as claimed in claim 11 wherein the step of providing a lower layer of semiconductor material and an overlying layer of semiconductor material includes depositing a layer of intrinsic material between the lower layer and the upper layer to form a PIN diode.
13. A method as claimed in claim 11 wherein the step of providing the substrate with the p-n junction blanket layers includes providing blanket layers including one of p-i1-n-i2-p layers or n-i1-p-i2-n layers.
14. A method of fabricating a top illumination-bottom imager comprising the steps of:
providing a substrate and forming a bottom electrode layer on the substrate;
depositing or growing at least a lower semiconductor layer and an overlying upper semiconductor layer on the bottom electrode to form a p-n junction blanket layer overlying the bottom electrode layer;
using a first masking step separating the upper semiconductor layer of the p-n junction blanket layer into an array of photodiodes with trenches isolating adjacent photodiodes in the array;
planarizing the array of photodiodes with a dielectric material;
using a second masking step forming a gate electrode defining a TFT adjacent each photodiode of the array of photodiodes, each of the gate electrodes overlying an isolating trench;
depositing or growing a layer of gate dielectric on the photo diode array, and using a third masking step removing portions of the layer of gate dielectric to expose an upper surface of the upper semiconductor layer of each photodiode in the array of photodiodes;
using a fourth masking step depositing or growing a layer of metal oxide semiconductor material on the gate dielectric layer overlying the gate electrode of each TFT and the exposed upper surface of the upper semiconductor layer of each photodiode in the array of photodiodes;
using a fifth masking step depositing a layer of etch stop material overlying the gate electrode of each TFT and the layer of metal oxide semiconductor material overlying the exposed upper surface of the upper semiconductor layer of each photodiode; and
using a sixth masking step depositing a layer of source/drain metal on each TFT over an area surrounding the gate electrode and separating the layer of source/drain metal into electrodes on opposite sides of the gate electrode, the metal forming one of the source/drain electrodes being in electrical contact with the metal oxide semiconductor material overlying the exposed upper surface of the upper semiconductor layer of the adjacent photodiode.
15. A method as claimed in claim 14 wherein the step of depositing or growing at least the lower semiconductor layer and the overlying upper semiconductor layer on the bottom electrode includes depositing a layer of intrinsic material between the lower layer and the upper layer to form a PIN diode.
16. A method as claimed in claim 15 wherein the step of separating the upper semiconductor layer of the p-n junction blanket layer into an array of photodiodes with trenches includes forming the trenches through a portion of the layer of intrinsic material.
17. A method as claimed in claim 14 wherein the step of forming the gate electrode defining the TFT adjacent each photodiode includes forming data lines and gate scan lines overlying the isolating trenches.
18. A method as claimed in claim 14 wherein the step of depositing or growing the layer of metal oxide semiconductor material includes forming a layer of metal oxide semiconductor material that is transparent to sensing wavelengths of the sensing elements.
19. A method as claimed in claim 18 wherein the step of depositing the layer of transparent metal oxide semiconductor material includes depositing a transparent metal oxide semiconductor material that is one of amorphous or polycrystalline.
20. A method as claimed in claim 14 wherein the step of planarizing the array of photodiodes with the dielectric material includes a coating process using one of polymer PMGI, polystyrene, PMMA, or other type acrylic polymer, Polyethylene, polyimide, polyvinyl phenol (PVP), zeon, PET, PEN, PES, PAN, BCB, SU8, silane- or siloxy-lane based, metallo-organic based compounds, spin on glasses, or grapheme oxides.
21. A structure including a pixelated imager comprising:
a substrate with a bottom contact layer and sensing element blanket layers deposited on the bottom contact layer;
the sensing element blanket layers being separated into an array of sensing elements with trenches isolating adjacent sensing elements in the array;
a gate electrode adjacent each sensing element in the array, each gate electrode overlying an isolating trench and defining a TFT;
a layer of metal oxide semiconductor material positioned on a dielectric layer overlying the gate electrode of each TFT and on an exposed upper surface of the sensing element blanket layers defining the sensing element adjacent each TFT; and
a layer of source/drain metal positioned on each TFT over an area surrounding the gate electrode and separated into source/drain electrodes on opposite sides of the gate electrode, the metal forming one of the source/drain electrodes being in electrical contact with the metal oxide semiconductor material overlying the exposed upper surface of the upper layer of the adjacent sensing element, whereby each sensing element in the array is electrically connected to the adjacent TFT by the metal oxide semiconductor material.
22. A structure as claimed in claim 21 wherein the sensing element blanket layers include a lower semiconductor layer an overlying upper semiconductor layer and a layer of intrinsic material between the lower layer and the upper layer forming a PIN diode sensing element.
23. A structure as claimed in claim 21 wherein the sensing element blanket layers include p-n photodiode blanket layers positioned on the bottom contact layer and the p-n photodiode blanket layers are separated into an array of photodiodes with trenches isolating adjacent photodiodes in the array.
24. A structure as claimed in claim 23 wherein the p-n junction blanket layers include a lower layer of semiconductor material having one of p-type and n-type conductivity and an overlying layer of semiconductor material having the other of n-type and p-type conductivity forming a p-n junction.
25. A structure as claimed in claim 24 wherein the p-n junction blanket layers including the lower layer of semiconductor material and the overlying layer of semiconductor material further include a layer of intrinsic material between the lower layer and the upper layer to form a PIN diode.
26. A structure as claimed in claim 24 wherein the p-n junction blanket layers include one of p-i1-n-i2-p layers or n-i1-p-i2-n layers.
27. A structure as claimed in claim 21 wherein the sensing element blanket layers separated into an array of sensing elements with trenches includes the trenches extending through a portion of the layer of intrinsic material.
28. A structure as claimed in claim 21 wherein the gate electrode adjacent each sensing element and overlying an isolating trench further includes data lines and gate scan lines overlying the isolating trenches.
29. A structure as claimed in claim 28 wherein a planarizing layer is positioned in the trenches beneath the gate electrode and the data lines and gate scan lines.
30. A structure as claimed in claim 29 wherein the planarizing layer includes a coating of one of polymer PMGI, polystyrene, PMMA, or other type acrylic polymer, Polyethylene, polyimide, polyvinyl phenol (PVP), zeon, PET, PEN, PES, PAN, BCB, SU8, silane- or siloxy-lane based, metallo-organic based compounds, spin on glasses, or grapheme oxides.
31. A structure as claimed in claim 21 wherein the layer of metal oxide semiconductor material includes a layer of metal oxide semiconductor material that is transparent to sensing wavelengths of the sensing elements.
32. A structure as claimed in claim 31 wherein the transparent metal oxide semiconductor material includes one of amorphous or polycrystalline transparent metal oxide semiconductor material.