Thin film transistor, array substrate and preparation method thereof
View Patent ↗One or more embodiments of the disclosed technology provide a thin film transistor, an array substrate and a method for preparing the same. The thin film transistor comprises a base substrate, and a gate electrode, a gate insulating layer, an active layer, an ohmic contact layer, a source electrode, a drain electrode and a passivation layer prepared on the base substrate in this order. The active layer is formed of microcrystalline silicon, and the active layer comprises an active layer lower portion and an active layer upper portion, and the active layer lower portion is microcrystalline silicon obtained by using hydrogen plasma to treat at least two layers of amorphous silicon thin film prepared in a layer-by-layer manner.
1. A preparation method for a thin film transistor comprising:
preparing a gate electrode and a gate insulating layer on a base substrate,
preparing an active layer on the gate insulating layer, and
preparing an ohmic contact layer, a source electrode, a drain electrode and a passivation layer on the active layer,
wherein the active layer comprises an active layer lower portion that contacts the gate insulating layer and an active layer upper portion that is in direct contact with the ohmic contact layer, and preparing of the active layer on the gate insulating layer comprises:
using a layer-by-layer growing process to prepare at least two layers of amorphous silicon thin film which are each treated by hydrogen plasma layer by layer to obtain microcrystalline silicon so as to form the active layer lower portion, and
using a successive deposition process to prepare microcrystalline silicon so as to form the active layer upper portion.
2. The preparation method for a thin film transistor according to claim 1 , wherein using the layer-by-layer growing process to prepare the active layer lower portion comprises:
depositing an amorphous silicon thin film by plasma enhanced chemical vapor deposition (PECVD), treating the amorphous silicon thin film by hydrogen plasma; and
repeating the PECVD and the hydrogen plasma treatment at least once to obtain the active layer lower portion.
3. The preparation method for a thin film transistor according to claim 2 , wherein each of the amorphous silicon thin films has a thickness less than 10 nm.
4. The preparation method for a thin film transistor according to claim 2 , wherein the PECVD has conditions comprising:
a silane flow rate in a range of 100˜250 scorn, a hydrogen flow rate in a range of 100˜250 sccm, a radio-frequency power in a range of 100˜300 W, a pressure in a range of 800˜1500 mTorr, and a temperature in a range between 350˜380° C.; and
the amorphous silicon thin film deposited by PECVD has a thickness of 3˜5 nm, and using hydrogen plasma to treat the amorphous silicon thin film has a range of time period between 20˜28 s.
5. The preparation method for a thin film transistor according to claim 4 , wherein
the amorphous silicon thin film layer obtained after each PECVD deposition has a thickness of 4 nm, treating of the amorphous silicon thin film by hydrogen plasma has a time period of 24 s, and the PECVD and the hydrogen plasma treatment are repeated 9 times to obtain the active layer lower portion.
6. The preparation method for a thin film transistor according to claim 2 , wherein the PECVD has conditions comprising:
a silane flow rate in a range of 100˜250 seem, a hydrogen flow rate in a range of 100˜250 seem, a radio-frequency power in a range of 100˜300 W, a pressure in a range of 800˜1500 mTorr, and a temperature in a range between 240˜260° C.; and
the amorphous silicon thin film deposited by PECVD has a thickness of 0.5˜2.5 nm, and using hydrogen plasma to treat the amorphous silicon thin film has a range of time period between 70˜110 s.
7. The preparation method for a thin film transistor according to claim 6 , wherein the amorphous silicon thin film after each PECVD deposition has a thickness of 1 nm, using hydrogen plasma to treat the amorphous silicon thin film has a time period of 90 s, and the PECVD and hydrogen plasma treatment are repeated 39 times to obtain the active layer lower portion.
8. The preparation method for a thin film transistor according to claim 1 , wherein using successive deposition process to prepare the active layer upper portion comprises:
using PECVD, low pressure chemical vapor deposition, hot wire chemical vapor deposition or sputtering to perform a successively deposition to prepare the active layer upper portion.
9. The preparation method for a thin film transistor according to claim 8 , wherein using PECVD to prepare the active layer upper portion has process conditions comprising:
a silane flow rate in a range of 10˜30 sccm, a hydrogen flow rate in a range of 1000˜3000 sccm, a radio-frequency power in a range between 700˜1550 W, a pressure in a range of 800˜900 mTorr, and a temperature in a range of 240˜270° C.