Polishing of small composite semiconductor materials
View Patent ↗A device includes a crystalline material within an area confined by an insulator. A surface of the crystalline material has a reduced roughness. One example includes obtaining a surface with reduced roughness by using a planarization process configured with a selectivity of the crystalline material to the insulator greater than one. In a preferred embodiment, the planarization process uses a composition including abrasive spherical silica, H 2 O 2 and water. In a preferred embodiment, the area confined by the insulator is an opening in the insulator having an aspect ratio sufficient to trap defects using an ART technique.
1. A semiconductor structure comprising:
a semiconductor substrate comprising a first semiconductor crystalline material;
an insulator having an opening to the semiconductor substrate;
a second semiconductor crystalline material within the opening in the insulator and directly adjoining the first semiconductor crystalline material of the semiconductor substrate, the second semiconductor crystalline material being lattice-mismatched with the first semiconductor crystalline material, and the second semiconductor crystalline material having a planarized top surface with a root mean square surface roughness of 0.5 nm or less; and
a device formed in the planarized top surface of the second semiconductor crystalline material.
2. The structure of claim 1 , wherein the semiconductor substrate is configured with depressions in the semiconductor substrate, and wherein the insulator overlies sides of the depression to form said opening.
3. The structure of claim 1 , wherein the insulator is formed over a planar surface of the semiconductor substrate, and wherein the openings of the insulator expose the planar surface of the semiconductor substrate.
4. The structure of claim 1 , wherein the planarized top surface is polished by a slurry comprising an abrasive, less than 0.3% H 2 O 2 30% solution and water.
5. The structure of claim 4 , wherein the abrasive is suspended silica sub-micron particles, suspended ceria sub-micron particles or suspended alumina submicron particles, wherein the particles are between 20-90 nm in size, or spherical and approximately 60 nm in size.
6. The structure of claim 4 , wherein the slurry mix is between 0.1% and 0.2% H 2 O 2 30% solution or about 0.15% H 2 O 2 .30% solution.
7. The structure of claim 4 , wherein polish selectivity of the second semiconductor crystalline material to the insulator is greater than 1:1.
8. The structure of claim 1 , wherein the opening is a trench, recess or hole.
9. The structure of claim 1 , wherein the second semiconductor crystalline material is epitaxially grown.
10. The structure of claim 1 , wherein the second semiconductor crystalline material is a group III-V compound or germanium.
11. The structure of claim 1 , wherein a surface of the semiconductor substrate exposed in the opening is a (001) surface of the semiconductor substrate, and wherein the semiconductor substrate is a single crystal substrate.
12. The structure of claim 1 , wherein dishing of a surface of the second semiconductor crystalline material is below 50 nm, 20 nm or 10 nm.
13. A semiconductor device comprising:
a substrate;
a first material having a plurality of openings in a surface;
a semiconductor crystalline material within the openings in the first material, wherein the openings have an aspect ratio sufficient to trap defects in the semiconductor crystalline material;
a substantially planar top surface of a composite structure of the first material and the semiconductor crystalline material, wherein a dishing of the semiconductor crystalline material in the substantially planar top surface has a depth from a top surface of the first material of less than 50 nm; and
a device in the semiconductor crystalline material in the substantially planar top surface.
14. The semiconductor device of claim 13 , wherein the depth is less than 20 nm.
15. The semiconductor device of claim 13 , wherein the depth is less than 10 nm.