Method and apparatus to support a cleanspace fabricator
The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools. Support aspects include support structure for processing tools, a clean environment carrier for a single substrate and a quick disconnect flange which facilities connecting and disconnect of electrical, liquid and gas utilities to a processing tool placed in the fabricator. Methods of installing processing tools and for producing substrates in this environment are provided.
1. A method of producing substrate material comprising:
fixing an apparatus for placing a processing tool comprising a tool body and a tool port in a fabrication facility comprising a clean-space, wherein the apparatus comprises:
a chassis supporting a chassis plate for mounting the processing tool onto, said chassis comprising an extended position and a closed position;
the chassis plate attached to the chassis, said chassis plate comprising a mating surface for receiving the tool body;
a base plate for positioning the chassis plate in the closed position, wherein when the chassis is in the closed position, the tool port is sealed within a primary cleanspace and the tool body is exterior to the primary cleanspace;
placing the chassis into the extended position to receive the tool body;
placing the processing tool comprising the tool body with the tool port upon the chassis;
moving the chassis with processing tool thereupon into the closed position, wherein the tool port is positioned into a primary cleanspace portion of a cleanspace fabrication facility; and
processing a substrate within the tool body.
2. The method of claim 1 additionally comprising the step of: placing a substrate carrier comprising the substrate into connection with the tool port.
3. The method of claim 2 additionally comprising the step of: moving the substrate from the tool port to the tool body with automation.
4. The method of claim 1 wherein the material upon the substrate comprises a semiconductor.
5. The method of claim 4 wherein the processing contributes to production of an integrated circuit.
6. A method of installing processing tools within a cleanspace fabrication facility comprising:
fixing an apparatus for placing a tool body and a tool port in a fabrication facility comprising a clean-space, wherein the apparatus comprises:
a chassis supporting a chassis plate for mounting a processing tool onto, said chassis comprising an extended position and a closed position;
the chassis plate attached to the chassis, said chassis plate comprising a mating surface for receiving the tool body;
a base plate for positioning the chassis plate in the closed position, wherein when the chassis is in the closed position, the tool port is sealed within a primary cleanspace and the tool body is exterior to the primary cleanspace;
placing the chassis into the extended position to receive the tool body;
placing the processing tool comprising the tool body with the tool port upon the chassis; and
moving the chassis with processing tool thereupon into an operating position, wherein the tool port is positioned into a primary cleanspace portion of the cleanspace fabrication facility.
7. The method of claim 6 additionally comprising: communicating data between the tool body and tool chassis by a wireless transfer.