Liquid jetting apparatus, piezoelectric actuator, and method for producing the liquid jetting apparatus

1. A liquid jetting apparatus for jetting a liquid, the apparatus comprising:

a channel unit in which a liquid channel including a nozzle for jetting the liquid is formed; and

a piezoelectric actuator which is provided on the channel unit and which applies jetting energy to the liquid inside the liquid channel;

wherein the piezoelectric actuator comprises:

a piezoelectric element; and

a wiring substrate in which a first electrode and a wire electrically connected to the first electrode are formed and which is joined to one surface of the piezoelectric element;

wherein the first electrode makes contact with the piezoelectric element;

wherein a portion, of the wiring substrate, at which the first electrode is formed is thinner than any portion, of the wiring substrate, different from the portion at which the first electrode is formed; and

wherein the wiring substrate includes:

an atmosphere communication passage; and

a communication portion communicated with the atmosphere communication passage.

2. A liquid jetting apparatus for jetting a liquid, the apparatus comprising:

a channel unit in which a liquid channel including a nozzle for jetting the liquid is formed; and

a piezoelectric actuator which is provided on the channel unit and which applies jetting energy to the liquid inside the liquid channel;

wherein the piezoelectric actuator comprises:

a piezoelectric element; and

a wiring substrate in which a first electrode and a wire electrically connected to the first electrode are formed and which is joined to one surface of the piezoelectric element;

wherein the first electrode makes contact with the piezoelectric element; and

wherein the wiring substrate includes:

an atmosphere communication passage; and

a communication portion communicated with the atmosphere communication passage.

3. The liquid jetting apparatus according to claim 2 ;

wherein a plurality of first grooves as the communication portion are formed on a joint surface of the wiring substrate with respect to the piezoelectric element, and the first electrode is formed by a conductive material filled in the first grooves.

4. The liquid jetting apparatus according to claim 3 ;

wherein at least under a condition that the first grooves are filled with the conductive material, the first grooves communicate with the atmosphere through the atmosphere communication passage in a state that the wiring substrate makes contact with the piezoelectric element.

5. The liquid jetting apparatus according to claim 4 ;

wherein in the atmosphere communication passage, a plurality of ribs are arranged along a length direction of the atmosphere communication passage.

6. The liquid jetting apparatus according to claim 4 ;

wherein the piezoelectric actuator further comprises a second electrode arranged on a surface of the piezoelectric element opposite to the one surface so as to sandwich the piezoelectric element between the second electrode and the first electrode;

wherein a pullout electrode is provided on the one surface of the piezoelectric element to be electrically conducted to the second electrode;

wherein the atmosphere communication passage of the wiring substrate includes an atmosphere communication groove which is formed on the joint surface with respect to the piezoelectric element and which is connected to the first grooves, and an atmosphere communication hole which penetrates through the wiring substrate in a thickness direction of the wiring substrate and which is communicated with the atmosphere communication groove; and

wherein the conductive material filled in the atmosphere communication hole is electrically conducted to the pullout electrode.

7. A liquid jetting apparatus for jetting a liquid, the apparatus comprising:

a channel unit in which a liquid channel including a nozzle for jetting the liquid is formed; and

a piezoelectric actuator which is provided on the channel unit and which applies jetting energy to the liquid inside the liquid channel;

wherein the piezoelectric actuator comprises:

a piezoelectric element; and

a wiring substrate in which a first electrode and a wire electrically connected to the first electrode are formed and which is joined to one surface of the piezoelectric element;

wherein the first electrode makes contact with the piezoelectric element;

wherein a plurality of first grooves are formed on a joint surface of the wiring substrate with respect to the piezoelectric element, and the first electrode is formed by a conductive material filled in the first grooves;

wherein on a surface of the wiring substrate opposite to the joint surface with respect to the piezoelectric element, a second groove which has a width greater than that of each of the first grooves is formed;

wherein the second groove is communicated with the first grooves via a through hole penetrating through the wiring substrate in a thickness direction of the wiring substrate;

wherein the first electrode is formed on the joint surface of the wiring substrate by the conductive material filled in the first grooves from the second groove via the through hole; and

wherein the wire electrically connected to the first electrode is formed on the surface of the wiring substrate opposite to the joint surface.

8. The liquid jetting apparatus according to claim 7 ,

wherein in the wiring substrate, a portion of an area, on which the first grooves are formed, extends out from the piezoelectric element and is not joined to the piezoelectric element.

9. The liquid jetting apparatus according to claim 8 ;

wherein the first grooves extend from a communication portion communicated with the through hole toward the portion extending out from the piezoelectric element.

10. The liquid jetting apparatus according to claim 8 ;

wherein the channel unit has a conductivity at least at a portion on which the piezoelectric element is arranged, and has an insulation film formed in an area facing the portion of the wiring substrate at which the first grooves extend out from the piezoelectric element.

11. The liquid jetting apparatus according to claim 9 ;

wherein the piezoelectric actuator further comprises a second electrode arranged on a surface of the piezoelectric element opposite to the one surface so that the piezoelectric element is sandwiched between the first electrode and the second electrode;

wherein the second electrode is shorter than the piezoelectric element with respect to an extending direction of the first grooves; and

wherein the second electrode is not exposed to outside of the piezoelectric element at least lateral sides of the piezoelectric element with respect to a direction in which the first grooves extend.

12. A piezoelectric actuator comprising:

a piezoelectric element; and

a wiring substrate in which a first electrode and a wire electrically connected to the first electrode are formed and which is joined to one surface of the piezoelectric element;

wherein the first electrode makes contact with the piezoelectric element;

wherein the wiring substrate is thinned at a portion at which the first electrode is formed; and

wherein the wiring substrate includes:

an atmosphere communication passage; and

a communication portion communicated with the atmosphere communication passage.

13. A method for producing a liquid jetting apparatus including: a channel unit in which a liquid channel including a nozzle for jetting the liquid is formed; and a piezoelectric actuator which includes a piezoelectric element and a wiring substrate joined to one surface of the piezoelectric element, and which is provided on the channel unit to apply jetting energy to the liquid inside the liquid channel; the method comprising:

a groove formation step for forming a plurality of first grooves on a joint surface of the wiring substrate with respect to the piezoelectric element; and

an electrode formation step for forming a first electrode on the joint surface and joining the joint surface of the wiring substrate to the piezoelectric element by filling the first grooves with a liquid conductive material;

wherein the wiring substrate includes:

an atmosphere communication passage; and

a communication portion communicated with the atmosphere communication passage.

14. The method according to claim 13 ;

wherein in the electrode formation step, the first grooves are filled with the conductive material in a state that the joint surface of the wiring substrate on which the first grooves are formed makes contact with the one surface of the piezoelectric element.

15. The method according to claim 14 , further comprising:

an atmosphere communication passage formation step for forming an atmosphere communication passage, in the wiring substrate, for communicating the first grooves with the atmosphere in a state that the wiring substrate makes contact with the piezoelectric element.

16. The method according to claim 14 ;

wherein the conductive material is a conductive ink containing a thermosetting resin; and

wherein the electrode formation step further includes heating the conductive material filled in the first grooves.

17. The method according to claim 13 ;

wherein in the groove formation step, a second groove which communicates with the first grooves is formed on a surface of the wiring substrate opposite to the joint surface; and

wherein in the electrode formation step, a conductive ink is jetted into the second groove by an ink-jet head and the first grooves are filled with the conductive ink from the second groove.

18. The method according to claim 14 ;

wherein in the electrode formation step, the wiring substrate makes contact with the one surface of the piezoelectric element such that a part of an area, of the wiring substrate, on which the plurality of first grooves are formed extend out from the one surface of the piezoelectric element.

19. The method according to claim 17 ;

wherein in the electrode formation step, the conductive ink is jetted from the ink-jet head toward an end portion, of the second groove, at which the second groove communicate with the first grooves.

20. A piezoelectric actuator comprising:

a piezoelectric element; and

a wiring substrate in which a first electrode and a wire electrically connected to the first electrode are formed and which is joined to one surface of the piezoelectric element;

wherein the first electrode makes contact with the piezoelectric element; and

wherein the wiring substrate includes:

an atmosphere communication passage; and

a communication portion communicated with the atmosphere communication passage.

21. The piezoelectric actuator according to claim 20 ;

wherein a plurality of first grooves as the communication portion are formed on a joint surface of the wiring substrate with respect to the piezoelectric element;

wherein the first grooves communicate with the atmosphere through the atmosphere communication passage in a state that the wiring substrate makes contact with the piezoelectric element; and

wherein the first electrode is formed by a conductive material filled in the first grooves.