IP Library Granted Patent US 8,987,079
Granted Patent B2
US 8,987,079 · App. 13/683,344 · Granted Mar 24, 2015

Method for developing a custom device

Inventor: Zvi Or-Bach (San Jose, CA)
Assignee: Monolithic 3D Inc.
H01L21/8221H01L21/6835H01L21/76254H01L21/823828H01L21/84H01L23/5252H01L24/32H01L24/83H01L25/0655H01L25/0657H01L25/50H01L27/0207H01L27/0688H01L27/092H01L27/10H01L27/105H01L27/10802H01L27/10876H01L27/10894H01L27/10897H01L27/11H01L27/1108H01L27/1116H01L27/112H01L27/11526H01L27/11529H01L27/11551H01L27/11573H01L27/11578H01L27/11807H01L27/11898H01L27/1203H01L29/4236H01L29/66272H01L29/66621H01L29/66825H01L29/66833H01L29/66901H01L29/78H01L29/7841H01L29/7881H01L29/792H01L23/3677H01L23/481H01L24/05H01L24/13H01L27/10873H01L27/11206H01L27/1214H01L27/1266H01L2221/68368H01L2223/5442H01L2223/54426H01L2224/32145H01L2224/32225H01L2224/48091H01L2224/48227H01L2224/73253H01L2224/73265H01L2224/83894H01L2225/06513H01L2225/06541H01L2924/01002H01L2924/01004H01L2924/01013H01L2924/01018H01L2924/01029H01L2924/01046H01L2924/0105H01L2924/01051H01L2924/01073H01L2924/01077H01L2924/01078H01L2924/01082H01L2924/10329H01L2924/15311H01L2924/1579H01L2924/16152H01L2924/19041H01L2924/30105H01L2924/3011H01L2924/3025H01L24/48H01L2924/01005H01L2924/01006H01L2924/01019H01L2924/01023H01L2924/01033H01L2924/01066H01L2924/01068H01L2924/01072H01L2924/01074H01L2924/01075H01L2924/01076H01L2924/01322H01L2924/014H01L2924/13091H01L2224/16145H01L2224/73204H01L2924/0132H01L2224/45124H01L2924/10253
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,987,079
App. No.
13/683,344
Granted
Mar 24, 2015
Kind
B2
Abstract

A method for developing a custom device, the method including: programming a programmable device, where the programmable device includes a layer of monocrystalline first transistors and alignment marks, the first layer of monocrystalline first transistors is overlaid by interconnection layers, the interconnection layers are overlaid by a second layer of monocrystalline second transistors, where the interconnection layers include copper or aluminum, where the programming includes use of the second transistors, where the programming includes use of N type transistors and P type transistors, and where the programmable device includes at least one programmable connection; and then a step of producing a volume device according to a specific programmed design of the programmable device, where the volume device includes the at least one programmable connection replaced with a lithography defined connection, and where the volume device does not have the second layer.

Claims (69)

1. A method for developing a custom device, the method comprising:

programming a programmable device,

wherein said programmable device comprises a layer of monocrystalline first transistors and alignment marks, said first layer of monocrystalline first transistors is overlaid by interconnection layers, said interconnection layers are overlaid by a second layer of monocrystalline second transistors,

wherein said interconnection layers comprise copper or aluminum,

wherein said programming comprises use of said second transistors,

wherein said programming comprises use of N type transistors and P type transistors, and

wherein said programmable device comprises at least one programmable connection; and then

a step of producing a volume device according to a specific programmed design of said programmable device,

wherein said volume device comprises said at least one programmable connection replaced with a lithography defined connection, and

wherein said volume device does not have said second layer.

2. The method according to claim 1 ,

wherein said interconnection layers of said programmable device comprise at least two interconnection strips having a programmable antifuse connection.

3. The method according to claim 1 ,

wherein formation of said second transistors comprises lithography alignment to said alignment marks, and

wherein said alignment has less than 40 nm alignment error.

4. The method according to claim 1 ,

wherein formation of said second transistors comprises a step of defect annealing or dopant activation using optical energy.

5. The method according to claim 1 ,

wherein formation of said programmable device comprises a step of layer transfer.

6. The method according to claim 1 ,

wherein formation of said second transistors comprises at least one processing step wherein said second transistors are overlaying said first transistors.

7. The method according to claim 1 ,

wherein said second transistors are horizontally oriented.

8. A method for developing a custom device, the method comprising:

programming a programmable device,

wherein said programmable device comprises a layer of monocrystalline first transistors and alignment marks, said first layer of monocrystalline first transistors is overlaid by interconnection layers, said interconnection layers are overlaid by a second layer of monocrystalline second transistors,

wherein said interconnection layers comprise copper or aluminum,

wherein said programming comprises use of said second transistors,

wherein said programming comprises use of N type transistors and P type transistors,

wherein formation of said second transistors comprises a step of defect annealing or dopant activation using optical energy, and

wherein said programmable device comprises at least one programmable connection; and

then

a step of producing a volume device according to a specific programmed design of said programmable device,

wherein said volume device comprises said at least one programmable connection replaced with a lithography defined connection, and

wherein said volume device does not have said second layer.

9. The method according to claim 8 ,

wherein said formation of said second transistors comprises lithography alignment to said alignment marks.

10. The method according to claim 8 ,

wherein said interconnection layers of said programmable device comprise at least two interconnection strips having a programmable antifuse connection.

11. The method according to claim 8 ,

wherein formation of said programmable device comprises a step of layer transfer.

12. The method according to claim 8 ,

wherein said second transistors are horizontally oriented.

13. The method according to claim 8 ,

wherein said formation of said second transistors comprises at least one processing step wherein said second transistors are overlaying said first transistors.

14. A method for developing a custom device, the method comprising:

programming a programmable device,

wherein said programmable device comprises a layer of monocrystalline first transistors and alignment marks, said first layer of monocrystalline first transistors is overlaid by interconnection layers, said interconnection layers are overlaid by a second layer of monocrystalline second transistors,

wherein said interconnection layers comprise copper or aluminum,

wherein said programming comprises use of said second transistors,

wherein said programming comprises use of N type transistors and P type transistors,

wherein formation of said programmable device comprises a step of layer transfer, and

wherein said programmable device comprises at least one programmable connection;

and then

a step of producing a volume device according to a specific programmed design of said programmable device,

wherein said volume device comprises said at least one programmable connection replaced with a lithography defined connection, and

wherein said volume device does not have said second layer.

15. The method according to claim 14 ,

wherein said interconnection layers of said programmable device comprise at least two interconnection strips having a programmable antifuse connection.

16. The method according to claim 14 ,

wherein formation of said second transistors comprises lithography alignment to said alignment marks.

17. The method according to claim 14 ,

wherein formation of said second transistors comprises a step of defect annealing or dopant activation using optical energy.

18. The method according to claim 14 ,

wherein said second transistors are horizontally oriented.

19. The method according to claim 14 ,

wherein said layer transfer comprises an ion-cut.

20. The method according to claim 14 ,

wherein formation of said second transistors comprises at least one processing step wherein said second transistors are overlaying said first transistors.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 25, 2012
From: OR-BACH, ZVI
To: MONOLITHIC 3D INC.
Reel/Frame 029344/0222 →
Continuity (2)
Continuation 13016313 · Jan 28, 2011
Related Publication 20130119557A1 · May 16, 2013