IP Library › Granted Patent US 8,987,886
Granted Patent B2
US 8,987,886 · App. 13/413,724 · Granted Mar 24, 2015

Copper pillar full metal via electrical circuit structure

Inventor: James Rathburn (Mound, MN)
Assignee: HSIO Technologies, LLC
H01L23/49827H01L23/49822H01L21/486H01L21/76831
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Quick Facts
Patent No.
US 8,987,886
App. No.
13/413,724
Granted
Mar 24, 2015
Kind
B2
Abstract

An electrical interconnect including a first circuitry layer with a first surface and a second surface. At least a first dielectric layer is printed on the first surface of the first circuitry layer to include a plurality of first recesses. A conductive material is deposited in a plurality of the first recesses to form a plurality of first conductive pillars electrically coupled to, and extending generally perpendicular to, the first circuitry layer. At least a second dielectric layer is printed on the first dielectric layer to include a plurality of second recesses generally aligned with a plurality of the first conductive pillars. A conductive material is deposited in a plurality of the second recesses to form a plurality of second conductive pillars electrically coupled to, and extending parallel the first conductive pillars.

Claims (43)

1. A method of making an electrical interconnect comprising the steps of:

providing a first circuitry layer comprising a first surface and a second surface;

applying at least a first dielectric layer on the first surface of the first circuitry layer to include a plurality of first recesses;

plating a conductive material that substantially fills a plurality of the first recesses comprising a plurality of first conductive pillars electrically coupled to, and extending generally perpendicular to, the first circuitry layer;

planarizing the first conductive pillars and the first dielectric layer before applying the second dielectric layer;

applying at least a second dielectric layer on the first dielectric layer to include a plurality of second recesses generally aligned with a plurality of the first conductive pillars;

plating a conductive material that substantially fills a plurality of the second recesses comprising a plurality of second conductive pillars electrically coupled to, and extending parallel to the first conductive pillars; and

electrically coupling contact pads on an IC device to a plurality of the second conductive pillars.

2. The method of claim 1 comprising the step of printing at least one electrical device on one of the dielectric layers and electrically coupling the printed electrical device to at least a portion of the first circuitry layer.

3. The method of claim 1 comprising the steps of:

locating a second circuitry layer on the second dielectric layer and electrically coupling the second circuitry layer with a plurality of the second conductive pillars; and

applying at least a third dielectric layer on the second dielectric layer to include a plurality of third recesses generally aligned with a plurality of the second conductive pillars.

4. The method of claim 3 comprising etching away portions of the second circuitry layer located in the third recesses away to expose a plurality of the second conductive pillars.

5. The method of claim 3 comprising the steps of:

plating a conductive material in a plurality of the third recesses comprising a plurality of third conductive pillars electrically coupled to, and extending parallel the second conductive pillars; and

electrically coupling contact pads on an IC device to a plurality of the third conductive pillars, wherein the step of electrically coupled comprises one of a flip chip attachment directly to a plurality of third pillars, solder balls, or wire bonding.

6. The method of claim 3 comprising the steps of:

locating a third circuitry layer on the third dielectric layer; and

attaching a covering layer to the third circuitry layer, the covering layer comprising a plurality of openings exposing contact pads on the third circuitry layer configured to electrically couple with an IC device.

7. The method of claim 1 comprising attaching a covering layer to the second surface of the first circuitry layer, the covering layer comprising a plurality of openings exposing a plurality of contact pads on the first circuitry layer adapted to electrically couple with a PCB.

8. The method of claim 1 comprising locating a dielectric material in one or more of the recesses to surround one or more conductive pillars.

9. A method of making an electrical interconnect comprising the steps of:

providing a first circuitry layer comprising a first surface and a second surface;

applying a first liquid dielectric layer on the first surface of the first circuitry layer;

imaging the first liquid dielectric layer to form a first dielectric layer with a plurality of first recesses;

plating a conductive material that substantially fills a plurality of the first recesses comprising a plurality of first conductive pillars electrically coupled to, and extending generally perpendicular to, the first circuitry layer;

planarizing the first conductive pillars and the first dielectric layer;

applying a second liquid dielectric layer on the first dielectric layer;

imaging the second liquid dielectric layer to form second dielectric layer with a plurality of second recesses generally aligned with a plurality of the first conductive pillars; and

plating a conductive material that substantially fills a plurality of the second recesses comprising a plurality of second conductive pillars electrically coupled to, and extending from the first conductive pillars; and

printing at least one electrical device on one of the dielectric layers and electrically coupling the electrical device to at least a portion of the circuitry layers.

10. The method of claim 1 comprising the step of plating sidewalls of the first recesses to facilitate plating of the first conductive pillars.

11. The method of claim 1 comprising the step of planarizing the second conductive pillars and the second dielectric layer.

12. A method of making an electrical interconnect comprising the steps of:

providing a first circuitry layer comprising a first surface and a second surface;

applying a first liquid dielectric layer on the first surface of the first circuitry layer;

imaging the first liquid dielectric layer to form a plurality of first recesses;

plating sidewalls of the first recesses;

plating a conductive material that substantially fills a plurality of the first recesses comprising a plurality of first conductive pillars electrically coupled to, and extending generally perpendicular to, the first circuitry layer;

planarizing the first conductive pillars and the first dielectric layer;

applying a second liquid dielectric layer on the first dielectric layer;

imaging the second liquid dielectric layer to form a plurality of second recesses generally aligned with a plurality of the first conductive pillars; and

plating a conductive material that substantially fills a plurality of the second recesses comprising a plurality of second conductive pillars electrically coupled to, and extending from the first conductive pillars.

Assignments (2)
CORRECTIVE ASSIGNMENT TO CORRECT THE SERIAL NUMBER AND FILING DATE ON THE FACE OF THE ASSIGNMENT PREVIOUSLY RECORDED ON REEL 027817 FRAME 0596. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT FROM JAMES RATHBURN TO HSIO TECHNOLOGIES, LLC.. Recorded Mar 16, 2012
From: RATHBURN, JAMES
To: HSIO TECHNOLOGIES, LLC
Reel/Frame 027875/0303 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 7, 2012
From: RATHBURN, JAMES
To: HSIO TECHNOLOGIES, LLC
Reel/Frame 027817/0596 →
Continuity (16)
Continuation In Part 13266573
Continuation In Part 13413724
Continuation In Part 13318181
Continuation In Part 13413724
Continuation In Part 13318200
Continuation In Part 13413724
Continuation In Part 13318382
Continuation In Part 13413724
Continuation In Part 13319203
Provisional Application 61451685 · Mar 11, 2011
Provisional Application 61183411 · Jun 2, 2009
Provisional Application 61183365 · Jun 2, 2009
Provisional Application 61183356 · Jun 2, 2009
Provisional Application 61183335 · Jun 2, 2009
Provisional Application 61221356 · Jun 29, 2009
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