Nanomechanical electric and electromagnetic field sensor
View Patent ↗The present invention provides a system for detecting and analyzing at least one of an electric field and an electromagnetic field. The system includes a micro/nanomechanical oscillator which oscillates in the presence of at least one of the electric field and the electromagnetic field. The micro/nanomechanical oscillator includes a dense array of cantilevers mounted to a substrate. A charge localized on a tip of each cantilever interacts with and oscillates in the presence of the electric and/or electromagnetic field. The system further includes a subsystem for recording the movement of the cantilever to extract information from the electric and/or electromagnetic field. The system further includes a means of adjusting a stiffness of the cantilever to heterodyne tune an operating frequency of the system over a frequency range.
1. A system for detecting at least one of an electrical field and an electromagnetic field comprising:
a substrate comprising a semiconductor material; and
an array of cantilevers each including a stem and a tip, the stem of each of the cantilevers attached generally perpendicular to the substrate and separated from adjacent stems within the array by a portion of the substrate, the tip positioned on the stem at a position opposite a stem end attached to the substrate, wherein the tip includes an electric charge q and wherein the cantilever deflects from an initial position in the presence of at least one of the electric field and the electromagnetic field.
2. The system of claim 1 , wherein the tip comprises a microsphere.
3. A system for detecting at least one of an electrical field and an electromagnetic field comprising:
a substrate comprising a semiconductor material; and
a cantilever including a stem and a tip, the stem attached generally perpendicular to the substrate and the tip positioned on the stem at a position opposite the substrate, wherein the tip includes an electric charge q and wherein the cantilever deflects from an initial position in the presence of at least one of the electric field and the electromagnetic field, wherein the tip comprises a microsphere comprising glass.
4. The system of claim 1 , wherein the charge q is a positive charge.
5. The system of claim 1 , wherein the cantilever is disposed in an inert gas atmosphere.
6. The system of claim 3 further comprising:
an array of cantilevers on the substrate.
7. The system of claim 1 further comprising:
a subsystem for measuring a movement of the cantilever including a digital signal processor, a collimated optical beam and a camera.
8. The system of claim 7 further comprising:
a stroboscopic video analyzer and a frequency modulated phase-locked loop to detect frequencies.
9. The system of claim 1 further comprising:
a conductor loop positioned within the substrate;
a signal generator in electrical connection with the digital signal processor and the loop of conductor, wherein modulation of a current passing through the loop of conductor produces a reference frequency for heterodyning to detect a frequency of the at least one of the electrical field and the electromagnetic field.
10. The system of claim 1 , wherein a cantilever resonance frequency of the cantilever is tunable by modulating an applied voltage of the cantilever.
11. The system of claim 1 further comprising:
a piezoelectric element positioned on the stem, wherein the piezoelectric element modifies a stiffness of the cantilever.
12. A system for detecting at least one of an electrical field and an electromagnetic field comprising:
a substrate;
a cantilever including a stem and a tip, the stem attached generally perpendicular to the substrate and the tip positioned on the stem at a position opposite the substrate, wherein the tip comprises a microsphere made of glass and includes an electric charge q;
a driver including a light source and a projecting optic shining a light on the cantilever and the substrate;
a digital camera, an imaging optics and a spatial filter positioned over the cantilever and the substrate to capture a reflected light from the cantilever and the substrate; and
wherein the cantilever deflects from an initial position in the presence of at least one of the electric field and the electromagnetic field.
13. The system of claim 12 , wherein the charge q is a positive charge.
14. The system of claim 12 , wherein the cantilever is disposed in an inert gas atmosphere.
15. The system of claim 12 further comprising:
an array of cantilevers on the substrate.
16. The system of claim 12 further comprising:
a digital signal processor in electrical connection with the driver and the digital camera.
17. The system of claim 12 , wherein a cantilever resonance frequency is tunable by modulating an applied voltage of the cantilever.
18. The system of claim 12 further comprising:
a piezoelectric element positioned on the stem, wherein the piezoelectric element modifies a stiffness of the cantilever.
19. The system of claim 1 , further comprising:
a driver including a light source and a projecting optic shining a light on the cantilevers and the substrate;
a digital camera, an imaging optics and a spatial filter positioned over the cantilevers and the substrate to capture a reflected light from the cantilevers and the substrate; and
wherein the cantilevers deflect from an initial position in the presence of at least one of the electric field and the electromagnetic field.
20. The system of claim 1 , wherein a movement of each tip of the cantilevers traces a sinusoidal wave of the at least one of an electrical field and an electromagnetic field.