IP Library Granted Patent US 8,993,092
Granted Patent B2
US 8,993,092 · App. 13/030,260 · Granted Mar 31, 2015

Polycrystalline ferroelectric or multiferroic oxide articles on biaxially textured substrates and methods for making same

Inventors: Amit Goyal (Knoxville, TN); Junsoo Shin (Brentwood, TN)
Assignee: UT-Battelle, LLC
C30B29/24C30B23/02C30B29/26H01F1/407
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Quick Facts
Patent No.
US 8,993,092
App. No.
13/030,260
Granted
Mar 31, 2015
Kind
B2
Abstract

A polycrystalline ferroelectric and/or multiferroic oxide article includes a substrate having a biaxially textured surface; at least one biaxially textured buffer layer supported by the substrate; and a biaxially textured ferroelectric or multiferroic oxide layer supported by the buffer layer. Methods for making polycrystalline ferroelectric and/or multiferroic oxide articles are also disclosed.

Claims (63)

1. A polycrystalline multiferroic device article comprising:

a. a substrate having a biaxially textured surface;

b. a biaxially textured buffer layer supported by and in contact with the substrate; and,

c. a biaxially textured, multiferroic device layer supported by and in contact with the buffer layer.

2. The device article of claim 1 , wherein the biaxially textured multiferroic device layer comprises at least one selected from the group consisting of multiferroic rare-earth manganites and ferrites and bismuth ferrites and manganites.

3. The device article of claim 1 , wherein the biaxially textured multiferroic device layer comprises at least one selected from the group consisting of TbMnO 3 , HoMn 2 O 5 , LuFe 2 O 4 , BiFeO 3 and BiMnO 3 .

4. The device article of claim 1 , further comprising a conducting layer in contact with the biaxially textured multiferroic device layer.

5. The device article of claim 4 , wherein the conducting layer is SrRuO 3 .

6. The device article of claim 1 , wherein the orientation of the multiferroic device layer is selected from the group consisting of (111), (101), and (001).

7. The device article of claim 1 , wherein the buffer layer comprises Y 2 O 3 .

8. The device article of claim 7 , wherein the buffer layer further comprises a YSZ layer on the Y 2 O 3 layer.

9. The device article of claim 8 , wherein the buffer layer further comprises a CeO 2 layer on the YSZ layer.

10. The device article of claim 9 , wherein the buffer layer further comprises a BiFeO 3 seed layer on the CeO 2 layer.

11. The device article of claim 1 , wherein the buffer layer comprises MgO.

12. The device article of claim 1 , wherein the article is selected from the group consisting of a high-density flexible data storage device, an actuator, a switch, and a magnetic field sensor.

13. The device article of claim 1 , wherein the article is a non-volatile memory device.

14. The device article of claim 1 , wherein said substrate is a RABiTS.

15. The device article of claim 1 , wherein said substrate is an ion beam assisted deposition (IBAD) substrate.

16. The device article of claim 1 , wherein the substrate is an inclined-substrate deposition (ISD) substrate.

17. A method for making a polycrystalline multiferroic oxide article comprising:

a. a substrate having a biaxially textured surface;

b. a biaxially textured buffer layer supported by and in contact with the substrate; and,

c. a biaxially textured, multiferroic device layer supported by and in contact with the buffer layer,

the method comprising the steps of:

a. providing a substrate having a biaxially textured surface;

b. depositing at least one biaxially textured buffer layer such that the buffer layer is supported by the substrate; and,

c. depositing a biaxially textured multiferroic oxide layer so as to be supported on the buffer layer.

18. The method of claim 17 , wherein the biaxially textured multiferroic oxide layer comprises at least one selected from the group consisting of multiferroic rare-earth manganites and ferrites and bismuth ferrites and manganites.

19. The method of claim 17 , wherein the biaxially textured multiferroic oxide layer comprises at least one selected from the group consisting of TbMnO 3 , HoMn 2 O 5 , LuFe 2 O 4 , BiFeO 3 and BiMnO 3 .

20. The method of claim 17 , further comprising the step of depositing a conducting layer that is in contact with the multiferroic oxide layer.

21. The method of claim 17 , wherein the conducting layer is supported by the multiferroic oxide layer.

22. The method of claim 21 , wherein the conducting layer is SrRuO 3 .

23. The method of claim 17 , wherein the substrate is formed by a RABiTS process.

24. The method of claim 17 , wherein the substrate is formed by ion beam assisted deposition (IBAD) process.

25. The method of claim 17 , wherein the substrate is formed by inclined-substrate deposition (ISD) process.

26. The method of claim 17 , wherein an SrRuO 3 layer is deposited such that the SrRuO 3 is supported by the buffer layer; and depositing a top layer of biaxially textured BiFeO 3 such that the BiFeO 3 is supported by the SrRuO 3 layer.

27. A polycrystalline multiferroic device article comprising:

a. a substrate having a biaxially textured surface;

b. a set of (100) oriented, biaxially textured buffer layer(s) supported by and in contact with the substrate selected from a group comprising Y 2 O 3 , YSZ, CeO 2 , MgO, SrRuO 3 ; and,

c. a (100), biaxially textured, multiferroic device layer supported by and in contact with the buffer layer(s) selected from a group comprising BaTiO 3 , PbTiO 3 , (PZT), and (PLZT), (PMN), KNbO 3 , K x Na 1-x NbO 3 , and K(Ta x Nb 1-x )O 3 , TbMnO 3 , HoMn 2 O 5 , LuFe 2 O 4 , BiFeO 3 and BiMnO 3 .

28. A polycrystalline multiferroic device article comprising:

a. a substrate having a biaxially textured surface;

b. a set of (100) oriented, biaxially textured buffer layer(s) supported by and in contact with the substrate selected from a group comprising Y 2 O 3 , YSZ, CeO 2 , MgO, SrRuO 3 ; and,

c. a (110), uniaxially oriented, multiferroic device layer supported by and in contact with the buffer layer(s) selected from a group comprising BaTiO 3 , PbTiO 3 , (PZT), and (PLZT), (PMN), KNbO 3 , K x Na 1-x NbO 3 , and K(Ta x Nb 1-x )O 3 , TbMnO 3 , HoMn 2 O 5 , LuFe 2 O 4 , BiFeO 3 and BiMnO 3 .

29. A polycrystalline multiferroic device article comprising:

a. a substrate having a biaxially textured surface;

b. a set of biaxially textured buffer layer(s) supported by and in contact with the substrate selected from a group comprising Y 2 O 3 , YSZ, CeO 2 , MgO, SrRuO 3 ; and,

c. a (111), uniaxially oriented, multiferroic device layer supported by and in contact with the buffer layer(s) selected from a group comprising BaTiO 3 , PbTiO 3 , (PZT), and (PLZT), (PMN), KNbO 3 , K x Na 1-x NbO 3 , and K(Ta x Nb 1-x )O 3 , TbMnO 3 , HoMn 2 O 5 , LuFe 2 O 4 , BiFeO 3 and BiMnO 3 .

30. A polycrystalline multiferroic device article comprising:

a. a substrate having a biaxially textured surface;

b. a set of (100) oriented, biaxially textured buffer layer(s) supported by and in contact with the substrate selected from a group comprising Y 2 O 3 , YSZ, CeO 2 , MgO, SrRuO 3 ; and,

c. a (100), biaxially textured, BiFeO 3 multiferroic device layer supported by and in contact with the buffer layer(s);

d. said BiFeO 3 layer having a similar in-plane and out-of-plane polarization.

31. A polycrystalline multiferroic device article comprising:

a. a substrate having a biaxially textured surface;

b. a set of (100) oriented, biaxially textured buffer layer(s) supported by and in contact with the substrate selected from a group comprising Y 2 O 3 , YSZ, CeO 2 , MgO, SrRuO 3 ; and,

c. a (110), biaxially textured, BiFeO 3 multiferroic device layer supported by and in contact with the buffer layer(s);

d. said BiFeO 3 layer having a higher out-of-plane polarization that the in-plane polarization.

32. A polycrystalline multiferroic device article comprising:

a. a substrate having a biaxially textured surface;

b. a set of (100) oriented, biaxially textured buffer layer(s) supported by and in contact with the substrate selected from a group comprising Y 2 O 3 , YSZ, CeO 2 , MgO, SrRuO 3 ; and,

c. a (111), biaxially textured, BiFeO 3 multiferroic device layer supported by and in contact with the buffer layer(s);

d. said BiFeO 3 layer having no in-plane polarization and a very high out-of-plane polarization.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 9, 2012
From: SHIN, JUNSOO
To: OAK RIDGE ASSOCIATED UNIVERSITIES
Reel/Frame 027498/0242 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 9, 2012
From: OAK RIDGE ASSOCIATED UNIVERSITIES
To: UT-BATTELLE, LLC
Reel/Frame 027498/0282 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 28, 2011
From: GOYAL, AMIT
To: UT-BATTELLE, LLC
Reel/Frame 026514/0559 →
CONFIRMATORY LICENSE Recorded May 20, 2011
From: UT-BATTELLE, LLC
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 026318/0735 →
Continuity (1)
Related Publication 20120213964A1 · Aug 23, 2012